Verfahren und Vorrichtungen zur Präparation mikroskopischer Proben mit Hilfe von gepulstem Licht
    73.
    发明公开
    Verfahren und Vorrichtungen zur Präparation mikroskopischer Proben mit Hilfe von gepulstem Licht 审中-公开
    用脉冲光制备显微样品的方法和设备

    公开(公告)号:EP2629079A3

    公开(公告)日:2017-12-20

    申请号:EP13155360.4

    申请日:2013-02-15

    Inventor: Stegmann, Heiko

    Abstract: Verfahren und Vorrichtungen zur Präparation mikroskopischer Proben mittels Lichtpulsen, wobei Volumen abgetragen werden, die größer als 100 µm 3 sind. Das Verfahren umfasst folgende Schritte:
    - Inspizieren eines Objekts mittels eines Rasterelektronenmikroskops (REM) oder eines fokussierten Ionenstrahls (FIB), wobei ein Bild des Objekts aufgenommen wird
    - Festlegen eines zu untersuchenden Bereichs des Objekts
    - Festlegen eines Laser-Bearbeitungsweges anhand des Bilds des Objekts derart, dass eine Probe aus dem Objekt herauspräpariert werden kann.
    - Entfernen eines abzutragenden Volumens durch Laserbearbeitung entlang des festgelegten Laser-Bearbeitungswegs
    - Inspizieren des Objekts mittels Rasterelektronenmikroskop (REM) oder fokussiertem Ionenstrahl (FIB).

    Abstract translation: 通过光脉冲制备微观样品的方法和设备,其中除去的体积大于100微米。 该方法包括以下步骤: - 使用扫描电子显微镜(SEM)或聚焦离子束(FIB)检查物体,所述物体的图像被拾取 - 设置对象的被调查区域 - 设置的激光加工路径基于所述对象的图像上 使得可以从物体制备样品。 - 通过激光加工沿指定的激光加工路径去除要去除的体积 - 通过扫描电子显微镜(SEM)或聚焦离子束(FIB)检查物体。

    ELECTRON BEAM STERILIZATION DEVICE
    74.
    发明公开

    公开(公告)号:EP3222539A4

    公开(公告)日:2017-11-29

    申请号:EP15860506

    申请日:2015-11-17

    Abstract: An electron beam sterilization device includes: a sterilization chamber (6) in which electron beams are applied to containers to perform sterilization; a blocking cover member that covers the sterilization chamber (6) and blocks radiations; and a rotational member having an upper portion exposed through an opening portion (44) formed in the blocking cover member. The blocking cover member includes a fixed blocking cover (41) that covers the upper portion of the rotational member. Between the rotational member and the fixed blocking cover (41), there are provided a rotational annular blocking plate (64) that projects from the rotational member toward the fixed blocking cover (41) and a fixed annular blocking plate (65) that projects from the blocking cover member toward the rotational member. The rotational annular blocking plate (64) and the fixed annular blocking plate (65) face each other with a blocking gap (66) therebetween. The rotational annular blocking plate (64) and the fixed annular blocking plate (65) constitute a blocking lap portion (67) that blocks radiations.

    ELECTRON BEAM STERILIZATION DEVICE
    75.
    发明公开
    ELECTRON BEAM STERILIZATION DEVICE 审中-公开
    电子束灭菌设备

    公开(公告)号:EP3222540A1

    公开(公告)日:2017-09-27

    申请号:EP15861399.2

    申请日:2015-11-17

    CPC classification number: A61L2/087 A61L2202/121 A61L2202/23 H01J37/00

    Abstract: An electron beam sterilization device (1) includes a rotational member (22) that rotates around vertical rotational shafts (33), (34), and the rotational member (22) includes an upper stage (25), a middle stage (27), and a lower stage (26). On the upper stage (25), there are provided a plurality of electron beam emission units (15) arranged along the circumferential direction. On the middle stage (27), there is provided a retaining device (17) that retains a container (2). On the lower stage (26), there are provided a plurality of power supply units (71) that supply power to the electron beam emission units (15). Power supply cables (72) extend from the power supply units (71) to the upper stage (25) along the rotational shafts (33), (34) and are connected to the electron beam emission units (15).

    Abstract translation: 本发明的电子射线杀菌装置(1)具有以垂直旋转轴(33),(34)为中心旋转的旋转部件(22),旋转部件(22)具有上层(25),中层(27) ,和下级(26)。 在上层(25)上,设置有沿圆周方向排列的多个电子束发射单元(15)。 在中间台架(27)上,设有保持容器(2)的保持装置(17)。 在下层(26)上,设置有多个向电子束发射单元(15)供电的电源单元(71)。 电源电缆72沿着旋转轴33,34从电源单元71延伸到上层25并连接到电子束发射单元15。

    APERTURE ARRAY ROTATION TO ENHANCE EBEAM PROCESS MARGIN
    80.
    发明申请
    APERTURE ARRAY ROTATION TO ENHANCE EBEAM PROCESS MARGIN 审中-公开
    通过光学阵列旋转来提高EBEAM工艺的稳定性

    公开(公告)号:WO2018063325A1

    公开(公告)日:2018-04-05

    申请号:PCT/US2016/054781

    申请日:2016-09-30

    Abstract: Lithographic apparatuses suitable for complementary e-beam lithography (CEBL) are described. In an example, method of forming a pattern for a semiconductor structure including forming a pattern of parallel lines above a substrate. The method also includes aligning the substrate in an e-beam tool to provide the pattern of parallel lines parallel with a scan direction of the e-beam tool. The e-beam tool includes a blanker aperture array (BAA) having a staggered pair of columns of openings along an array direction. The array direction has an acute rotation angle from an axis orthogonal to the scan direction. The method also includes forming a pattern of cuts or vias in or above the pattern of parallel lines to provide line breaks for the pattern of parallel lines by scanning the substrate along the scan direction.

    Abstract translation: 描述了适用于互补电子束光刻(CEBL)的光刻设备。 在一个示例中,形成用于半导体结构的图案的方法包括在衬底上方形成平行线的图案。 该方法还包括在电子束工具中对准衬底以提供与电子束工具的扫描方向平行的平行线的图案。 电子束工具包括沿着阵列方向具有交错的一对开口列的阻断开口阵列(BAA)。 阵列方向与正交于扫描方向的轴具有锐角旋转角度。 该方法还包括在平行线的图案中或上方形成切口或过孔的图案,以通过沿着扫描方向扫描衬底来为平行线图案提供断线。

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