公开(公告)号：EP2215647A2

公开(公告)日：2010-08-11

申请号：EP08806729.3

申请日：2008-10-07

Applicant: Edwards Limited

Inventor： KEY, Matthew

IPC: H01J41/06

CPC classification number: H01J41/06

Abstract: A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.

公开(公告)号：EP1519401B1

公开(公告)日：2009-06-03

申请号：EP04014545.0

申请日：2004-06-22

Applicant: VARIAN S.p.A.

Inventor： Correale, Raffaele

IPC: H01J41/06 ,  G01L21/34

CPC classification number: B82Y10/00 ,  H01J41/06

公开(公告)号：EP1700093A2

公开(公告)日：2006-09-13

申请号：EP04816049.3

申请日：2004-12-17

Applicant: FEI COMPANY

Inventor： LIU, Kun

IPC: G01L21/30

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: A cold cathode ion gauge is provided that is suitable for use in a high vacuum and in the presence of contaminating gases. By decreasing the discharge current and, more precisely, decreasing the charge current density received by the gauge electrodes, and using certain type of materials for the gauge electrodes, the mechanism by which insulating films are deposited on surface of the electrodes is attenuated and the life of the gauge is significantly prolonged. The gauge discharge current can be decreased by providing a large resistor in series with the anode, while the charge current density can be decreased by using an electrode with larger surface area, which can be achieved by fabricating grooves or fans on electrodes and by using low electron backscattering and low secondary emission materials, like carbon. Another concept of constant current mode is also proposed in this invention for extending the lifetime of CCIGs that are used for vacuum containing unfriendly gases.

公开(公告)号：EP1540294B1

公开(公告)日：2005-12-28

申请号：EP03753312.2

申请日：2003-09-17

Applicant: Otto-Von-Guericke-Universität Magdeburg

Inventor： EDELMANN, Christian ,  WILFERT, Stefan

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

Abstract: The invention relates to a cold-cathode ionisation manometer for measuring pressure in a vacuum, said manometer operating according to the inverse magnetron principle and being used to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10 Pa and 1 Pa). The aim of the invention is to reduce the contamination tendency and thus to extend the service life of said measuring tubes. To this end, a measuring tube comprising two separately controlled cathodes (K1, K2) and a common anode (A), enabling two independent discharges to be ignited inside the same, is used. While a discharge (K1) which is directly localised at the inlet of the measuring tube takes on the function of a gas purification device in which plasma-chemical dissociation reactions enable vapours contaminated by hydrocarbons or other substances entering into the measuring tube to be cracked or polymerised, a second discharge chamber (K2) inserted into the measuring tube housing (MRG) and protected by a gas discharge path (K1) operates as an intrinsic measuring chamber. Only the discharge current flowing out of said discharge area (K2) is evaluated and is used to measure the pressure. Said special double-chamber measuring tube geometry enables the plasma to burn in the integral measuring chamber (K2) under optimum conditions of cleanliness, thus enabling the service life of the measuring tube to be extended.

公开(公告)号：EP0799413B1

公开(公告)日：2000-02-23

申请号：EP95932704.0

申请日：1995-09-09

Applicant: LEYBOLD VACUUM GmbH

Inventor： KÜSTER, Gerhard

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

Abstract: The invention pertains to a Penning measuring cell (1) with an electrode system that comprises an anode (5) and a cathode (2), which are situated in the magnetic field of a permanent magnet (8, 9), and with an ignition aid (11) for the electrode system (2, 5). To ensure rapid and reliable ignition the invention proposes attaching to the anode (5) as ignition aid (11) at least one metal strip (11) the free end of which extends towards the cathode (2).

公开(公告)号：EP0431233A1

公开(公告)日：1991-06-12

申请号：EP89810932.7

申请日：1989-12-08

Applicant: Balzer, Dinoo, Dr.

Inventor： Balzer, Richard

IPC: H01J41/06

CPC classification number: H01J41/06 ,  G01M3/202

Abstract: Die Partialdruckmesszelle besteht aus der Kombination einer magnetisch geführten Kaltkathodenentladung zur Ionisation des Restgases (Ionen­quelle) mit einer magnetischen Trennung der Ionenmassen (Massenspektro­meter). Dabei wird die Entladung durch ein geeignetes inhomogenes Magnetfeld derart geformt, dass die Streuung der Ionenenergie genügend klein ist, um die für eine Partialdruckmessung (bei der Lecksuche) erforderliche Auflösung der Massentrennung zu gewährleisten. Die Beschleunigung der Ionen erfolgt ausschliesslich im elektrischen Feld des Entladungsraumes. Die spezielle Form der verwendeten Kaltkathoden­entladung beeinflusst das elektrische Feld nun derart, dass die Ener­gie der emittierten Ionen niedrig und praktisch unabhängig von der Ent­ladungsspannung bleibt. Wegen der niedrigen Ionenenergie wird für die Massentrennung nur ein bescheidenes Magnetfeld benötigt, weshalb das Massenspektrometer und die Ionenquelle mit der magnetischen Entladungs­führung in ein einziges Magnetsystem integriert werden können.

Abstract translation: 局部压力表由用于残余气体（离子源）的离子化一磁性引导冷阴极放与质量离子的磁分离（质谱仪）的组合构成。 在这种情况下，放电由合适的非均匀磁场，例如形成的离子能量的分散是足够小，以确保所要求的分压（用于泄漏检测）的分辨率质量分离的。 离子的加速度发生仅仅在放电空间中的电场。 冷阴极放电的特殊形状使用影响的电场现在使得所发射的离子的能量是不依赖于放电电压低而实用。 由于低离子能量，需要一种用于质量分离，这就是为什么质谱仪，并用磁性排放导向离子源可以被集成到一个单一的磁系统仅有适度的磁场。

公开(公告)号：US20150091579A1

公开(公告)日：2015-04-02

申请号：US14500820

申请日：2014-09-29

Applicant: MKS Instruments, Inc,

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly

IPC: G01L21/34 ,  H01J9/50 ,  G01L19/06

CPC classification number: G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

Abstract translation: 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。

公开(公告)号：US20110234233A1

公开(公告)日：2011-09-29

申请号：US12808983

申请日：2008-12-17

Applicant: Gerardo A. Brucker

Inventor： Gerardo A. Brucker

IPC: G01L21/30 ,  G01N27/62

CPC classification number: G01L21/34 ,  G01N27/64 ,  H01J41/06

Abstract: An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.

Abstract translation: 电离计包括电子发生器阵列，其包括微通道板，该微通道板包括微通道板的电子产生部分，该微通道板包括用于产生种子电子的源和微通道板的电子倍增器部分，其响应于由电子产生产生的种子电子 部分，乘以电子。 电离计包括其中电子撞击气态物质的离子化体积，以及用于收集由电子和气体物质之间的冲击形成的离子的集电极。 集电极可以被阳极包围，或者电离计可以形成多个集电极。 电子源可以提供电子的自发发射，其中电子被级联地相乘。

公开(公告)号：US20100259273A1

公开(公告)日：2010-10-14

申请号：US12724543

申请日：2010-03-16

Applicant: Yohsuke Kawasaki ,  Toshio Kikuchi

Inventor： Yohsuke Kawasaki ,  Toshio Kikuchi

IPC: G01L21/34

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate.

Abstract translation: 本发明提供一种冷阴极电离真空计，即使在长时间使用的情况下也能够在短时间内触发放电，而不需要复杂的装置。 具有棒状阳极位于其一端具有放电空间的测量元件容器（阴极）的内部的结构，该放电空间被密封，并且在该阳极上安装放电起始辅助电极。 放电起动辅助电极通过在放电起动辅助电极板上形成碳纳米管层而在短时间内触发放电。

公开(公告)号：US07795876B2

公开(公告)日：2010-09-14

申请号：US11885719

申请日：2006-03-02

Applicant: Daniel Wetzig ,  Ludolf Gerdau

Inventor： Daniel Wetzig ,  Ludolf Gerdau

IPC: G01L21/30 ,  G01N27/62

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.

Abstract translation: 冷阴极压力传感器具有气密的壳体，布置在壳体中的阳极和阴极以及指向阴极的用于点燃冷阴极放电的辐射源。 壳体具有测试气体入口，并且至少部分地由玻璃制成。 辐射源设置在外壳外部，并通过外壳玻璃照射阴极。 辐射源基本上发射波长大于400nm且小于1400nm的辐射。