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公开(公告)号：JP2005062176A
公开(公告)日：2005-03-10
申请号：JP2004226004
申请日：2004-08-02
Applicant: Varian Spa , ヴァリアン ソシエタ ペル アジオーニ
Inventor： CORREALE RAFFAELE
Abstract: PROBLEM TO BE SOLVED: To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure. SOLUTION: An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 especially after operating a vacuum pump. The vacuum gauge comprises an electron emission cathode 31 created by utilizing a nano tube technique, a grid 13 for accelerating electrons emitted by the cathode, and a plate 15 for capturing gas ions and/or positive ionized molecules. A residual value in the container can be determined by measuring a plate current by a galvanometer. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供具有高灵敏度并且不会对影响测量压力产生任何干扰的小型化真空计。 解决方案：电离真空计测量残留在容器10中的气态物质的残留压力，特别是在操作真空泵之后。 真空计包括通过利用纳米管技术产生的电子发射阴极31，用于加速由阴极发射的电子的栅极13和用于捕获气体离子和/或阳离子分子的板15。 通过用电流计测量板电流可以确定容器中的残留值。 版权所有（C）2005，JPO＆NCIPI
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Patent Agency Ranking
公开(公告)号：JPS63151835A
公开(公告)日：1988-06-24
申请号：JP29791887
申请日：1987-11-27
Applicant: LEYBOLD AG
Inventor： LIMP HANS
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公开(公告)号：JPS5854466B2
公开(公告)日：1983-12-05
申请号：JP15234781
申请日：1981-09-26
Applicant: TOKYO SHIBAURA ELECTRIC CO
Inventor： KAGEYAMA KATSUHIRO
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公开(公告)号：JPS5853146A
公开(公告)日：1983-03-29
申请号：JP15234781
申请日：1981-09-26
Applicant: TOKYO SHIBAURA ELECTRIC CO
Inventor： KAGEYAMA KATSUHIRO
Abstract: PURPOSE:To obtain a crossed field discharge device in which the change of discharge status and the manifestation of discharge instability caused by the formation of a laminated layer are suppressed by providing, in the hollow section of the anode, a means that generates a magnetic field which is substantially parallel to its axial center core of an anode. CONSTITUTION:A cathode material is mostly caught by the inner surface of a substrate 11 that is not touching a group of electrons which maintains discharge and the side of a blade piece 12. Therefore, such an effect is obtained that the interaction between the said group of electrodes and laminated layer is restricted sharply and the nanifestation of discharge instability caused by the said interaction is suppressed. Besides, a part of the cathode materials laminated on the end face of the blade piece 12 and the inner surface of a connection material 14 is re-emitted to the space by the group of electrons. But since the greater part of the re-emitted material is caught by the inner surface of the substrate 11 of the said anode or the side of the blade piece 12, the accumulation of the cathode material on the end face of the blade piece 12 and the inner surface of the connection material 14 can be suppressed.
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公开(公告)号：JPS5167186A
公开(公告)日：1976-06-10
申请号：JP12939275
申请日：1975-10-29
Applicant: Varian Associates
Inventor： KIMO MERURIN UERUCHI
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公开(公告)号：WO2014135229A9
公开(公告)日：2014-09-12
申请号：PCT/EP2013/064511
申请日：2013-07-09
Applicant: INFICON GMBH
Inventor： ANDREAUS, Bernhard , ENDERES, Rolf , WÜEST, Martin , UNTERMARZONER, Oskar , STOCKER, Rudolf
Abstract: Eine Ionisations-Vakuummesszelle umfasst eine Anode (3 A ) sowie eine Kathode (4 K ) in einer Messkammer (107). Die Messkammer (107), ein Gehäuse (101) für über eine Vakuumdicht-Durchführung (103) einen Anschlussstab (104) der Kathode (4 K ) nach Aussen. Die Messkammer (107) hält den Stab (104) in einer nur elektrischen isolierenden Durchführung (109). Über eine lösbare Steckverbindung (106) ist die Messkammer (107) im Gehäuse (101) austauschbar.
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