Abstract:
A MEMS transducer (1) has a micromechanical sensing structure (10) and a package (46). The package (46) is provided with a substrate (45), carrying first electrical-connection elements (47), and with a lid (25), coupled to the substrate to define an internal cavity (24), in which the micromechanical sensing structure (10) is housed. The lid (25) is formed by: a cap layer (20) having a first surface (20a) and a second surface (20b), set opposite to one another, the first surface (20a) defining an external face of the package (46) and the second surface (20b) facing the substrate (45) inside the package (46); and a wall structure (21), set between the cap layer (20) and the substrate (45), and having a coupling face (21a) coupled to the substrate (45). At least a first electrical component (10, 11) is coupled to the second surface (20b) of the cap layer (20), inside the package (46), and the coupling face (21a) of the wall structure (21) carries second electrical-connection elements (30), electrically connected to the first electrical component (10, 11) and to the first electrical-connection elements (47).
Abstract:
A micro-electro-mechanical microphone comprising: a substrate (2); a sensor chip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanical electro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) and is operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds the sensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) via the bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6) and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) and the sensor chip (5) at a first distance and a second distance, respectively, therefrom, for defining a first trench (19) between the bonding ring (16) and the barrier (18) and a second trench (25) between the barrier (18) and the sensor chip (5).
Abstract:
A method of manufacturing electronic devices (10), comprises providing on a support member (20) such as a tape: - a first electronic component (12), such as a sensor, having opposed first (12a) and second (12b) surfaces and arranged on the support member (20) with the second surface (12b) towards the support member (20), wherein the first electronic component (12) has a thickness between the opposed first (12a) and second (12b) surfaces, - a second electronic component (14), such as an IC, mounted on a substrate (16) and arranged on the support member (20) with a substrate surface opposed the second electronic component (14) and facing towards the support member (20), wherein the substrate (16) and the second electronic component (14) have a joint thickness which is less than the thickness of the first electronic component (12), - molding onto the support member (20) having arranged thereon the first (12) and second (14) electronic components package molding material (24) to encapsulate the second electronic component (14) and leaving exposed the first surface (12a) of the first electronic component (12), and - separating the support member (20) to expose the second surface (12b) of the first electronic component (12) and the substrate surface of the substrate (16) opposed the at least one second electronic component (14) .
Abstract:
A microelectromechanical microphone includes: a substrate (2); a sensor chip (5), integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5). The sensor chip (5) and the control chip (6) are bonded to the substrate (2), and the sensor chip (5) in part overlies the control chip (6). The sensor chip (5) the has a first portion fixed to a face (6a) of the control chip (6) and comprises a transduction member (37) acoustically communicating with a sound port (11).
Abstract:
A MEMS transducer (1) has a micromechanical sensing structure (10) and a package (46). The package (46) is provided with a substrate (45), carrying first electrical-connection elements (47), and with a lid (25), coupled to the substrate to define an internal cavity (24), in which the micromechanical sensing structure (10) is housed. The lid (25) is formed by: a cap layer (20) having a first surface (20a) and a second surface (20b), set opposite to one another, the first surface (20a) defining an external face of the package (46) and the second surface (20b) facing the substrate (45) inside the package (46); and a wall structure (21), set between the cap layer (20) and the substrate (45), and having a coupling face (21a) coupled to the substrate (45). At least a first electrical component (10, 11) is coupled to the second surface (20b) of the cap layer (20), inside the package (46), and the coupling face (21a) of the wall structure (21) carries second electrical-connection elements (30), electrically connected to the first electrical component (10, 11) and to the first electrical-connection elements (47).
Abstract:
An electronic device (10) comprises: - one or more electronic components (such as a MEMS 12a and an ASIC 12b) arranged on a substrate (14), - a cap member (16) applied onto the substrate (14) and covering the electronic component(s) arranged thereon, the cap member (16) having an opening (18) at the electronic component(s), - a filling of encapsulant material such as a gel (24) in the cap member (16), the encapsulant material (24) sealingly encapsulating the electronic component(s) arranged on the substrate (14). The cap member (16) comprises an outer wall (16a) having the opening (18) therein and inner wall (16b) surrounding the electronic component(s), - the inner wall (16b) extends from a proximal end at the substrate (14) towards a distal end facing the opening (18) in the outer wall (16a) to provide a reception chamber for the electronic component(s) within the inner wall (16b) and a peripheral chamber between the inner wall (16b) and the outer wall (16a) of the cap member (16), wherein the peripheral chamber of the cap member (16) surrounds the reception chamber for the electronic component(s), and - the filling of encapsulant material (24) is provided in the reception chamber for the electronic component (s) .