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公开(公告)号：DE3854173T2
公开(公告)日：1995-11-30
申请号：DE3854173
申请日：1988-08-24
Applicant: CANON KK
Inventor： YANAGISAWA YOSHIHIRO , MORIKAWA YUKO , MATSUDA HIROSHI , KAWADA HARUKI , SAKAI KUNIHIRO , KAWADE HISAAKI , EGUCHI KEN , KAWAKAMI EIGO , KAWASE TOSHIMITSU , YOSHII MINORU , SAITOH KENJI , YAMANO AKIHIKO , NOSE HIROYASU
IPC: G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G01N27/00 , H03M1/00
Abstract: An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electric voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
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公开(公告)号：DE69202261T2
公开(公告)日：1995-11-23
申请号：DE69202261
申请日：1992-02-06
Applicant: CANON KK
Inventor： TAGAWA MASAHIRO , MIYAZAKI TOSHIHIKO , KAWASE TOSHIMITSU
Abstract: A driving apparatus for driving an object comprises a pair of piezoelectric elements, one of them being arranged on the one side of the object while the other of them on the other side of the object, and the respective electrode arrangement directions of the pair of piezoelectric elements being substantailly identical to each other, and a control circuit which applies a predetermined voltage across the outer electrodes of the pair of piezoelectric elements respectively, gives an equipotential to the inner electrodes thereof, and causes the pair of piezoelectric elements to drive the object by varying the value of the potential given to the inner electrodes. Hence, the increased amount of a voltage applied to one piezoelectric element is exactly identical to the decreased amount for the other so as to make the extended and contracted amounts of the piezoelectric elements on both sides of the object the same. Consequently, no useless stress is given to the piezoelectric elements for the prevention of the deterioration of the elements to implement a precise fine driving over a long period.
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公开(公告)号：DE69017759T2
公开(公告)日：1995-10-05
申请号：DE69017759
申请日：1990-04-26
Applicant: CANON KK
Inventor： NOSE YIROYASU , KAWASE TOSHIMITSU , MIYAZAKI TOSHIHIKO , OGUCHI TAKAHIRO , YAMANO AKIHIKO
Abstract: An encoder has a reference scale having periodic structure of atoms or molecules in a predetermined direction, a probe disposed in opposed relationship with the reference scale, the probe being used to detect the structural variation information of the periodic structure of the reference scale, and relative displacement amount detecting means for detecting the amount of relative displacement of the reference scale and the probe along a predetermined direction from the structural variation information obtained by the probe.
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公开(公告)号：DE69202261D1
公开(公告)日：1995-06-08
申请号：DE69202261
申请日：1992-02-06
Applicant: CANON KK
Inventor： TAGAWA MASAHIRO , MIYAZAKI TOSHIHIKO , KAWASE TOSHIMITSU
Abstract: A driving apparatus for driving an object comprises a pair of piezoelectric elements, one of them being arranged on the one side of the object while the other of them on the other side of the object, and the respective electrode arrangement directions of the pair of piezoelectric elements being substantailly identical to each other, and a control circuit which applies a predetermined voltage across the outer electrodes of the pair of piezoelectric elements respectively, gives an equipotential to the inner electrodes thereof, and causes the pair of piezoelectric elements to drive the object by varying the value of the potential given to the inner electrodes. Hence, the increased amount of a voltage applied to one piezoelectric element is exactly identical to the decreased amount for the other so as to make the extended and contracted amounts of the piezoelectric elements on both sides of the object the same. Consequently, no useless stress is given to the piezoelectric elements for the prevention of the deterioration of the elements to implement a precise fine driving over a long period.
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公开(公告)号：DE69012644D1
公开(公告)日：1994-10-27
申请号：DE69012644
申请日：1990-05-17
Applicant: CANON KK
Inventor： NOSE HIROYASU , YAMANO AKIHIKO , OGUCHI TAKAHIRO , MIYAZAKI TOSHIHIKO , KAWASE TOSHIMITSU
IPC: G01B7/00 , G01B7/004 , G01D5/244 , G01D5/245 , G01Q20/02 , G01Q20/04 , H01J37/304 , H01L21/68 , H01J37/317
Abstract: A position detecting apparatus for detecting a relative position of two objects which are relatively moved is disclosed. The apparatus has a probe (107), a probe driving device (110), a position detecting device (115) and an object driving device (116). The probe (107) is so provided for the first object (101) of the two objects as to face the surface of the second object (103) of the two objects so as to read information from the surface of the second object (103). The probe driving device (110) allows the probe to two-dimensionally scan on the surface of the second object (103) so that the probe (107) reads the two-dimensional information from the surface of the second object (103). The position detecting device (115) detects a relative positional relation of the two objects (101, 103) by comparing the two-dimensional information obtained by the two-dimensional scan of the probe (107) by the probe driving (110) device with reference to two-dimensional information. The object driving device (116) executes the relative positioning of the two objects (101, 103) on the basis of the result of the detection of the position detecting device (115).
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Patent Agency Ranking
公开(公告)号：CA2031733C
公开(公告)日：1994-10-04
申请号：CA2031733
申请日：1990-12-07
Applicant: CANON KK
Inventor： KAWASE TOSHIMITSU , YAMANO AKIHIKO , NOSE HIROYASU , MIYAZAKI TOSHIHIKO , OGUCHI TAKAHIRO
Abstract: A probe for use in an apparatus for effecting information reading and/or information input on an information carrier member by closely positioning the probe thereto is formed by the following manner. An electrode is placed to a portion of the probe where the end portion is to be formed. Distance information between the end portion forming part of the probe and the electrode is detected. The relative position of the end portion forming part of the probe to the electrode is controlled on the basis of the detection result. A voltage is applied to the end portion forming part of the probe through the electrode under the relative position control, thereby forming the end portion of the probe.
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公开(公告)号：AT107028T
公开(公告)日：1994-06-15
申请号：AT89311440
申请日：1989-11-06
Applicant: CANON KK
Inventor： NOSE HIROYASU , TAKAMATSU OSAMU , MIYAZAKI TOSHIHIKO , KAWASE TOSHIMITSU , CHOME
IPC: G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q60/10 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/252 , H01J37/28 , H02N2/00
Abstract: A probe unit (Fig.1) is provided that is suitable for example for use in a scanning tunnel microscope or the like. The electrical probe contact (7) of this unit is centrally located and mounted upon a flexible member (4,5,6). The flexible member (4,5,6) is symmetrically supported (3) at its periphery and is constrained thus so that the electrical probe contact (7) can only move back and forth in a single direction. Flexure of the flexible member (4,5,6) may be driven by electrostatic or piezoelectric forces. Alternatively, the flexible member may include a layer of piezoelectric material, the elongation or contraction of which will cause flexure.
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公开(公告)号：CA1328131C
公开(公告)日：1994-03-29
申请号：CA575623
申请日：1988-08-24
Applicant: CANON KK
Inventor： YANAGISAWA YOSHIHIRO , MORIKAWA YUKO , MATSUDA HIROSHI , KAWADA HARUKI , SAKAI KUNIHIRO , KAWADE HISAAKI , EGUCHI KEN , KAWAKAMI EIGO , KAWASE TOSHIMITSU , YOSHII MINORU , SAITOH KENJI , YAMANO AKIHIKO , NOSE HIROYASU
Abstract: An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electric voltage to between the reference scale and the probe, a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
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公开(公告)号：DE69002503T2
公开(公告)日：1994-03-03
申请号：DE69002503
申请日：1990-03-29
Applicant: CANON KK
Inventor： YAMANO AKIHIKO , NOSE HIROYASU , KAWASE TOSHIMITSU , MIYAZAKI TOSHIHIKO , OGUCHI TAKAHIRO
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90.发明专利
公开(公告)号：CA2002187C
公开(公告)日：1993-09-21
申请号：CA2002187
申请日：1989-11-03
Applicant: CANON KK
Inventor： NOSE HIROYASU , TAKAMATSU OSAMU , MIYAZAKI TOSHIHIKO , KAWASE TOSHIMITSU
IPC: G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q60/10 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/252 , H01J37/28 , H02N2/00
Abstract: A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed in the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.
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