Blank made of titanium-doped silica glass and method for the production thereof
    72.
    发明授权
    Blank made of titanium-doped silica glass and method for the production thereof 有权
    由钛掺杂的石英玻璃制成的坯料及其制造方法

    公开(公告)号:US09540271B2

    公开(公告)日:2017-01-10

    申请号:US14748344

    申请日:2015-06-24

    Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

    Abstract translation: 提供了一种用于EUV光刻的用于镜面基板的掺钛石英玻璃的空白件。 坯料包括具有反射膜并具有光学用途区域(CA)的表面部分,在该区域上的热膨胀系数(CTE)在坯料的厚度上平均的二维不均匀性(dCTE)分布分布平均 。 小于5ppb / K的最大不均匀性(dCTEmax)定义为CTE最大值和CTE最小值之间的差。 dCTEmax至少为0.5 ppb / K。 CA形成具有质心的非圆形区域。 dCTE分布轮廓不是旋转对称的,并且在CA上定义,使得被归一化为单位长度并延伸穿过该区域的质心的直线剖面产生了形成带宽小于的曲线的dCTE曲线族 0.5×dCTEmax。

    Barbell Optical Fiber And Method Of Making The Same
    75.
    发明申请
    Barbell Optical Fiber And Method Of Making The Same 有权
    杠铃光纤及其制作方法

    公开(公告)号:US20150110452A1

    公开(公告)日:2015-04-23

    申请号:US14395698

    申请日:2013-05-13

    Abstract: High aspect ratio core optical fiber designs, which could be semi-guiding, including a core region having a first refractive index and a high aspect ratio elongated cross-section along a slow axis direction, are described. An internal cladding having a second refractive index sandwiches the core and acts as a fast-axis signal cladding. The core has an edge region at both of its short edges that is in contract with edge-cladding regions having a barbell shape. The refractive index of the core regions, the refractive index of the internal claddings, and the refractive index of the edge-cladding regions, are selected so as to maximize the optical power of a lowest-order mode propagating in the fiber core, and to minimize the optical power of the next-order modes in the fiber core. A process to fabricate such a high aspect ratio core fiber is also provided.

    Abstract translation: 描述了可以是半导向的高纵横比纤芯光纤设计,包括沿慢轴方向具有第一折射率和高纵横比细长横截面的芯区域。 具有第二折射率的内部包层夹住芯并用作快轴信号包层。 芯具有在其短边缘处的边缘区域,其与具有杠铃形状的边缘包层区域收缩。 选择核心区域的折射率,内部包层的折射率和边缘包层区域的折射率,以使在纤维芯中传播的最低阶模的光功率最大化,并且 最小化光纤芯中下一阶模式的光功率。 还提供了制造这种高纵横比纤芯的方法。

    Method and apparatus for forming fused silica glass using multiple burners
    77.
    发明申请
    Method and apparatus for forming fused silica glass using multiple burners 有权
    使用多个燃烧器形成熔融石英玻璃的方法和装置

    公开(公告)号:US20090293545A1

    公开(公告)日:2009-12-03

    申请号:US12154908

    申请日:2008-05-28

    Abstract: A method for forming a silica glass blank includes generating soot using an array of soot producing burners, directing the soot along a first direction onto a bait, collecting the soot on the bait, imparting relative oscillatory motion having a repeat period between the array of soot producing burners and the bait along a second direction orthogonal to the first direction while collecting the soot, and offsetting the relative oscillatory motion by a selected distance along the second direction after each repeat period.

    Abstract translation: 一种用于形成二氧化硅玻璃坯料的方法包括使用产生烟炱的燃烧器阵列产生烟灰,将烟尘沿第一方向引导到诱饵上,将烟炱收集在诱饵上,赋予在烟炱阵列之间具有重复周期的相对振荡运动 在收集烟灰的同时沿着与第一方向正交的第二方向产生燃烧器和诱饵,并且在每个重复周期之后沿着第二方向将相对振荡运动偏移选定的距离。

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