-
公开(公告)号：JP2005062167A
公开(公告)日：2005-03-10
申请号：JP2004216369
申请日：2004-07-23
Applicant: Varian Spa , ヴァリアン ソシエタ ペル アジオーニ
Inventor： CORREALE RAFFAELE
CPC classification number: G01L21/34
Abstract: PROBLEM TO BE SOLVED: To provide a miniaturized vacuum gauge that has high sensitivity and does not disturb the measurement of pressure greatly.
SOLUTION: An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 more concretely after operating a vacuum pump. The vacuum gauge comprises a cathode 17 for emitting electrons, a grid 13 for accelerating electrons emitted by the cathode, and a plate 15 for capturing gas ions or positively ionized molecules. The plate is arranged outside the grid. The value of the residual pressure in the container can be determined by measuring a plate current by a galvanometer.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供具有高灵敏度并且不会大大影响压力测量的小型化真空计。 解决方案：电离真空计在操作真空泵之后更具体地测量残留在容器10中的气态物质的残留压力。 真空计包括用于发射电子的阴极17，用于加速由阴极发射的电子的栅极13和用于捕获气体离子或正离子化分子的板15。 板被布置在电网外。 容器中残留压力的值可以通过用电流计测量板电流来确定。 版权所有（C）2005，JPO＆NCIPI
-
公开(公告)号：JP2000353492A
公开(公告)日：2000-12-19
申请号：JP2000116161
申请日：2000-04-18
Applicant: CIT ALCATEL
Inventor： PIERREJEAN DIDIER
Abstract: PROBLEM TO BE SOLVED: To provide a gas detecting or measuring method and a device reduced in danger of breakdown of a field emission cathode. SOLUTION: The system for generating electrons with a field emission cathode 1 includes an array of electron emission micro-points 4-7 correlated with a grid 13 and carried by a substrate 3, and the substrate 3 has integral heater means 25-28 for heating the micro-points 4-7 in the range of about 300-400 deg.C and keeping the micro-points 4-7 at the temperature during electron emission. The cathode 1 can function at a higher residual air pressure without the danger of breakdown.
-
公开(公告)号：JP2000039375A
公开(公告)日：2000-02-08
申请号：JP20611598
申请日：1998-07-22
Applicant: SUKEGAWA ELEC , MUSASHINO ENG KK
Inventor： WATANABE FUMIO , MIYAMOTO KAZUO
Abstract: PROBLEM TO BE SOLVED: To obtain an ion source which prevents a gas from being adsorbed to an electron collector during the operation of the ion source and which is not influenced by electron simulated desorption(ESD). SOLUTION: In an ion source, an airtight vacuum chamber 5 which is maintained in a vacuum state is provided, an electron emitter 1 which is arranged inside the vacuum chamber 5 and which emits electrons into the vacuum chamber 5 is provided, an electron collector 2 which holds and moves the electrons emitted from the electron emitter 1 is provided, and an ion collector 3 which pulls out ions generated inside the vacuum chamber 5 is provided. In addition, a heating means which heats the electron collector 2 by a means other than an electron impact means is provided. A temperature rise at 600 deg.C or higher at which a gas emission due to the diffusion of a gas from the electron collector 2 is increased is prevented. A temperature range of 400 to 600 deg.C is set as a temperature range which can prevent the adsorption of gas molecules surely is set.
-
公开(公告)号：JPH1154070A
公开(公告)日：1999-02-26
申请号：JP21207697
申请日：1997-08-06
Applicant: NEC CORP
Inventor： ITO FUMINORI
Abstract: PROBLEM TO BE SOLVED: To assure quality as a vacuum pump by enhancing exhausting capability to rare gas as well as active gas and provide a getter effect well reproducible and stable over a long period of time. SOLUTION: This vacuum pump is equipped with a first conductive substrate 2 having a multiplicity of micro projection parts 5, and a second conductive substrate 4 which is disposed at a fixed space from the first conductive substrate 2 and to which a potential lower than that the micro projection parts 5 have is applied. Gate electrodes 3 confronting the second conductive substrate 4 are disposed on the first conductive substrate 2 via insulation layers 6, and the gate electrodes 3 are positioned near the micro protection parts 5 and each comprise an electrode to which a potential lower than that the micro projection parts 5 have is applied.
-
公开(公告)号：JPH07153419A
公开(公告)日：1995-06-16
申请号：JP30268493
申请日：1993-12-02
Applicant: JAPAN RES DEV CORP , OSHIMA CHUHEI
Inventor： OSHIMA CHUHEI
Abstract: PURPOSE:To prevent a stain in an ionizing chamber and attain pressure measurement or mass spectrometry with high accuracy in the ultra-high vacuum atmosphere. CONSTITUTION:An ionizing chamber 2 is made of a noble metal material which is inactive in adsorption of a gaseous molecule. A cold cathode incapable of generating an evaporation material is used as an electron source 6. In the case of use of a hot cathode, a shielding plate is disposed along an electron orbit 3, and only an electron is introduced into the ionizing chamber 2 via a reflection plate. Consequently, an ESD ion is not taken into a collector 5 so that a pressure or mass in the ultra-high vacuum atmosphere can be measured with high accuracy.
-
Patent Agency Ranking
公开(公告)号：JPH0656347B2
公开(公告)日：1994-07-27
申请号：JP29791887
申请日：1987-11-27
Applicant: LEYBOLD AG
Inventor： HANSU RINPU
-
-
公开(公告)号：JP6964202B2
公开(公告)日：2021-11-10
申请号：JP2020566591
申请日：2019-05-21
Applicant: エム ケー エス インストルメンツ インコーポレーテッド , MKS INSTRUMENTS,INCORPORATED
Inventor： ブラッカー・ジェラルド・エー , スウィニー・ティモシー・シー , パーシー・クリントン・エル
-
公开(公告)号：JP2017198711A
公开(公告)日：2017-11-02
申请号：JP2017145286
申请日：2017-07-27
Applicant: インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング
Inventor： アンドレアウス,ベルンハルト , エンデレス,ロルフ , ビュスト,マルティン , ウンテルマルゾネル,オスカル , ストッカー,ルドルフ
Abstract: 【課題】改良された電離真空測定セルを提供する。 【解決手段】電離真空測定セルは、陽極(3 A )と陰極(4 K )とを測定チャンバ(107)内に含む。測定チャンバ(107)は、外側に向かって陰極(4 K )の接続ロッド(104)のための真空気密フィードスルー(103)を有するハウジング(101)内に配置される。測定チャンバ(107)は、ロッド(104)を、絶縁性のみであるフィードスルー(109)において保持する。ハウジング(101)における測定チャンバ(107)は、解放可能なプラグ接続(106)によって交換され得る。 【選択図】図7
-
公开(公告)号：JP5284079B2
公开(公告)日：2013-09-11
申请号：JP2008500171
申请日：2006-03-02
Inventor： ヴェツィッヒ ダニエル , ゲルダウ ルードルフ
IPC: H01J41/06
-
-
-
-
-
-
-
-
-
Search Results
577
records
(took 0.024 seconds)
