DISPOSITIF POUR COMPENSER LA DÉRIVE D'UN DÉPHASAGE D'UN MODULATEUR D'ÉTAT DE POLARISATION D'UN FAISCEAU LUMINEUX
    72.
    发明申请
    DISPOSITIF POUR COMPENSER LA DÉRIVE D'UN DÉPHASAGE D'UN MODULATEUR D'ÉTAT DE POLARISATION D'UN FAISCEAU LUMINEUX 审中-公开
    用于补偿用于调制光束的极化状态的装置的相位移位的装置

    公开(公告)号:WO2015004358A1

    公开(公告)日:2015-01-15

    申请号:PCT/FR2014/051539

    申请日:2014-06-20

    Abstract: Un dispositif d'analyse et/ou de génération d'un état de polarisation d'un point de mesure d'un objet cible, le dispositif comprend : - un polariseur propre à sélectionner, dans une onde lumineuse incidente, un faisceau lumineux polarisé rectilignement selon une direction prédéfinie, - un premier élément biréfringent propre à être traversé par ledit faisceau lumineux, - un deuxième élément biréfringent identique au premier élément et propre à être traversé par ledit faisceau lumineux, ledit faisceau lumineux étant alors destiné à être dirigé directement ou indirectement vers ledit objet pour être réfléchi sous la forme d'un faisceau réfléchi. En outre, l'ensemble optique, constitué d'un ou plusieurs éléments optiques, est situé sur un trajet optique compris entre le premier élément et le deuxième élément, l'ensemble optique étant constitué de : - un nombre impair de miroirs, ou, - un nombre impair de lames demi-onde, ou, - un nombre confondu impair de miroirs ou lames demi-onde.

    Abstract translation: 本发明涉及一种用于分析和/或产生目标对象的测量点的偏振态的装置; 该装置包括:适于在入射光波中选择沿预定方向线性偏振的光束的偏振器; 适于使所述光束通过的第一双折射元件; 与第一元件相同并且适于使所述光束通过的第二双折射元件,所述光束然后直接或间接地指向所述物体,以便以反射光束的形式被反射。 另外,由一个或多个光学元件组成的光学组件位于第一元件和第二元件之间的光路中,该光学组件包括:奇数个反射镜,或奇数个半波片 ,或者奇数组合的镜子和半波片。

    微小粒子測定装置
    73.
    发明申请
    微小粒子測定装置 审中-公开
    微波测量装置

    公开(公告)号:WO2014061368A1

    公开(公告)日:2014-04-24

    申请号:PCT/JP2013/074002

    申请日:2013-08-30

    Abstract: 流路内を通流する微小粒子の位置を高精度で検出することが可能な微小粒子測定装置を提供する。流路を通流する微小粒子に光を照射する光照射部と、微小粒子から発せられた散乱光を検出する散乱光検出部とを有する微小粒子測定装置において、散乱光検出部に、微小粒子から発せられた光を集光する対物レンズと、対物レンズで集光された光のうち散乱光を第1散乱光及び第2散乱光に分割する光分割素子と、S偏光成分を受光する第1散乱光検出器と、光分割素子と第1散乱光検出器との間に配設され、第1散乱光に非点収差を与える非点収差素子とを設け、対物レンズの後側主点から非点収差素子の前側主点までの距離Lと、非点収差素子の焦点距離fとの関係が下記数式Iを満たすようにする。 1.5f≦L≦2.5f ・・・(I)

    Abstract translation: 提供能够精确地检测在通道中流动的微粒的位置的微粒测量装置。 一种微粒测量装置,具有用于照射在光路中流动的微粒的光照射单元和用于检测从微粒发射的散射光的散射光检测器,其中散射光检测器设置有用于聚集从 微粒,用于将散射光分离的光从被物镜聚光的光分解为第一散射光和第二散射光,第一散射光检测器,用于接收s偏振分量;以及散光元件,其为 设置在所述分光元件和所述第一散射光检测器之间,并且对所述第一散射光引入像散; 并且被设定为使得从物镜的后方主点到散光元件的前主点的距离(L)与像散元件的焦距(f)之间的关系满足以下表达式(I)。 1.5f≤L≤2.5f...(I)

    BIREFRINGENCE MEASUREMENT DEVICE AND BIREFRINGENCE MEASUREMENT METHOD

    公开(公告)号:EP3187856A4

    公开(公告)日:2018-04-25

    申请号:EP15835242

    申请日:2015-08-11

    CPC classification number: G01N21/23 G01N2201/0683

    Abstract: The present invention has a problem aiming to provide a birefringence measurement device capable of measuring a two-dimensional distribution of birefringence in a measurement target in real time and in detail using a simple configuration without a rotating mechanism. A birefringence measurement device 1A according to the present invention includes light flux generating means 2 for generating light flux L1, light flux irradiating means 3, 4, or 5 for irradiating a measurement target 20 with the light flux L1 in a predetermined polarization state, an imaging optical system 10 for forming an image from light flux L4 transmitted through the measurement target 20, a polarization/diffraction grating 8 disposed in a position within the imaging optical system 10, image pickup means 12 for generating a light-dark signal related to brightness of the image formed by the imaging optical system 10, and output means for outputting information regarding a phase difference for the light flux L4, the phase difference resulting from the transmission through the measurement target 20 and being determined on the basis of the light-dark signal, and the image pickup means 12 generates the light-dark signal for an image based on at least one beam of diffracted light L7 from among a plurality of beams of diffracted light produced by the polarization/diffraction grating 8.

    POLARIZATION SENSITIVE OPTICAL IMAGE MEASUREMENT SYSTEM, AND PROGRAM LOADED INTO SAID SYSTEM

    公开(公告)号:EP3153843A4

    公开(公告)日:2018-02-14

    申请号:EP15802877

    申请日:2015-06-03

    Applicant: UNIV TSUKUBA

    Abstract: Polarization-sensitive optical image measurement is subject to a non-negligible bias, and consequent deviation in birefringence, in a surrounding range of low SN ratios (signal-to-noise ratios) and low signal strengths; however, this deviation in birefringence is removed to make accurate quantitative measurement possible. Noise-containing OCT signals obtained by polarization OCT are processed using a birefringence calculation algorithm, to obtain measured birefringence, after which noise is statistically adjusted to simulate a measured birefringence distribution and determine the noise characteristics of the measured birefringence values, and then Monte Carlo calculations are repeated by assuming different values for the noise level and the true birefringence value, respectively, to form three-dimensional histogram of combinations of true birefringence values, SN ratios, and measured birefringence values, after which specified measured birefringence values and SN ratios are assumed from the three-dimensional histogram information to obtain a true birefringence probability density distribution, and true birefringence values are estimated from the true birefringence probability density distribution.

    METALLIC GRATINGS AND MEASUREMENT METHODS THEREOF
    79.
    发明公开
    METALLIC GRATINGS AND MEASUREMENT METHODS THEREOF 审中-公开
    金属光栅及其测量方法

    公开(公告)号:EP3221897A1

    公开(公告)日:2017-09-27

    申请号:EP15839312.4

    申请日:2015-09-08

    Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.

    Abstract translation: 这里在一个实施例中阐述了一种包括具有光栅图案的金属光栅的结构,金属光栅包括临界尺寸。 当暴露于电磁辐射时,金属光栅可以输出光谱分布,光谱分布具有特征。 光栅图案可以被配置为使得临界尺寸的变化产生光谱轮廓的特征值的偏移。 一种方法可包括将输入电磁辐射传播到具有二维周期性光栅图案的金属光栅上,并使用来自金属光栅的输出电磁辐射测量金属光栅的临界尺寸。

    BIREFRINGENCE MEASUREMENT DEVICE AND BIREFRINGENCE MEASUREMENT METHOD
    80.
    发明公开
    BIREFRINGENCE MEASUREMENT DEVICE AND BIREFRINGENCE MEASUREMENT METHOD 审中-公开
    双折射测量装置和双折射测量方法

    公开(公告)号:EP3187856A1

    公开(公告)日:2017-07-05

    申请号:EP15835242.7

    申请日:2015-08-11

    CPC classification number: G01N21/23 G01N2201/0683

    Abstract: The present invention has a problem aiming to provide a birefringence measurement device capable of measuring a two-dimensional distribution of birefringence in a measurement target in real time and in detail using a simple configuration without a rotating mechanism. A birefringence measurement device 1A according to the present invention includes light flux generating means 2 for generating light flux L1, light flux irradiating means 3, 4, or 5 for irradiating a measurement target 20 with the light flux L1 in a predetermined polarization state, an imaging optical system 10 for forming an image from light flux L4 transmitted through the measurement target 20, a polarization/diffraction grating 8 disposed in a position within the imaging optical system 10, image pickup means 12 for generating a light-dark signal related to brightness of the image formed by the imaging optical system 10, and output means for outputting information regarding a phase difference for the light flux L4, the phase difference resulting from the transmission through the measurement target 20 and being determined on the basis of the light-dark signal, and the image pickup means 12 generates the light-dark signal for an image based on at least one beam of diffracted light L7 from among a plurality of beams of diffracted light produced by the polarization/diffraction grating 8.

    Abstract translation: 本发明的目的在于提供一种双折射测定装置,该双折射测定装置能够使用不具有旋转机构的简单的结构,实时且详细地测定测定对象中的双折射的二维分布。 根据本发明的双折射测量设备1A包括用于产生光束L1的光束产生装置2,用于以预定偏振状态的光束L1照射测量目标20的光束照射装置3,4或5, 成像光学系统10,用于根据透过测量目标20的光束L4形成图像;偏振/衍射光栅8,设置在成像光学系统10内的位置;图像拾取装置12,用于产生与亮度有关的明暗信号 ,以及用于输出关于光束L4的相位差的信息的输出装置,该信息是通过透过测量目标20的透射产生的并且基于明暗来确定的相位差 信号,并且图像拾取装置12基于至少一束衍射光束L7f产生用于图像的明暗信号 由偏振/衍射光栅8产生的多个衍射光束中的光。

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