A METHOD OF MANUFACTURING ELECTRONIC DEVICES AND CORRESPONDING ELECTRONIC DEVICE

    公开(公告)号:EP3718961A1

    公开(公告)日:2020-10-07

    申请号:EP20164126.3

    申请日:2020-03-19

    Abstract: A method of manufacturing electronic devices (10), comprises providing on a support member (20) such as a tape:
    - a first electronic component (12), such as a sensor, having opposed first (12a) and second (12b) surfaces and arranged on the support member (20) with the second surface (12b) towards the support member (20), wherein the first electronic component (12) has a thickness between the opposed first (12a) and second (12b) surfaces,
    - a second electronic component (14), such as an IC, mounted on a substrate (16) and arranged on the support member (20) with a substrate surface opposed the second electronic component (14) and facing towards the support member (20), wherein the substrate (16) and the second electronic component (14) have a joint thickness which is less than the thickness of the first electronic component (12),
    - molding onto the support member (20) having arranged thereon the first (12) and second (14) electronic components package molding material (24) to encapsulate the second electronic component (14) and leaving exposed the first surface (12a) of the first electronic component (12), and
    - separating the support member (20) to expose the second surface (12b) of the first electronic component (12) and the substrate surface of the substrate (16) opposed the at least one second electronic component (14) .

    IMPROVED MICRO-ELECTRO-MECHANICAL MICROPHONE, ELECTRONIC SYSTEM INCLUDING THE MICRO-ELECTRO-MECHANICAL MICROPHONE AND MANUFACTURING PROCESS
    78.
    发明公开
    IMPROVED MICRO-ELECTRO-MECHANICAL MICROPHONE, ELECTRONIC SYSTEM INCLUDING THE MICRO-ELECTRO-MECHANICAL MICROPHONE AND MANUFACTURING PROCESS 审中-公开
    VERBESSERTES MIKROELEKTROMECHANISCHES MIKROFON,ELEKTRONISCHES SYSTEM MIT DEM MIKROELEKTROMECHANISCHEN MIKROFON UND HERSTELLUNGSVERFAHREN

    公开(公告)号:EP3113511A1

    公开(公告)日:2017-01-04

    申请号:EP16175620.0

    申请日:2016-06-22

    Abstract: A micro-electro-mechanical microphone comprising: a substrate (2); a sensor chip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanical electro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) and is operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds the sensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) via the bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6) and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) and the sensor chip (5) at a first distance and a second distance, respectively, therefrom, for defining a first trench (19) between the bonding ring (16) and the barrier (18) and a second trench (25) between the barrier (18) and the sensor chip (5).

    Abstract translation: 一种微机电麦克风,包括:基板(2); 传感器芯片(5),其耦合到所述基板(2)并且集成了微电机电声换能器(35); 控制芯片(6),其连接到所述基板(2)并且可操作地耦合到所述传感器芯片(5); 围绕传感器芯片(5)和控制芯片(6)的接合环(16); 盖(3),其经由所述接合环(16)联接到所述基板(2),并形成容纳所述控制芯片(6)和所述传感器芯片(5)的声室(4); 阻挡层(18),其分别在所述接合环(16)和所述传感器芯片(5)之间以其第一距离和第二距离延伸,用于限定所述接合环(16)和所述传感器芯片(5)之间的第一沟槽(19) 和阻挡层(18)和位于阻挡层(18)和传感器芯片(5)之间的第二沟槽(25)。

    MICROELECTROMECHANICAL MICROPHONE AND PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MICROPHONE
    79.
    发明公开
    MICROELECTROMECHANICAL MICROPHONE AND PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MICROPHONE 审中-公开
    MIKROELEKTROMECHANISCHES MIKROFON UND VERFAHREN ZUR HERSTELLUNG EINES MIKROELEKTROMECHANISCHEN MIKROFONS

    公开(公告)号:EP3113510A1

    公开(公告)日:2017-01-04

    申请号:EP16175630.9

    申请日:2016-06-22

    Abstract: A microelectromechanical microphone includes: a supporting substrate (2), having a first face (2a) and a second face (2b); a sensor chip (5), bonded to the first face (2a) of the supporting substrate (2) and integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5), at least one portion of the control chip (6) being comprised between the first face (2a) and the second face (2b) of the supporting substrate (2). The sensor chip (5) is at least partially arranged on top of the control chip (6).

    Abstract translation: 微电机麦克风包括:具有第一面(2a)和第二面(2b)的支撑衬底(2); 传感器芯片(5),其结合到所述支撑基板(2)的第一面(2a)并且集成微机电电声换能器(35); 以及可操作地耦合到所述传感器芯片(5)的控制芯片(6),所述控制芯片(6)的至少一部分包括在所述支撑衬底(2)的第一面(2a)和第二面(2b)之间 )。 传感器芯片(5)至少部分地布置在控制芯片(6)的顶部上。

    AN ELECTRONIC DEVICE AND CORRESPONDING MANUFACTURING METHOD

    公开(公告)号:EP3718959A1

    公开(公告)日:2020-10-07

    申请号:EP20164136.2

    申请日:2020-03-19

    Abstract: An electronic device (10) comprises:
    - one or more electronic components (such as a MEMS 12a and an ASIC 12b) arranged on a substrate (14),
    - a cap member (16) applied onto the substrate (14) and covering the electronic component(s) arranged thereon, the cap member (16) having an opening (18) at the electronic component(s),
    - a filling of encapsulant material such as a gel (24) in the cap member (16), the encapsulant material (24) sealingly encapsulating the electronic component(s) arranged on the substrate (14).
    The cap member (16) comprises an outer wall (16a) having the opening (18) therein and inner wall (16b) surrounding the electronic component(s),
    - the inner wall (16b) extends from a proximal end at the substrate (14) towards a distal end facing the opening (18) in the outer wall (16a) to provide a reception chamber for the electronic component(s) within the inner wall (16b) and a peripheral chamber between the inner wall (16b) and the outer wall (16a) of the cap member (16), wherein the peripheral chamber of the cap member (16) surrounds the reception chamber for the electronic component(s), and
    - the filling of encapsulant material (24) is provided in the reception chamber for the electronic component (s) .

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