公开(公告)号：FR2925890A1

公开(公告)日：2009-07-03

申请号：FR0760426

申请日：2007-12-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  NGUYEN VALERIE

IPC: B81C1/00 ,  B81B7/02

Abstract: L'invention concerne un procédé de fabrication d'au moins un composant mécanique d'une structure MEMS ou NEMS à partir d'un substrat de silicium monocristallin, comprenant les étapes de :- formation de zones d'ancrage dans une face du substrat pour délimiter le composant mécanique,- formation, sur la face du substrat, d'une couche de protection inférieure en matériau autre que le silicium et obtenue par épitaxie à partir de la face du substrat,- formation sur la couche de protection inférieure d'une couche de silicium obtenue par épitaxie à partir de la couche de protection inférieure,- formation d'une couche de protection supérieure sur la couche de silicium,- gravure de la couche de protection supérieure, de la couche de silicium et de la couche de protection inférieure, selon un motif de définition du composant mécanique, jusqu'à atteindre le substrat et fournir des voies d'accès au substrat,- formation d'une couche de protection sur les parois formées par la gravure du motif du composant mécanique dans la couche de silicium épitaxiée,- libération du composant mécanique par gravure isotrope du substrat à partir des voies d'accès au substrat, cette gravure isotrope n'attaquant pas les couches de protection inférieure et supérieure et la couche de protection des parois.

公开(公告)号：FR2898683B1

公开(公告)日：2008-05-23

申请号：FR0602216

申请日：2006-03-14

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  HENTZ SEBASTIEN

IPC: G01P15/125 ,  G01P15/18

Abstract: The structure has a substrate (10), and a thin deformable elastic membrane (12) suspended above the substrate and integrated to the substrate at its periphery. A seismic mass (M) is suspended above the membrane and is connected to the membrane by a central pin. Capacitive interdigited combs are distributed around the mass and comprise movable armatures (AF1, AF3) integrated to the mass and fixed armatures (AM1, AM3) integrated the substrate.

公开(公告)号：FR2890439B1

公开(公告)日：2007-11-30

申请号：FR0509174

申请日：2005-09-08

Applicant: PEUGEOT CITROEN AUTOMOBILES SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAVOUX BERNARD ,  DANEL JEAN SEBASTIEN ,  ROBERT PHILIPPE ,  PAULY MAXIME

IPC: G01D5/00 ,  G08C17/02

公开(公告)号：FR2880127B1

公开(公告)日：2007-03-02

申请号：FR0414031

申请日：2004-12-29

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: G01P15/08 ,  G01P15/18

Abstract: The accelerometer has a mobile electrode (2) and fixed electrodes (4A, 4B) with respect to a substrate (5) and equipped with a set of mobile fingers (7) and fixed fingers (8A, 8B), respectively. Each mobile finger is disposed between two adjacent fixed fingers to form an interdigital comb microstructure (20). A mobile electrode (40) is associated to a fixed electrode (42) to form another interdigital comb microstructure (22) overlapped with the microstructure (20). An independent claim is also included for a process for manufacturing an accelerometer.

公开(公告)号：FR2880128B1

公开(公告)日：2007-02-02

申请号：FR0414033

申请日：2004-12-29

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: G01P15/08

Abstract: The accelerometer has mobile and fixed electrodes (2, 4) relative to a substrate, with mobile and fixed fingers (7, 8A, 8B), respectively. Each mobile finger is disposed between two adjacent fixed fingers to form an interdigital comb microstructure. The mobile and fixed fingers are integrated by respective connection beams (20, 22) directly etched in the substrate. The beams are placed near the end of the fingers to be integrated. An independent claim is also included for a process of manufacturing an accelerometer.

公开(公告)号：FR2874257B1

公开(公告)日：2006-10-13

申请号：FR0451849

申请日：2004-08-13

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: G01C19/56 ,  G01P3/14

Abstract: The gyrometer has an excitation resonator (20) with seismic masses (12, 12`) connected to each other by connecting arms (14, 14`) and flexible units (16, 16`). Excitation combs (18, 18`) put the masses into movement in a direction (X) of a plane. A detection electrode (26) and an excitation electrode (28) excite a detection resonator (22), connected to the resonator (20), and measure the frequency of its natural mode. The excitation resonator (20) is capable of moving freely along the plane.

公开(公告)号：DE60307672D1

公开(公告)日：2006-09-28

申请号：DE60307672

申请日：2003-11-27

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H59/00

公开(公告)号：FR2859045B1

公开(公告)日：2005-10-21

申请号：FR0310070

申请日：2003-08-21

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: B81B7/02 ,  H01L21/3205 ,  H01L21/60 ,  H01L21/98 ,  H01L23/52 ,  H01L25/065 ,  H01R12/04 ,  H05K3/32 ,  H01R12/22 ,  B81B3/00 ,  H05K1/14

公开(公告)号：FR2852165A1

公开(公告)日：2004-09-10

申请号：FR0302817

申请日：2003-03-06

Applicant: ST MICROELECTRONICS SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  CARUYER GREGORY ,  ANCEY PASCAL ,  BOUCHE GUILLAUME

IPC: H03H3/04 ,  H03H9/17 ,  H03H9/15 ,  H01L41/083 ,  H01L41/22

公开(公告)号：FR2848021A1

公开(公告)日：2004-06-04

申请号：FR0214946

申请日：2002-11-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H59/00 ,  B81B7/02

Abstract: The invention relates to an electrostatic microswitch which is intended to connect electrically two strip conductors which are disposed on an insulating support ( 21 ), the two strip conductors are connected electrically by conducting means ( 38 ) which are provided in the central part of deformable means ( 28 ) which can be deformed in relation to the support under the effect of an electrostatic force generated by control electrodes ( 25, 48; 26, 58 ). The control electrodes are distributed facing one another on the deformable means and the support, such as to form capacitive means around the aforementioned conducting means. The control electrodes are associated with insulating stop elements ( 35, 36 ) which are provided in order to prevent a short circuit between electrodes of the capacitive means during the deformation of the deformable means. The distance between the deformable means and the ends of the strip conductors is less than or equal to the distance between the insulating stop elements associated with the control electrodes and the control electrodes located opposite.