SPECTROPHOTOMETER
    81.
    发明专利

    公开(公告)号:JPS57179719A

    公开(公告)日:1982-11-05

    申请号:JP6635781

    申请日:1981-04-30

    Applicant: SHIMADZU CORP

    Abstract: PURPOSE:To widen a sample chamber and to reduce the distance between the sample and a photodetector by so arranging a titled meter that divided two luminous fluxes are intersected again at around 90 deg. angle and disposing one photodetector commonly for the two luminous fluxes near the point of intersection thereof. CONSTITUTION:The luminous flux emitted from a spectroscope is divided and the divided luminous fluxes are intersected again at around 90 deg.. One photodetector is disposed commonly for the two luminous fluxes near the point where the two luminous fluxes intersect. For example, the light out from a spectroscope M is divided to two luminous fluxes with a sector mirror S1; the reflected luminous flux is reflected by mirrors m3, m4, and the transmitted luminous flux is reflected by mirrors m1, m2. These two luminous fluxes are intersected orthogonally on the photodetection surface of a photomultiplier P. Further, two sheets of light diffusion plates D, D' are disposed orthogonally in front of the photodetection surface of the photomultiplier P so as to assure the equivalency of the two luminous fluxes.

    SPECTRUM MEASURING DEVICE
    82.
    发明专利

    公开(公告)号:JPS57128822A

    公开(公告)日:1982-08-10

    申请号:JP1470781

    申请日:1981-02-02

    Applicant: SHIMADZU CORP

    Abstract: PURPOSE:To perform measurement in the state of good SN ratios by disposing image sensors on a spectrum image plane and setting scanning speeds in such a way that the integrated output thereof is nearly saturated. CONSTITUTION:The light diffracted by the concave diffraction grating G of a spectroscope 1 is imaged on a photodiode array P driven by a sweeping circuit 2. The integrated output thereof is inputted and stored in a control circuit 5 via a preamplifier 3 and an ADC 4. The 2 operations are repeated, whereby the ratio of the output of a photodetector P to the satd. output value of the max. value of the output is calculated and the scanning speed of the circuit 2 is controlled until the max. value attains a satd. value. Next, when the key for measurement start is pushed, the photodetectors P are scanned at a set scanning speed, and the ratio of the time when only the solvent is put into a sample cell C and the output of the time when a sample soln. is set are calculated with a controller 5 and is displayed 6. Thereby, the measurement is performed in the state of good SN ratios.

    MULTIWAVELENGTH SPECTROMETER
    83.
    发明专利

    公开(公告)号:JPS5626229A

    公开(公告)日:1981-03-13

    申请号:JP10183079

    申请日:1979-08-09

    Applicant: SHIMADZU CORP

    Inventor: TSUNASAWA YOSHIO

    Abstract: PURPOSE:Not only to increase the accuracy of measurement but to realize a simple and small-sized constitution, by carrying out a scanning of the wavelength with a relative turn secured between the diffraction grid for spectrum of the reflected light of measurement and the detector for the spectrum. CONSTITUTION:The white light reflected from sample 3 enters Rowland concave surface diffraction grid 10 through slit 8 provided on the Rowland circle of grid 10. Grid 10 gives a spectrum to white reflected light into a double or the like compared with the number of photoelectric transducers D1-D18 with a pitch of 1/2 or the like of transducers D1-D18 provided on the Rowland circle with an equal and fixed pitch. On the other hand, a control is given to the rotary movement of cam 14 via CPU21 which controls integrators I1-I18 corresponding to transucers D1-D18. At the same time, a relative turn is given between grid 10 and transducers D1-D18 to give a scanning to the wavelength. As a result, the spectral diffraction corresponding to many wavelengths is measured by a small number of photoelectric transducers or the like. Thus a simple and small-sized spectrum can be obtained with a high resolution and high accuracy.

    Etching monitoring device
    86.
    发明专利
    Etching monitoring device 审中-公开
    蚀刻监测设备

    公开(公告)号:JP2013048183A

    公开(公告)日:2013-03-07

    申请号:JP2011186309

    申请日:2011-08-29

    Abstract: PROBLEM TO BE SOLVED: To calculate depth of hole or step with high precision by eliminating the effect of thickness of resist film during execution of etching.SOLUTION: The light of predetermined wavelength width is radiated to a sample 50, and the light containing interference with the light reflected on a bottom surface of a hole 52 or an upper surface of a substrate 51, and the like is subjected to spectral detection by a spectroscope unit 25. At a data processing part 30, an interference spectrum is obtained that is provided by removing effects or the like of an emission spectrum of a light source 21 from spectral profile, which is then subjected to Fourier transformation to provide a peak interval, for calculating depth of a hole, film thickness, or the like. Since a chopper 103 periodically allows shielding/passing of external reference light that is reflected on an external reference surface 104, a data processing part 30 provides data with external reference light and data with no external reference light. For example, during the period when a resist layer 53 is thick, a depth of hole or the like is calculated based on the data with no external reference light which has higher resolution, but when the resist layer 53 becomes thinner as etching proceeds, a depth of a hole or the like is calculated based on the data with external reference light which is hard to be affected by disturbance.

    Abstract translation: 要解决的问题:通过消除蚀刻执行期间抗蚀剂膜的厚度的影响,以高精度计算孔或台阶的深度。 解决方案:将预定波长宽度的光照射到样品50,并且将包含对孔52的底表面或基板51的上表面上反射的光的干扰的光等等 在数据处理部分30处,获得通过从光谱分布中去除光源21的发射光谱的效果等提供的干涉光谱,然后将其进行傅里叶变换 提供峰值间隔,用于计算孔的深度,膜厚度等。 由于斩波器103周期性地允许屏蔽/通过在外部参考表面104上反射的外部参考光,所以数据处理部分30提供具有外部参考光的数据和没有外部参考光的数据。 例如,在抗蚀剂层53厚的期间,基于没有具有较高分辨率的外部基准光的数据计算孔深等,但是当蚀刻进行时抗蚀剂层53变薄时, 基于具有难以受到扰动影响的外部参考光的数据来计算孔等的深度。 版权所有(C)2013,JPO&INPIT

    Fuel property measurement device
    87.
    发明专利
    Fuel property measurement device 审中-公开
    燃油属性测量装置

    公开(公告)号:JP2012052880A

    公开(公告)日:2012-03-15

    申请号:JP2010194813

    申请日:2010-08-31

    Abstract: PROBLEM TO BE SOLVED: To provide a low-cost fuel property measurement device that can be installed on a motor vehicle, a motor cycle, a small-sized marine vessel and any other vehicles with an internal combustion engine.SOLUTION: The fuel property measurement device, using a plurality of low-cost near-infrared LED sources L, L, Lhaving a wide emission wavelength width, makes the LED sources substantially function as a light source with a narrow emission wavelength width by combining the LED sources with a diffraction grating 7, and reduces the cost required for detectors, which are more expensive than light sources in near-infrared applications, by reducing light receiving elements of the detector 7 to a single type. As the detection method substantially has a narrow wavelength width, a plurality of components of mixed fuel can be separated and measured.

    Abstract translation: 要解决的问题:提供一种低成本燃料特性测量装置,其可以安装在机动车辆,马达循环,小型船舶和任何其他具有内燃机的车辆上。 解决方案:使用多个低成本近红外LED源L 1 的燃料性质测量装置L 2 < SB>,具有宽的发射波长宽度的L 3 ,通过将LED源与衍射光栅7组合,使得LED源基本上起到具有窄发射波长宽度的光源的作用 并且通过将检测器7的光接收元件减少到单一类型,并且降低了在近红外应用中比光源更昂贵的检测器所需的成本。 由于检测方法基本上具有窄的波长宽度,所以能够分离和测量混合燃料的多个成分。 版权所有(C)2012,JPO&INPIT

    Vacuum pump
    88.
    发明专利
    Vacuum pump 有权
    真空泵

    公开(公告)号:JP2007170258A

    公开(公告)日:2007-07-05

    申请号:JP2005368241

    申请日:2005-12-21

    Abstract: PROBLEM TO BE SOLVED: To provide a vacuum pump with improved temperature determination accuracy, while suppressing increase in cost.
    SOLUTION: A nut 42 disposed on a shaft 3 of the vacuum pump has a magnetic body target 81 in which there is Curie temperature within a temperature monitoring range of a rotor 2. Difference in level is formed on a bottom surface of the nut 42 so as to constitute two fixing faces 42a, 42b, and the magnetic body target 81 is disposed on one fixing face 42a. A sensor output when a gap sensor is opposed to the magnetic body target 81 is divided by using difference in sensor output when the gap sensor is opposed to the fixing faces 42a, 42b, and using the divided value for the determination, the rotor temperature determination can be performed without being affected by a floating position of the shaft 3.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种具有改善的温度确定精度的真空泵,同时抑制成本增加。 解决方案:设置在真空泵的轴3上的螺母42具有磁性体目标81,其中居里温度在转子2的温度监视范围内。水平面的差异形成在 螺母42,以构成两个固定面42a,42b,并且磁性体目标81设置在一个固定面42a上。 当间隙传感器与磁性体目标81相对的传感器输出通过使用间隙传感器与固定面42a,42b相对的传感器输出的差异进行分割,并使用分割值进行判定,转子温度的测定 可以在不受轴3的浮动位置影响的情况下执行。版权所有(C)2007,JPO&INPIT

    DEVICE FOR MEASURING ORGANISM BY LIGHT

    公开(公告)号:JP2001133395A

    公开(公告)日:2001-05-18

    申请号:JP31642799

    申请日:1999-11-08

    Applicant: SHIMADZU CORP

    Abstract: PROBLEM TO BE SOLVED: To miniaturize a detection part and a measurement part including a light source even if the number of measurement wavelengths is increased. SOLUTION: This deice is used for irradiating an organism with light, detecting light emitted from the organism by a two-dimensional detector, and providing information on the organism by using a detected image. The device is equipped with an image measuring means and an image computing means. The measuring means measures two-dimensional measurement image data of the organism by means of a plurality of measurement wavelengths. The computing means performs on a pixel-by-pixel basis, computations in which the measurement image data and reference image data found by means of the wavelengths same as the measurement wavelengths are multiplied by prescribed weights different for different wavelengths and added together to compute two-dimensional information on the tissue of the organism. The measuring means is provided with a light source part 2 for emitting each of the plurality of different wavelengths on a time sharing basis. By making the source part 2 emit each of the plurality of different wavelengths on a time sharing basis, the plurality of different wavelengths are outputted individually on the light source side.

    OPTICAL-IMAGE MEASURING APPARATUS
    90.
    发明专利

    公开(公告)号:JP2001013062A

    公开(公告)日:2001-01-19

    申请号:JP18230999

    申请日:1999-06-28

    Applicant: SHIMADZU CORP

    Abstract: PROBLEM TO BE SOLVED: To acquire significant information on a living body in a measurement by using information on an image obtained from a two-dimensional change amount without measuring an absolute amount and to diagnose the state of the tissue of the living body. SOLUTION: In this optical-image measuring apparatus, a living body (a specimen 10) is irradiated with light, light which is emitted from the living body is detected by a two-dimensional detector (an optical detection means 21), and an image is obtained. The optical-image measuring apparatus is constituted in such a way that it is provided with an image measuring means 2 which acquires image data at a plurality of wavelengths in a time-dependent manner and that it is provided with an image computing means 3 which computes an image used to find information on the living body by using a plurality of image data whose measuring wavelengths and measuring times are respectively different. The two-dimensional change amount of the specimen such as the living body or the like is acquired as image data in a plurality of times. The acquired image data at many wavelengths and in the plurality of times are computed. Significant information on the living body in a measurement is obtained. As a value which is related to the information on the living body, an oxyhemoglobin amount or a deoxyhemoglobin amount can be used.

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