公开(公告)号：JP2000251616A

公开(公告)日：2000-09-14

申请号：JP4980399

申请日：1999-02-26

Applicant: TOSHIBA CORP

Inventor： CHO TOSHI ,  SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI

IPC: H01J9/02 ,  H01J1/304

Abstract: PROBLEM TO BE SOLVED: To ensure a low voltage drive and a large discharge current by implementing selection of material at each stage of implantation of electron back contact, transportation in an emitter and field emission to the vacuum through a diamond, under proper conditions. SOLUTION: A silicon substrate 12, with a mold is formed by anishotropic etching on a silicon substrate 11, then an insulating oxide film 13 is formed, and thereonto a carbon nanotube thin film 14 is filled in the mold. Thereafter, the transfer to a substrate having an Fe thin film 15 deposited thereon, the substrate is etched, and thereby an emitter array 17, an SiO2 insulation film 18, a silicon gate layer 19 are respectively formed. Then, irradiation of a laser beam is performed by a CO2 laser 110, whose output power is 3 kW. Successively, heat treatment at 900 deg.C is carried out to form a tip of diamond. Finally, an anode electrode 12 is formed.

公开(公告)号：JPH11154471A

公开(公告)日：1999-06-08

申请号：JP6576098

申请日：1998-03-16

Applicant: TOSHIBA CORP

Inventor： ONO TOMIO ,  SAKAI TADASHI ,  SAKUMA HISASHI ,  NAKAYAMA KAZUYA

IPC: H01J19/24 ,  H01J1/30 ,  H01J1/304

Abstract: PROBLEM TO BE SOLVED: To eliminate loss at a gate, prevent the breakage of an element. SOLUTION: An electron emitting element comprises an emitter 2 emitting electrons, a gate electrode 1 extracting electrons by applying an electric field to the emitter 2, an anode electrode 3 collecting the electrons extracted by the gate electrode 1. A resistor 23 is connected between the gate electrode 1 and a signal applied to the agate electrode 1. A signal source 5 is provided between the emitter 2 and the gate electrode 1, and a voltage source 4 is provided between the gate electrode 1 and the anode electrode 3.

公开(公告)号：JPH10149778A

公开(公告)日：1998-06-02

申请号：JP23604697

申请日：1997-09-01

Applicant: TOSHIBA CORP

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI ,  OHASHI HIROMICHI ,  NAKAYAMA KAZUYA

IPC: H01J1/304 ,  H01J19/24 ,  H01J21/10 ,  H03K17/54 ,  H01J1/30

Abstract: PROBLEM TO BE SOLVED: To provide a fine cold cathode tube whose loss as a switching element is low and which can apply necessary electric current following the outside voltage to be applied to a main circuit with which an anode is to be connected and can be used at high voltage and high current density. SOLUTION: This fine cold cathode tube comprises a cold cathode 11 whose tip part has a projected shape, an anode 16 installed on the opposite to the cold cathode 11 to capture emitted electrons from the cold cathode 11, and a control electrode 13 installed near the cold cathode 11 to control the emitted electrons from the cold cathode 11. In this case, the cold cathode 11 is made of diamond, which has a lower electron emission barrier as compared with the control electrode 13 made of Si and positive potential is applied to the anode 16 in relation to the cold cathode 11, and negative potential or the same potential as that to be applied to the cold cathode 11 is applied to the control electrode 13 based on the necessity.

公开(公告)号：JPH0982215A

公开(公告)日：1997-03-28

申请号：JP23221195

申请日：1995-09-11

Applicant: TOSHIBA CORP

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  CHO TOSHI

IPC: H01J9/02 ,  H01J1/30 ,  H01J1/304 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide a uniform and reproductive vacuum micro element with a gate conductive layer electrically insulated and arranged around a quantum size of thin terminal in such a manner that the short small diameter of the opening of an emitter is equal to or less than a shortest distance between emitter and gate metals. SOLUTION: A Si substrate 1 with n-type impurities doped at a high concentration is thermally oxidized to form a thermally oxidized film 2 of thickness 1.5μm, e.g. on the surface. Then, a 0.2μm thick MO as a gate conductive layer 3 is spattered all over and a 1.0μm thick SiN film 4 is laminated thereon with CVD. An array-patterned photoresist mask with an 2μm diameter of circular opening is formed and laminated films are etched in sequence by using PIE, antimony fluoride etching to expose the Si surface. This is anode-formed in hydrofluoric acid to make the surface porous. Only the shape of the end of an emitter is sharpened so that an obtained element has no leak current to a gate at 1μA per unit opening when 200V voltage is applied to an anode.

公开(公告)号：JPH07254369A

公开(公告)日：1995-10-03

申请号：JP6988794

申请日：1994-03-15

Applicant: TOSHIBA CORP

Inventor： NAKAMOTO MASAYUKI ,  ONO TOMIO

IPC: H01J1/304 ,  H01J9/02 ,  H01J19/24 ,  H01J21/06 ,  H01J21/10 ,  H01J1/30

Abstract: PURPOSE:To enhance a field emission efficiency by providing an emitter material layer equipped with a projecting emitter having a sharp tip, an emitter core material layer superposed on the emitter material layer, and an anode electrode opposite to the emitter. CONSTITUTION:A recess is formed on an Si monocrystal substrate serving as an auxiliary substrate. A semiconductor layer composed of a boron diffusing layer 13 is formed on the surface of the Si monocrystal substrate including the recess. An insulative layer 14 is formed on the semiconductor layer. An emitter material layer 15 is formed on the insulative layer 14. On the layer 15, an emitter core material layer 16 is made of a material having a specific resistance larger than that of a constituent material of the layer 15. Consequently, an emitter 23 in conformity of the shape of the recess can be formed with high reproducibility. Furthermore, a protecting effect of the emitter 23 by the layers 13, 14 allows stable formation of the pyramid-like emitter 23 having a sharp tip.

公开(公告)号：JPH06105842A

公开(公告)日：1994-04-19

申请号：JP13084692

申请日：1992-05-22

Applicant: TOSHIBA CORP

Inventor： ONO TOMIO ,  HASHIMOTO SHINICHI ,  IZUMI MAMORU

IPC: A61B8/00 ,  H04R17/00

Abstract: PURPOSE:To make it possible to let an aperture large and to rotate smoothly a transducer without lowering reliability of a probe for observing a tomograph of an arbitrary face by performing mechanical rotation in a body cavity. CONSTITUTION:A number of parallel oscillators 23 are fixed on a circular backing material 26 in such a way that they are positioned to make a circular contour being concentric to the backing material 26 as a whole. Electrodes 21a and 21b are formed on a joining face of each oscillator 23 with the backing material 26 and the opposite face against this. A part of the electrode 21 is exposed on the end face of the circular contour side of each oscillator 23 and a conductive pattern 24 is each bonded with the exposed electrode 21b part and a flexible print base sheet 25 is wound on the peripheral side face of the oscillator.

公开(公告)号：JPH05189733A

公开(公告)日：1993-07-30

申请号：JP579692

申请日：1992-01-16

Applicant: TOSHIBA CORP

Inventor： YAMAMOTO NORIKO ,  ONO TOMIO

IPC: G11B5/592 ,  G01Q10/02 ,  G01Q60/10 ,  G01Q60/16 ,  H01J37/20 ,  H01L41/09 ,  H02N2/00

Abstract: PURPOSE:To prevent ringing of an electromechanical transducer such as a bimorph, etc., and to shorten the reset time. CONSTITUTION:The displacement controller 9 is equipped with the electromechanical transducer, e.g. the bimorph 10. Then, the displacement controller 9 is composed of a voltage supply part 13 for impressing a voltage upon the bimorph 10 in order to establish the relationship of the reset time of the bimorph 10 and a natural frequency when the bimorph 10 is set as a cantilever to meet that the reset time should substantially be 1/2 of the natural frequency.

公开(公告)号：JPH04134615A

公开(公告)日：1992-05-08

申请号：JP25311890

申请日：1990-09-21

Applicant: TOSHIBA CORP ,  TOSHIBA AVE KK

Inventor： SHIMODA KENJI ,  ONO TOMIO ,  YAMAMOTO NORIKO ,  ITAMI TERUO ,  ABE MITSURU

IPC: G11B5/588 ,  G11B15/467 ,  G11B15/52

Abstract: PURPOSE:To restore an actuator to an initial position at the transforming time of an operation mode by providing a stop control means gradually reducing the output voltage of a driving voltage source at a prescribed timing, finally making it to a zero, and restoring an electromechanical transforming element to the initial position corresponding to the mode switching command of an information reproducing device. CONSTITUTION:A dynamic tracking device is provided with the stop control means gradually reducing the driving voltage to autuators 29A and 29B of reproducing heads 28A and 29B at the prescribed timing, finally making it to the zero, and restoring the autuators 29A and 29B to the initial position corresponding to the reproduction stop command of the information reproducing device. In the device by this constitution, since the driving voltage to the actuators 29A and 29B does not suddenly turn to the zero at the reproduction stop, but is reduced gradually, at the transforming time of the reproduction stop, it is possible to accurately restore the actuators 29A and 29B to the initial position by a mode stop control circuit 40A without generating a ringing, and thus, it is possible to control the head moving position at the next mode operation time, and also to prolong the life time of the actuators 29A and 29B.

公开(公告)号：JPH03171750A

公开(公告)日：1991-07-25

申请号：JP30892789

申请日：1989-11-30

Applicant: TOSHIBA CORP

Inventor： AKAMA YOSHIAKI ,  HENMI KAZUHIRO ,  ONO TOMIO

IPC: H01J37/20 ,  H01L21/66

Abstract: PURPOSE:To provide a new fine movement mechanism with a high resolution, a large stroke, a high rigidity between a probing needle and a sample, and which shows a linear displacement for applied voltage by employing a disk- shaped bimorph element in the fine movement mechanism. CONSTITUTION:A fine movement mechanism consists of a disk-shaped bimorph element 1 and a fixing tool 5 which completely fixes the surrounding and a displacement is generated by applying the same drive electric field to the electrode of both surface. For example, when a positive electric field is applied to the electrode of both surfaces, the disk-shaped bimorph element 1 deviates in S-character shape with the center as the boundary and the central part moves in vertical direction within the element surface. Application of a negative electric field also induces movement in the opposite direction. For linearly driving this disk-shaped bimorph element, an electrode which is divided into two portions in the direction of radius on both surfaces of disk is formed, polarization treatment is provided so that the direction of polarization may be perfectly opposite with this two-division part as a boundary, and the same drive electric field is applied to both parts for improving efficiency.

公开(公告)号：JPH01251965A

公开(公告)日：1989-10-06

申请号：JP7871088

申请日：1988-03-31

Applicant: TOSHIBA CORP

Inventor： KONDO TAKESHI ,  ONO TOMIO

IPC: H01L27/14 ,  H01L27/148 ,  H01L41/04 ,  H04N5/335 ,  H04N5/349 ,  H04N5/369 ,  H04N5/3728

Abstract: PURPOSE:To improve the reliability and the mechanical stability of an electrical connection in a solid-state image picking up element by fixing a first supporting body, for which the solid-state image picking up element is provided, through an elastic member to a second supporting body. CONSTITUTION:A package 11, for which the solid-state image picking up element is provided, is fixed to a socket 12 as the first supporting body. The socket 12 is equipped with plural elastic members, for example, metal leads 14, the respective leads 14 are electrically connected to the solid-state image pickup element, and the socket 12 is firmly fixed to a substrate 13 as the second supporting body with the leads 14. On the other hand, a piezoelectric displacement element 15 is provided between the first and second supporting bodies and oscillates the first supporting body for the second supporting body. Thus, the reliability and the mechanical stability of the electrically connection in the solid-state image pickup element can be improved.