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公开(公告)号：DE10030391A1
公开(公告)日：2002-01-17
申请号：DE10030391
申请日：2000-06-21
Applicant: INFINEON TECHNOLOGIES AG
Inventor： HARTWICH JESSICA , LUYKEN RICHARD JOHANNES , ROESNER WOLFGANG , SCHULZ THOMAS
IPC: H01L21/336 , H01L29/08 , H01L29/165 , H01L29/267 , H01L29/786 , H01L21/283
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