公开(公告)号：EP0724150B1

公开(公告)日：2002-05-08

申请号：EP94927878.2

申请日：1994-08-11

Applicant: Kumakhov, Muradin Abubekirovich

Inventor： Kumakhov, Muradin Abubekirovich

IPC: G01N23/04 ,  G21K1/06

CPC classification number: B82Y10/00 ,  G01N23/04 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/068

公开(公告)号：EP0708970B1

公开(公告)日：1998-08-12

申请号：EP95921299.4

申请日：1995-05-11

Applicant: University of Colorado

Inventor： CASH, Webster, C., Jr.

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/06

公开(公告)号：EP0724150A4

公开(公告)日：1996-10-02

申请号：EP94927878

申请日：1994-08-11

Applicant: KUMAKHOV MURADIN ABUBEKIROVICH

Inventor： KUMAKHOV MURADIN ABUBEKIROVICH

IPC: G01N23/04 ,  G21K1/06

CPC classification number: B82Y10/00 ,  G01N23/04 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/068

Abstract: The present inventions provide for bending the beams, their focusing, transforming a divergent radiation into a quasi-parallel one, and vice versa, its filtering and monochromatization. There are also attained reduced radiation transfer losses, extended range of energies used, and higher radiation concentration. A possibility is provided for use of larger radiation sources without decreasing the proportion of the captured particles, as well as for controlling the radiation spectrum. With this purpose in view, provision is made in the proposed method, apart from multiple reflection of particles upon interaction with different-density alternating media, also for diffuse and potential scattering or interference of particles that diffract on multilayer structures applied to reflecting surfaces. In a device carrying the proposed method into effect the aforementioned surfaces are coated with layers differing in electromagnetic properties. The optical system of the device appears principally as a set of miniature lenses or hemilenses 28, built up of a plurality of capillaries or polycapillaries, the walls of whose channels 24 are provided with an appropriate coating 22. No use of any support structures for forming the profiles of the optical system is required.

公开(公告)号：EP0635716A1

公开(公告)日：1995-01-25

申请号：EP94202026.4

申请日：1994-07-13

Applicant: PHILIPS ELECTRONICS N.V.

Inventor： van der Sluis, Paul, c/o Int.Octrooibureau B.V.

IPC: G01N23/207 ,  G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/06 ,  G21K2201/062

Abstract: An X-ray analysis apparatus comprises a dispersive system of crystals for monochromatizing an incoming beam in a diffractometer or for analysing an X-ray beam in an X-ray spectrometer. The system of crystals comprises crystals whose crystal lattice planes do not extend parallel to effectively reflective crystal surfaces. As a result, a substantially higher effective radiation intensity can be obtained, for example notably for (220) crystal faces in germanium.

Abstract translation: X射线分析装置包括用于在衍射仪中对入射光束进行单色化或用于在X射线光谱仪中分析X射线束的晶体分散系统。 晶体系统包括其晶格平面不平行于有效反射晶体表面延伸的晶体。 结果，可以获得显着更高的有效辐射强度，例如特别是对于锗中的（220）晶面。

公开(公告)号：TW201017345A

公开(公告)日：2010-05-01

申请号：TW098131284

申请日：2009-09-16

Applicant: ASML荷蘭公司

Inventor： 索爾 華特 安東 ,  賈克 馬丁 賈庫柏斯 喬漢

IPC: G03F ,  G02B

CPC classification number: G03F7/70825 ,  G03F7/70175 ,  G21K2201/06

Abstract: 本發明揭示一種集光器總成，該集光器總成包括一第一集光器鏡面，該第一集光器鏡面用於將輻射自一輻射發射點(諸如一極紫外線輻射發射點)反射至一中間焦點，在微影裝置中使用來自該中間焦點之該輻射以用於器件製造。在該輻射發射點前方之一第二集光器鏡面收集額外輻射，從而將該額外輻射向後反射至一第三鏡面且自該第三鏡面處反射至該中間焦點。該等鏡面可允許以高效率且在不增加光展量的情況下收集輻射。該集光器總成可減少或移除(例如)由用以防止雷射激發輻射進入該微影裝置之一雷射光束止擋器對經收集輻射之遮蔽而引起的該經收集輻射中之非均一性。

Abstract in simplified Chinese: 本发明揭示一种集光器总成，该集光器总成包括一第一集光器镜面，该第一集光器镜面用于将辐射自一辐射发射点(诸如一极紫外线辐射发射点)反射至一中间焦点，在微影设备中使用来自该中间焦点之该辐射以用于器件制造。在该辐射发射点前方之一第二集光器镜面收集额外辐射，从而将该额外辐射向后反射至一第三镜面且自该第三镜面处反射至该中间焦点。该等镜面可允许以高效率且在不增加光展量的情况下收集辐射。该集光器总成可减少或移除(例如)由用以防止激光激发辐射进入该微影设备之一激光光束止挡器对经收集辐射之屏蔽而引起的该经收集辐射中之非均一性。

公开(公告)号：US09234856B2

公开(公告)日：2016-01-12

申请号：US13809335

申请日：2011-08-01

Applicant: Taihei Mukaide

Inventor： Taihei Mukaide

IPC: G01N23/04 ,  G01N23/20 ,  G01N23/083 ,  G21K1/06

CPC classification number: G01N23/20 ,  G01N23/04 ,  G01N23/083 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: An apparatus for deriving X-ray absorbing and phase information comprises; a splitting element for splitting spatially an X-ray, a detector for detecting intensities of the X-rays transmitted through an object, the intensity of the X-rays changing according to X-ray phase and also position changes, and an calculating unit for calculating an X-ray transmittance image, and an X-ray differential phase contrast or phase sift contrast image as the phase information. The X-ray is split into two or more X-rays having different widths, and emitted onto the detector unit. And, the calculating unit calculates the X-ray absorbing and phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit.

Abstract translation: 用于导出X射线吸收和相位信息的装置包括： 用于在空间上分割X射线的分离元件，用于检测透过物体的X射线的强度的检测器，X射线相位变化的X射线的强度以及位置变化，以及用于 计算X射线透射率图像，以及X射线差分相位对比度或相移筛选图像作为相位信息。 X射线被分成具有不同宽度的两个或更多个X射线，并被发射到检测器单元上。 并且，计算单元根据X射线的相位的变化与X射线的强度的变化的关系，基于两个以上的X射线之间的差异来计算X射线吸收和相位信息， 射线在检测器单元。

公开(公告)号：US09153351B2

公开(公告)日：2015-10-06

申请号：US13643407

申请日：2011-04-26

Applicant: Olivier Tache ,  Olivier Spalla

Inventor： Olivier Tache ,  Olivier Spalla

IPC: G21K1/02 ,  G21K1/06

CPC classification number: G21K1/02 ,  G21K1/025 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/062 ,  G21K2201/067

Abstract: A collimation device for an X-ray beam, an optical device for analyzing a specimen by the scattering of an X-ray beam, and a collimator for an X-ray beam. The collimation device includes an enclosure configured to be under a vacuum or a controlled atmosphere, the enclosure including an inlet and an outlet for the X-ray beam and at least one plate made of a material having a diffracting periodic structure, the plate including two main faces and at least one flared aperture between the faces.

Abstract translation: 用于X射线束的准直装置，用于通过X射线束的散射来分析样本的光学装置和用于X射线束的准直器。 准直装置包括被配置为处于真空或受控气氛的外壳，外壳包括用于X射线束的入口和出口以及由具有衍射周期性结构的材料制成的至少一个板，该板包括两个 主面和至少一个面之间的喇叭孔。

公开(公告)号：US09046466B2

公开(公告)日：2015-06-02

申请号：US13641966

申请日：2011-05-20

Applicant: Chidane Ouchi

Inventor： Chidane Ouchi

IPC: G03H5/00 ,  G01N23/20 ,  G01B9/021 ,  G03H1/10 ,  G01N23/04 ,  G01J9/02 ,  A61B6/00 ,  G02B5/18 ,  G01J9/00 ,  G21K1/06 ,  G01B11/25

CPC classification number: G01N23/04 ,  A61B6/4291 ,  A61B6/484 ,  G01B11/2527 ,  G01J9/00 ,  G01J9/0215 ,  G01N2223/1016 ,  G01N2223/32 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1838 ,  G02B5/1842 ,  G02B5/1871 ,  G02B5/189 ,  G21K1/06 ,  G21K2201/06 ,  G21K2207/005

Abstract: Provided is an X-ray imaging apparatus having simple configuration and obtaining differential phase contrast images in two directions crossing each other without rotating the diffraction grating and the masking grating. The apparatus including: a diffraction grating diffracting X-rays; a masking grating masking portions rays and transmitting portions are two-dimensionally arranged to partially mask bright zones of the interference pattern; a moving device changing the relative position between the interference pattern and the masking grating; a detector detecting the intensity distribution of the X-rays transmitted through the masking grating; and a calculator calculating a differential phase contrast image or a phase contrast image of a subject, the calculator being configured to calculate the differential phase contrast image or the phase contrast image in each of two mutually crossing directions on the basis of results of detection performed a plurality of times by the detector.

Abstract translation: 本发明提供一种具有简单结构的X射线成像设备，并且在不旋转衍射光栅和掩蔽光栅的情况下彼此交叉的两个方向获得差分相位差图像。 该装置包括衍射光栅衍射X射线; 屏蔽光栅遮蔽部分光线和透射部分被二维布置以部分地掩蔽干涉图案的亮区; 移动装置改变干涉图案和掩蔽光栅之间的相对位置; 检测器，其检测透过所述掩蔽光栅的X射线的强度分布; 以及计算器，其计算对象的差分相位差图像或相位对比图像，所述计算器被配置为基于检测结果a计算两个相互交叉方向中的每一个中的差分相位对比图像或相位对比图像 多次由检测器。

公开(公告)号：US20150028223A1

公开(公告)日：2015-01-29

申请号：US14385802

申请日：2013-03-20

Applicant: MAPPER LITHOGRAPHY IP B.V.

Inventor： Pieter Kruit ,  Marc Smits

IPC: H01J37/317 ,  F15D1/02

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/025 ,  G03F7/70925 ,  G21K2201/06 ,  H01J9/38 ,  H01J37/3007 ,  H01J37/3177 ,  H01J37/32862 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/327 ,  Y10T137/2082 ,  Y10T137/87571

Abstract: The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.

公开(公告)号：US20130064354A1

公开(公告)日：2013-03-14

申请号：US13643407

申请日：2011-04-26

Applicant: Olivier Tache ,  Olivier Spalla

Inventor： Olivier Tache ,  Olivier Spalla

IPC: G21K1/02

CPC classification number: G21K1/02 ,  G21K1/025 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/062 ,  G21K2201/067

Abstract: A collimation device for an X-ray beam, an optical device for analyzing a specimen by the scattering of an X-ray beam, and a collimator for an X-ray beam. The collimation device includes an enclosure configured to be under a vacuum or a controlled atmosphere, the enclosure including an inlet and an outlet for the X-ray beam and at least one plate made of a material having a diffracting periodic structure, the plate including two main faces and at least one flared aperture between the faces.

Abstract translation: 用于X射线束的准直装置，用于通过X射线束的散射来分析样本的光学装置和用于X射线束的准直器。 准直装置包括被配置为处于真空或受控气氛的外壳，外壳包括用于X射线束的入口和出口以及由具有衍射周期性结构的材料制成的至少一个板，该板包括两个 主面和至少一个面之间的喇叭孔。