ELECTRON GUN AND ITS METHOD OF USE
    61.
    发明专利

    公开(公告)号:JP2001325910A

    公开(公告)日:2001-11-22

    申请号:JP2000143087

    申请日:2000-05-16

    Abstract: PROBLEM TO BE SOLVED: To provide an electron gun capable of working at high angular current density suitable for use such as in an electronic photolithography device. SOLUTION: The electron consists of an electron emission cathode, a control electrode and an extraction electrode, of which the electron emission cathode is composed of rare earth hexaboride compound and the tip of the electron emission cathode activate the electron gun arranged between the control electrode and the extraction electrode under temperature limit area.

    SINGLE CRYSTAL NEEDLEELIKE HOT CATHODE

    公开(公告)号:JPS55165542A

    公开(公告)日:1980-12-24

    申请号:JP7229579

    申请日:1979-06-11

    Applicant: HITACHI LTD

    Abstract: PURPOSE:To uniform and stable thermions by using a zirconium carbide whisker or a whisker composed primarily of zirconium cabide. CONSTITUTION:A single crystal needle-like hot-cathode has an electron-radiating material composed of zirconium carbide whisker or a zirconium carbide-dominated zirconium whisker, having regular quadranglar, regular hexagonal-columnar, or regular octagonal-columnar form. The zirconium carbide-dominated whisker contains at least one selected from titanium, hafnium, niobium, and tantalum.

    64.
    发明专利
    失效

    公开(公告)号:JPS4944662A

    公开(公告)日:1974-04-26

    申请号:JP5875873

    申请日:1973-05-28

    STABLE METAL OXIDE CATALYSTS FOR METAL OXIDE LASER IONIZATION-MASS SPECTROMETRY
    65.
    发明申请
    STABLE METAL OXIDE CATALYSTS FOR METAL OXIDE LASER IONIZATION-MASS SPECTROMETRY 审中-公开
    稳定的金属氧化物催化剂用于金属氧化物激光离子质谱

    公开(公告)号:WO2015168337A1

    公开(公告)日:2015-11-05

    申请号:PCT/US2015/028368

    申请日:2015-04-29

    Abstract: Oxides of lanthanide metals are used to create stable surfaces for use in laser desorption ionization mass spectrometry. The disclosed lanthanide metal oxide surfaces are used to identify and characterize fatty acids from microorganism allowing profiling of the microorganism to the strain level, including antibiotic resistance. Cerium oxide, CeO2, was used to create a stable surface for obtaining fatty acid profiles of bacterial pathogens. Cross validation of results obtained using the disclosed methods, systems, and surfaces, demonstrated greater than 95% accuracy that did not suffer long-term degradation. Bacteria were identified by the disclosed methods, systems, and surfaces with greater than 98% at the species level and 96% at the strain level. Comparisons with existing technologies demonstrate that the presently disclosed methods, systems, and surfaces provide for surprisingly enhanced accuracy and reliability in profiling and identification.

    Abstract translation: 镧系金属的氧化物用于制造用于激光解吸电离质谱的稳定表面。 所公开的镧系元素金属氧化物表面用于鉴定和表征来自微生物的脂肪酸,允许将微生物描绘到菌株水平,包括抗生素抗性。 使用氧化铈CeO 2来产生稳定的表面以获得细菌病原体的脂肪酸谱。 使用公开的方法,系统和表面获得的结果的交叉验证显示出不会遭受长期退化的大于95%的准确度。 通过公开的方法,系统和表面鉴定细菌,在物种水平上具有大于98%的表达,在应变水平上鉴定出96%的细菌。 与现有技术的比较表明,目前公开的方法,系统和表面提供了令人惊奇的增强的分析和识别中的准确性和可靠性。

    電子源およびその製造方法
    66.
    发明申请
    電子源およびその製造方法 审中-公开
    电子源及其制造方法

    公开(公告)号:WO2018016286A1

    公开(公告)日:2018-01-25

    申请号:PCT/JP2017/023933

    申请日:2017-06-29

    Abstract: 電子放出材料の消耗を抑制することができる、電子源を提供する。 本発明によれば、電子放出材料と、前記電子放出材料の側面を被覆する電子放出制限材料とを有する電子源であって、前記電子放出制限材料の仕事関数が前記電子放出材料の仕事関数よりも高く、前記電子放出制限材料の熱輻射率が電子放出材料の熱輻射率よりも低いことを特徴とする電子源が提供される。

    Abstract translation: 提供了一种能够抑制电子发射材料的消耗的电子源。 根据本发明,提供了一种包括电子发射材料和覆盖电子发射材料的侧表面的电子发射限制材料的电子源,其中电子发射限制材料的功函数高于电子发射材料的功函数 并且电子发射限制材料的热发射率低于电子发射材料的热发射率。

    Electron guns for electron beam tools

    公开(公告)号:US10573481B1

    公开(公告)日:2020-02-25

    申请号:US16203510

    申请日:2018-11-28

    Inventor: Victor Katsap

    Abstract: An electron emission apparatus, an electron gun, and a method of fabrication of the electron gun are provided. The electron gun includes a cathode, a Wehnelt, and an anode. The cathode is configured to provide an electron beam. The Wehnelt has a bore. The bore is configured to pass the electron beam. The anode is disposed proximate to the cathode. The diameter of the bore of the Wehnelt and the offset between the Wehnelt and the cathode satisfy a predetermined dimensional relationship. The predetermined dimensional relationship is at least a function of a diameter of the bore of the anode and a distance between the Wehnelt and the anode.

    Thermionic cathode with even electric field distribution on electron emitting surface
    68.
    发明授权
    Thermionic cathode with even electric field distribution on electron emitting surface 有权
    在电子发射表面具有均匀电场分布的热电阴极

    公开(公告)号:US09299525B2

    公开(公告)日:2016-03-29

    申请号:US14047827

    申请日:2013-10-07

    Inventor: Ryoei Kobayashi

    Abstract: A thermionic cathode of an embodiment includes a carbon coating applied to an outer surface of the side, the carbon coating comprising a contiguous extended portion surrounding the upper section and spaced apart from said upper section by a gap having 1 μm or more and 10 μm or less in width and having a difference of 1 μm or less in the width between a maximum value and a minimum value in a periphery of the electron emitting surface.

    Abstract translation: 实施方案的热离子阴极包括施加到侧面的外表面的碳涂层,碳涂层包括围绕上部的邻接的延伸部分并且与上部分隔开具有1μm或更大和10μm的间隙,或 宽度较小,并且在电子发射表面的周围的最大值和最小值之间的宽度上具有1μm或更小的差。

    Thermal-field type electron source composed of transition metal carbide material with artificial facet
    69.
    发明授权
    Thermal-field type electron source composed of transition metal carbide material with artificial facet 有权
    由过渡金属碳化物材料与人造面组成的热场型电子源

    公开(公告)号:US09240301B1

    公开(公告)日:2016-01-19

    申请号:US13851732

    申请日:2013-03-27

    Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

    Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射,即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向,例如(100),(210)和(310) 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度,远光束电流源的先进成像应用的扫描电子显微镜(SEM)中是特别有用的。

    Electron gun and electron beam device
    70.
    发明授权
    Electron gun and electron beam device 有权
    电子枪和电子束装置

    公开(公告)号:US09070527B2

    公开(公告)日:2015-06-30

    申请号:US14000988

    申请日:2011-02-25

    Applicant: Hiroshi Yasuda

    Inventor: Hiroshi Yasuda

    Abstract: An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.

    Abstract translation: 电子枪阴极(104)为柱状,通过加热发射电子。 覆盖电子枪阴极的底部和侧面的保持器(103)具有导电性并保持电子枪阴极,并且由处于加热状态时不易与电子枪阴极反应的材料构成, 被提供。 电子枪阴极(104)的尖端从保持器(103)突出以露出,并且通过向尖端施加电场,从尖端向前方发射电子。

Patent Agency Ranking