公开(公告)号：JPH075396A

公开(公告)日：1995-01-10

申请号：JP14230193

申请日：1993-06-14

Applicant: CANON KK

Inventor： ASAI AKIRA ,  YOSHII MINORU ,  SUZUKI TOSHIAKI

IPC: G02B27/54

Abstract: PURPOSE:To easily attain the schlieren observation of a phenomenon changing at a high speed by a compact device. CONSTITUTION:At the time of schlieren-observing a phenomenon changing at a high speed by using a pulse light generator 1 equipped with a pulse generating circuit 15 and a delay circuit 16 as a light source, and using an image pickup element 10 as an image pickup surface, a pulse light irradiating period is set according to the change of the phenomenon, so that the phenomenon can be simply observed. When the phenomenon has periodicity, a signal is fetched by a phenomenon generating circuit 19, the fetched signal is used as a trigger signal, and the pulse light irradiating period is synchronized with the period of the phenomenon, so that the phenomenon can be observed in the same timing within one period. Moreover, the phase of the pulse light irradiating period for the period of the phenomenon is delayed by using the delay circuit 16, so that the phenomenon can be observed in an arbitrary timing within one period.

公开(公告)号：JPH0587527A

公开(公告)日：1993-04-06

申请号：JP24920491

申请日：1991-09-27

Applicant: CANON KK

Inventor： MATSUMOTO TAKAHIRO ,  NOSE TETSUSHI ,  YOSHII MINORU ,  SAITO KENJI ,  CHITOKU KOICHI

IPC: G01B11/00 ,  G01D5/38 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable light scattering to be eliminated and achieve a high accuracy by uisng a mark for measuring two diffraction gratings with a different pitch and using a light with an order of diffraction where a diffraction direction of a diffraction light interference light which is obtained from each diffraction gratings is different. CONSTITUTION:Lights with frequencies fl and f2 which are generated from a Zeman laser 1 are divided by a polarization beam splitter 2. A light with the frequency fl which is reflected and a light with the frequency 2 which is passed through the beam splitter 2 are deflected by a mirror 3 and impinge on a diffraction grating 6 on a mask 5 and a diffraction grating 8 on a wafer 7 at specified angles, respectively. At this time, by using diffraction gratings 6 and 8 with different pitches, diffraction directions of the gratings 6 and 8 are different, thus enabling a diffraction light from each diffraction grating to be separated. +-primary diffraction lights from the grating 6 and secondary and primary diffraction lights interfere each other, thus becoming two optical beam signals. An interference light which is generated when two lights are overlapped is photoelectrically detected by a sensor 11 and a phase difference is measured by a phasedifference meter 12.

公开(公告)号：JPH03204279A

公开(公告)日：1991-09-05

申请号：JP25890

申请日：1990-01-05

Applicant: CANON KK

Inventor： TOKUMITSU JUN ,  YOSHII MINORU ,  SUDA SHIGEYUKI ,  SEKINE MASAYOSHI

IPC: G02B7/28 ,  H04N5/232 ,  H04N9/04

Abstract: PURPOSE:To detect the focal state accurately regardless of the degree of contrast by detecting information relating to the width of a color transit region from a signal obtained through the combination of a color component of a video signal of a color transit region of an object and discriminating the focal state depending on the range in the information relating to the width of the color transit region. CONSTITUTION:A focus detection signal generating circuit 54 generates a focus detection signal from combinations of colors of video signals stored in a frame memory 52. A width calculation circuit 55 calculates the concaved width or the width of the transition region from three signals from the focus detection signal generating circuit 54 and a minimum value detection circuit 56 detects a minimum value in the range finding region in the widths calculated by the focus detection signal generating circuit 54. That is, the combination of the position of an object and the color signal in which the color is changing most rapidly is decided. Then a region setting circuit 58 decides the focus detection region based on the detection of the minimum value detection circuit 56. Then the focus detection with high accuracy is implemented.

公开(公告)号：JPH03204277A

公开(公告)日：1991-09-05

申请号：JP25690

申请日：1990-01-05

Applicant: CANON KK

Inventor： TOKUMITSU JUN ,  YOSHII MINORU ,  SUDA SHIGEYUKI ,  SEKINE MASAYOSHI

IPC: G02B7/28 ,  H04N5/232 ,  H04N9/04

Abstract: PURPOSE:To discriminate whether a focus state is a front focus or a rear focus by comparing image signals of each color component of a pickup signal so as to recognize the relation of position of an image pickup face with respect to a focal position. CONSTITUTION:The relative relation of quantity in blur circles 20R, 20G, 20B of components of R, G, B signals in an image pickup face 20 at focusing is changing but each diameter is almost minimized. In the case of an image pickup face 22 of a font focus, opposite to the case with a rear focus, the blur circle 22B of the B component is larger than the blur circle 22R of the R component and the blur circle 22G of the G component is intermediate between them. In terms of a spectrum, the high frequency component of the spectrum 12B of the B component is deteriorated more than that of the spectrum 12R of the R component. The relation of quantity of the blur circle in the R component is opposite in the case of the front focus and the rear focus and the high frequency component quantity is reversed even in the spectrum. Thus, whether the focal state is front focus or rear focus is immediately discriminated by comparing the spectrums of the R, B component at a proper frequency fo.

公开(公告)号：JPH02213706A

公开(公告)日：1990-08-24

申请号：JP3355089

申请日：1989-02-15

Applicant: CANON KK

Inventor： ABE NAOTO ,  YOSHII MINORU

IPC: G01B11/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To detect the relative position between 1st and 2nd objects without having the influence of disturbance by determining the position with respect to the value of the correlation between the shapes of the light intensity distributions of at least >=2 luminous fluxes having the position information between the 1st and 2nd objects. CONSTITUTION:Incident luminous fluxes 101a, 101b are formed by collimating the luminous fluxes from a light emitting source to collimated beams of light by a collimator lens. Mask alignment mark pairs 103a, 103b are formed on a mask 102 which receives the incident luminous fluxes 101a, 101b. Wafer alignment mark pairs 103a, 103b are formed on a wafer 103. The luminous fluxes 104a, 104b have alignment information by passing the mark pairs 102a, 102b and the mark pairs 103a, 103b. Photoelectric converting elements 105a, 105b receive the luminous fluxes 104a, 104b and a signal processing section 106 process the outputs of the elements 105a, 105b. The position relation between the two objects is exactly determined even in such a case in which the shapes of the light intensity distributions of the luminous fluxes detected in this way are changed by the influence of noises, etc.

公开(公告)号：JPH021506A

公开(公告)日：1990-01-05

申请号：JP27493788

申请日：1988-10-31

Applicant: CANON KK

Inventor： SAITO KENJI ,  MATSUGI MASAKAZU ,  NIWA YUKICHI ,  NOSE TETSUSHI ,  YOSHII MINORU ,  SUDA SHIGEYUKI

IPC: G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To execute the alignment between two objects with high accuracy by providing two physico-optical elements on two objects, further converting a wave front which has been converted by the first physico-optical element, by the second physico-optical element, and thereafter, leading it to a detector. CONSTITUTION:On the first object 1 and the second object 2 in which it is desired to evaluate a relative misalignment, the first and the second physico- optical elements 3a, 4a such as a zone plate, etc., are provided, respectively, a luminous flux 5 is made incident on the first physico-optical element 3a, its emitted light beam 6 is made incident on the second physico-optical element 4a, and its emitted light 7 is led to a detector 8 such as a position sensor, etc. The detector 8 detects a misalignment between the objects 1, 2, based on a misalignment DELTAdelta from an incident luminous flux shown by a dotted line. In this case, refracting power of the optical elements 3a, 4a is set so as to become positive or negative in accordance with a relation of an interval (d) between two objects, a distance b1a between the object 1 and a condensing position Q, an effective diameter of a luminous flux which is made incident on two optical elements 3a, 4a, etc.

公开(公告)号：JPH021503A

公开(公告)日：1990-01-05

申请号：JP3674589

申请日：1989-02-16

Applicant: CANON KK

Inventor： MATSUGI MASAKAZU ,  SAITO KENJI ,  SUDA SHIGEYUKI ,  NIWA YUKICHI ,  YOSHII MINORU ,  NOSE TETSUSHI ,  KURODA AKIRA

IPC: G01B11/00 ,  G01B11/26 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To improve the misalignment detection accuracy by providing two alignment marks and two reference marks on a mask and a wafer, respectively and detecting a misalignment between both of them by utilizing a luminous flux passing through each mark. CONSTITUTION:The first alignment mark 5 and the first reference mark 6 are formed on a mask 1, and also, the second alignment mark 3 and the second reference mark 4 are formed on a wafer 2, respectively. In this state, a diffracted light beam generated at the time when an alignment light 7 has been made incident on the first alignment mark 5 is made incident on the second alignment mark 3, and a position of its diffracted light beam is detected by the first detecting means 11. Also, a reference light beam 8 is made incident on the first reference mark 6, a luminous flux which has been emitted from the reference mark is made incident on the second reference mark 4, and a position of the luminous flux which has been emitted from the second reference mark is detected by the second detecting means. A CPU 11a sets an output signal of the second detecting means 12 as a reference signal, and detects a shift of a relative position of the mask 1 and the wafer 2 by utilizing both signals.

公开(公告)号：JPH01282817A

公开(公告)日：1989-11-14

申请号：JP11145788

申请日：1988-05-10

Applicant: CANON KK

Inventor： KAWAKAMI EIGO ,  YOSHII MINORU ,  UZAWA SHUNICHI

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To realize exposure, transfer distortion of which is minimized and which has high accuracy, by matching exposure luminous flux and a transfer exposure section with vertical and specified positional relationship. CONSTITUTION:An optical system 8 for adjusting an optical axis is displaced in parallel in a X'-Y' face by a second drive 17, and moved to a position crossing emitted light 3, and emitted light 3 is projected. When the optical system 8 is shifted to the position crossing emitted light 3 gradually, light near a visible region in emitted light 3 slowly appears as a spot 21 having a shape determined by the opening of a douser 10 in the visible field of an autocollimator 14. The optical system 8 for adjusting the optical axis is moved by the second drive 17. A transfer exposure section body 1 is shifted in the X-Y direction by first drives 2 so that the center of a mark coincides with the center of a spot on a reference plane 20 viewed at the center of a picture plane. The body 1 is turned by the drives 2 so that an inclination to an exposure beam optical axis is brought to zero. Accordingly, exposure, transfer distortion of which is minimized and which has high accuracy, is realized.

公开(公告)号：JPS63277904A

公开(公告)日：1988-11-15

申请号：JP11226287

申请日：1987-05-11

Applicant: CANON KK

Inventor： NOSE TETSUSHI ,  YOSHII MINORU ,  NIWA YUKICHI ,  KURODA AKIRA

IPC: G01D5/30 ,  G01B11/00 ,  G01D5/38 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68

Abstract: PURPOSE:To increase a stroke and to improve accuracy by providing one of two bodies which move relatively with a surface which slants in the relative moving direction and measuring the distance to said slanting surface by a position detecting means for a surface to be scanned which is arranged on the other body. CONSTITUTION:A diffraction grating GS is fixed to a moving stage SR on a surface plate SP in parallel to the moving direction A of the moving stage SR. Luminous flux emitted by a light source LD on a fine moving stage AFS is incident on the diffraction grating GS through a beam splitter HM2. Diffracted light beams L11 and L12 are reflected by corner cubes CC1 and CC2, diffracted again at a point P2 distant from the point P2 of the diffraction grating GS in the moving direction (arrow A) of the moving stage SR, and incident on photodetectors PD1 and PD2 through a polarization beam splitter BS. Then the quantity of the relative movement between a length measuring head MH and the diffraction grating is measured from the outputs of the photodetectors PD1 and PD2.

公开(公告)号：JPS60116077A

公开(公告)日：1985-06-22

申请号：JP22354783

申请日：1983-11-28

Applicant: CANON KK

Inventor： TANMACHI MASAHIRO ,  TAMATOSHI MASATO ,  YOSHII MINORU ,  ASANO NOBUYUKI ,  NIWA YUUKICHI

IPC: G06T1/00 ,  G06K9/00

Abstract: PURPOSE:To obtain a small-sized object information processor which can execute real time processing and can be simply constituted by detecting object information including distance information. CONSTITUTION:A visual sensor 2 includes a self-scanning type sensor array 15 such as a CCD, a measurement visual field is set in the visinity of an image-formation position of an image 12, and the range in which an image 12' moves in accordance with a distance of an object is used as a reference visual field. Data on a CCD array enter shift registors 26 and 27 at every measurement visual field and reference visual field through a quantization circuit, a gate 28 detects coincidence or noncoincidence. By a coincidence number comparator 24 and a coincidence position detection circuit 23, the position having the largest number of coincidence is obtained, and a distance from an object can be obtained in an object information signal output circuit 25. The visual sensor 2 is totally scanned by a scanner 30.