公开(公告)号：EP1532658A4

公开(公告)日：2007-02-28

申请号：EP03734278

申请日：2003-05-30

Applicant: SILICON LIGHT MACHINES CORP

Inventor： HUNTER JAMES A

IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  H01L21/00 ,  H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: G02B26/0833 ,  B81B2201/045 ,  B81C1/00531 ,  B81C2201/0132 ,  G02B26/0841

Abstract: In one embodiment, a micro device is formed by depositing a sacrificial layer over a metallic electrode (step 304), forming a moveable structure over the sacrificial layer (step 306), and then etching the sacrificial layer with a noble gas fluoride (step 308). Because the metallic electrode is comprised of a metallic material that also serves as an etch stop in the sacrificial layer etch, charge does not appreciably build up in the metallic electrode. This helps stabilize the driving characteristic of the moveable structure. In one embodiment, the moveable structure is a ribbon in a light modulator.

公开(公告)号：EP1602624A4

公开(公告)日：2006-12-27

申请号：EP04708917

申请日：2004-02-06

Applicant: SONY CORP

Inventor： NANIWADA KOJI

IPC: B81B3/00 ,  B81C1/00 ,  G02B6/34 ,  G02B26/08

CPC classification number: B81B3/0072 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B26/0808 ,  G02B26/0841

Abstract: The invention provides an MEMS element having improved characteristics, reducing beam strain deformation, and a method of producing the same, and a diffraction type MEMS element. The MEMS element of the invention comprises a substrate-side electrode, and a beam driven by an electrostatic force produced between it and the substrate-side electrode, the beam being formed of a plurality of thin films including a drive-side electrode, the beam being provided with a deformation preventing means for preventing beam deformation due to stress-induced strain in the thin films. The diffraction type MEMS element of the invention, which has the same substrate-side electrode as in the above arrangement, has a plurality of mutually independent beams opposed to the substrate-side electrode.

公开(公告)号：EP1640320A2

公开(公告)日：2006-03-29

申请号：EP05255634.7

申请日：2005-09-14

Applicant: IDC, LLC

Inventor： Cummings, William J. ,  Gally, Brian J. ,  Palmateer, Lauren ,  Floyd, Philip D. ,  Chui, Clarence

IPC: B81B7/00 ,  G02B26/08

CPC classification number: B81B7/0067 ,  B81B2201/045 ,  B81C2203/0109 ,  B81C2203/0145 ,  B81C2203/019 ,  G02B26/001

Abstract: A package structure 800 and method of packaging for an interferometric modulator 830 is described. A transparent substrate 810 having an interferometric modulator 830 formed thereon is shown. A backplane 820 is joined to the transparent substrate 810 with a seal 840 where the interferometric modulator is exposed to the surrounding environment through an opening 850 in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure 800.

Abstract translation: 描述了用于干涉式调制器830的封装结构800和封装方法。 示出了其上形成有干涉式调制器830的透明基板810。 背板820通过密封件840连接到透明基板810，其中干涉式调制器通过背板或密封件中的开口850暴露于周围环境。 在透明基板和背板接合之后，并且在任何期望的干燥剂，脱模材料和/或自对准单层引入到包装结构800中之后，密封该开口。

公开(公告)号：EP1193527B1

公开(公告)日：2006-03-22

申请号：EP01307609.6

申请日：2001-09-07

Applicant: Xerox Corporation

Inventor： Rosa, Michel A. ,  Peeters, Eric ,  Fork, David K.

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

CPC classification number: G02B6/3518 ,  B81B2201/045 ,  B81B2203/04 ,  B81C1/00666 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841

公开(公告)号：EP1278083A3

公开(公告)日：2004-09-22

申请号：EP02090242.5

申请日：2002-07-10

Applicant: NEC CORPORATION

Inventor： Utsunomiya, Motoyasu, c/o NEC Corporation

IPC: G02B6/35 ,  G02B26/08

CPC classification number: G02B6/357 ,  B81B3/0062 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556

Abstract: An analog beam-steering free-space optical switch for connecting and switching a plurality of optical signals includes a plurality of optical devices and electrostatic actuators for driving the optical devices. Each optical device is pivotally borne to allow rotation around a prescribed center,    and each electrostatic actuator includes the substrate that holds the optical devices and a plurality of driving electrodes secured to the substrate. The application of electrostatic voltage between an optical device and the driving electrodes generates electrostatic driving torque for causing the optical device to tilt with respect to the substrate around the center of rotation, whereby the direction of reflection of an optical signal is changed. The    driving electrodes are arranged in a radial pattern relative to the electrode center. Each driving electrode is formed such that the electrode width of a prescribed outer portion relative to the electrode center decreases with progression toward the outside. In addition, each driving electrode is shaped such that the width of a prescribed inner portion with respect to the electrode center decreases with progression toward the inside. Forming the driving electrodes in this way improves the driving torque characteristic of the micromirror and extends the range of steering angles within which stable positioning can be performed by low-voltage drive.

公开(公告)号：EP1390793A2

公开(公告)日：2004-02-25

申请号：EP02704815.6

申请日：2002-02-13

Applicant: Teem Photonics

Inventor： VALETTE, Serge

IPC: G02B26/08

CPC classification number: B81B3/0062 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: The invention concerns a micromirror comprising a fixed part (31), a mobile part (41, 48) including reflecting means (48) and articulating means linking the mobile part to the fixed part. Said micromirror is characterised in that the articulating means are formed by a pivot (47) located beneath the mobile part between the latter and the fixed part and designed to enable the mobile part to move along axes of rotation contained in the mobile part and passing through an axis of the pivot, and wherein the fixed part comprises at least a cavity (36) opposite at least a zone of one end of the mobile part. The invention also concerns an array of pivoting micromirrors and a method for making such micromirrors. Said micromirrors are useful in optical routing or image projection systems.

公开(公告)号：EP1193530A3

公开(公告)日：2003-08-13

申请号：EP01307643.5

申请日：2001-09-07

Applicant: Xerox Corporation

Inventor： Rosa, Michel A. ,  Fork, David K. ,  Peeters, Eric

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

CPC classification number: G02B6/3518 ,  B81B2201/045 ,  B81B2203/04 ,  B81C1/00666 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841

Abstract: Optical cross-connect (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a glass substrate.

公开(公告)号：EP1193528A3

公开(公告)日：2003-08-13

申请号：EP01307619.5

申请日：2001-09-07

Applicant: Xerox Corporation

Inventor： Rosa, Michel ,  Peeters, Eric

IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

CPC classification number: G02B6/3518 ,  B81B2201/045 ,  B81B2203/04 ,  B81C1/00666 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841

Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a silicon on insulator substrate.

公开(公告)号：EP1317762A1

公开(公告)日：2003-06-11

申请号：EP01978713.4

申请日：2001-08-17

Applicant: 3M Innovative Properties Company

Inventor： WEAVER, Billy, L. ,  GOETZ, Douglas, P. ,  HAGEN, Kathy, L. ,  HAMERLY, Mike, E. ,  SMITH, Robert, G. ,  THEISS, Silva, K.

IPC: H01H61/04 ,  B81B3/00

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/053 ,  B82Y15/00 ,  G02B6/352 ,  G02B6/3576 ,  H01G5/18 ,  H01H1/0036 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

公开(公告)号：EP1193528A2

公开(公告)日：2002-04-03

申请号：EP01307619.5

申请日：2001-09-07

Applicant: Xerox Corporation

Inventor： Rosa, Michel ,  Peeters, Eric

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B6/3518 ,  B81B2201/045 ,  B81B2203/04 ,  B81C1/00666 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841

Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a silicon on insulator substrate.

Abstract translation: 光学交叉连接系统（100）涉及用于将来自第一光纤（110）的光引导到第二光纤的微机电系统（MEMS）倾斜镜（106）的二维阵列（104）的一般概念 （111）。 二维阵列（104）中的每个MEMS倾斜镜（106）可以围绕两个非共线轴线（x，y）倾斜，并且由连接到绝缘体上硅衬底上的多个悬臂（450）悬挂。