公开(公告)号：WO2005081920A3

公开(公告)日：2007-01-04

申请号：PCT/US2005005537

申请日：2005-02-22

Applicant: VEECO INSTR INC ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A ,  SIEGFRIED DANIEL E ,  ZHURIN VIACHESLAV V

Inventor： BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A ,  SIEGFRIED DANIEL E ,  ZHURIN VIACHESLAV V

IPC: G01T1/18 ,  H01J7/24 ,  H01J47/02 ,  H01J47/06 ,  H01J47/08

CPC classification number: H01J27/04 ,  H01J2237/002 ,  H01J2237/08

Abstract: An ion source (400) is cooled using a cooling plate (412) that is separate and independent of the anode (408). The coolin plate (412) forms a coolant cavity (414) through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, a magnet may be thermally protected by the cooling plate. A thermally conductive material in a thermal transfer interface component can enhance the cooling capacity of the cooling plate. Combining these structures into an anode subassembly and magnet subassembly can also facilitate assembly and maintenance of the ion source.

Abstract translation: 使用与阳极（408）分离且独立的冷却板（412）来冷却离子源（400）。 冷却板（412）形成冷却剂腔（414），流体冷却剂（例如，液体或气体）可以流过冷却剂腔以冷却阳极。 在这种构造中，磁体可被冷却板热保护。 传热介质部件中的导热材料可以提高冷却板的冷却能力。 将这些结构组合成阳极子组件和磁体子组件也可以促进离子源的组装和维护。

公开(公告)号：WO2005010912A2

公开(公告)日：2005-02-03

申请号：PCT/US2004/023969

申请日：2004-07-22

Applicant: VEECO INSTRUMENTS, INC. ,  SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A.

Inventor： SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A.

IPC: H01J

CPC classification number: H01J27/143

Abstract: A modular ion source design relies on relatively short modular core ALS components, which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A flexible anode can adapt to inconsistencies in the ion source body and module joints to hold a uniform anode-cathode gap along the length of the ALS. A clamp configuration fixes the cooling tube to the ion source body, thereby avoiding heat-introduced warping to the source body during manufacturing.

Abstract translation: 模块化离子源设计依赖于相对较短的模块化核心ALS组件，其可以耦合在一起以形成更长的ALS，同时保持阳极 - 阴极间隙的可接受的容限。 许多模块化部件可被设计成具有共同特征，以便允许在不同尺寸的离子源中使用这些部件。 柔性阳极可以适应离子源体和模块接头的不一致性，以沿着ALS的长度保持均匀的阳极 - 阴极间隙。 夹具构造将冷却管固定到离子源体，从而避免在制造过程中向源体引入的翘曲翘曲。

公开(公告)号：WO2005081920A2

公开(公告)日：2005-09-09

申请号：PCT/US2005/005537

申请日：2005-02-22

Applicant: VEECO INSTRUMENTS, INC. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A. ,  SIEGFRIED, Daniel, E. ,  ZHURIN, Viacheslav, V.

Inventor： BURTNER, David, Matthew ,  TOWNSEND, Scott, A. ,  SIEGFRIED, Daniel, E. ,  ZHURIN, Viacheslav, V.

IPC: H01J7/24

CPC classification number: H01J27/04 ,  H01J2237/002 ,  H01J2237/08

Abstract: An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally protected by the cooling plate. A thermally conductive material in a thermal transfer interface component can enhance the cooling capacity of the cooling plate. Furthermore, the separation of the cooling plate and the anode allows the cooling plate and cooling lines to be electrically isolated from the high voltage of the anode (e.g., using a thermally conductive, electrically insulating material). Combining these structures into an anode subassembly and magnet subassembly can also facilitate assembly and maintenance of the ion source, particularly as the anode is free of coolant lines, which can present some difficulty during maintenance.

Abstract translation: 使用独立于阳极的冷却板来冷却离子源。 冷却板形成冷却剂腔，流体冷却剂（例如，液体或气体）可通过其流动以冷却阳极。 在这种构造中，磁体可以被冷却板热保护。 传热接口部件中的导热材料可以提高冷却板的冷却能力。 此外，冷却板和阳极的分离允许冷却板和冷却线与阳极的高电压（例如，使用导热的电绝缘材料）电隔离。 将这些结构组合到阳极子组件和磁体子组件中也可以促进离子源的组装和维护，特别是当阳极没有冷却剂管线时，这在维护过程中可能存在一些困难。

公开(公告)号：WO2005020265A2

公开(公告)日：2005-03-03

申请号：PCT/US2004/027189

申请日：2004-08-20

Applicant: VEECO INSTRUMENTS, INC. ,  BURTNER, David, Matthew ,  SIEGFRIED, Daniel, E. ,  BLACKER, Richard ,  ALEXEYEV, Valery ,  KEEM, John ,  ZELENKOV, Vsevolod ,  KRIVORUCHKO, Mark

Inventor： BURTNER, David, Matthew ,  SIEGFRIED, Daniel, E. ,  BLACKER, Richard ,  ALEXEYEV, Valery ,  KEEM, John ,  ZELENKOV, Vsevolod ,  KRIVORUCHKO, Mark

IPC: H01J

CPC classification number: H01J1/00

Abstract: Shielding associated with an ion source, such as an anode layer source, reduces the amount and/or concentration of sputtered contaminants impinging and remaining on the surface of a target substrate. While passing the ion beam through to the target substrate, shielding can reduce the total amount of sputtered contaminants impinging the substrate before, during, and/or after passage of the substrate through the envelope of the etching beam. Particularly, a shield configuration that blocks the contaminants from impinging the substrate after the substrate passes through the etching beam (i.e., outside of the envelope of the etching beam) yields a higher quality substrate with reduced substrate contamination.

Abstract translation: 与离子源（例如阳极层源）相关联的屏蔽减少了撞击并残留在目标衬底表面上的溅射污染物的量和/或浓度。 当将离子束通过目标衬底时，屏蔽可以减少在衬底通过蚀刻光束的外壳之前，之中和/或之后撞击衬底的溅射污染物的总量。 特别地，在衬底通过蚀刻光束（即，蚀刻光束的外壳之外）阻挡污染物撞击衬底的屏蔽结构产生具有降低的衬底污染的较高质量的衬底。

公开(公告)号：WO2005020265A3

公开(公告)日：2006-04-20

申请号：PCT/US2004027189

申请日：2004-08-20

Applicant: VEECO INSTR INC ,  BURTNER DAVID MATTHEW ,  SIEGFRIED DANIEL E ,  BLACKER RICHARD ,  ALEXEYEV VALERY ,  KEEM JOHN ,  ZELENKOV VSEVOLOD ,  KRIVORUCHKO MARK

Inventor： BURTNER DAVID MATTHEW ,  SIEGFRIED DANIEL E ,  BLACKER RICHARD ,  ALEXEYEV VALERY ,  KEEM JOHN ,  ZELENKOV VSEVOLOD ,  KRIVORUCHKO MARK

IPC: H01J20060101 ,  G21K5/10

CPC classification number: H01J1/00

Abstract: Shielding (108) associated with an ion source (102), such as an anode layer source, reduces the amount and/or concentration of sputtered contaminants impinging and remaining on the surface of a target substrate (110). While passing the ion beam through to the target substrate (110), shielding (108) can reduce the total amount of sputtered contaminants impinging the substrate (110) before, during, and/or after passage of the substrate (110) through the envelope of the etching beam. Particularly, a shield configuration (108) that blocks the contaminants from impinging the substrate (110) after the substrate (100) passes through the etching beam (i.e., outside of the envelope of the etching beam) yields a higher quality substrate (110) with reduced substrate (110) contamination.

Abstract translation: 与诸如阳极层源的离子源（102）相关联的屏蔽（108）减少了撞击并保留在目标衬底（110）的表面上的溅射污染物的量和/或浓度。 当通过离子束通过目标衬底（110）时，屏蔽（108）可以减少在衬底（110）穿过信封之前，期间和/或之后撞击衬底（110）的溅射污染物的总量 的蚀刻光束。 特别地，在衬底（100）通过蚀刻光束（即，蚀刻光束的外壳之外）阻挡污染物撞击衬底（110）的屏蔽配置（108）产生更高质量的衬底（110） 具有减少的基底（110）污染。

公开(公告)号：WO2005010912A3

公开(公告)日：2005-08-25

申请号：PCT/US2004023969

申请日：2004-07-22

Applicant: VEECO INSTR INC ,  SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A

Inventor： SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A

IPC: H01J20060101 ,  H01J7/24

CPC classification number: H01J27/143

Abstract: A modular ion source design relies on relatively short modular core ALS components (100), which can be coupled together to form a longer ALS while maintaining an acceptable tolerance of the anode-cathode gap. Many of the modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A flexible anode can adapt to inconsistencies in the ion source body and module joints to hold a uniform anode-cathode gap along the length of the ALS. A clamp configuration (110) fixes the cooling tube (108) to the ion source body, thereby avoiding heat-introduced warping to the source body during manufacturing.

Abstract translation: 模块化离子源设计依赖于相对较短的模块化核心ALS组件（100），其可以耦合在一起以形成更长的ALS，同时保持阳极 - 阴极间隙的可接受的容限。 许多模块化部件可被设计成具有共同特征，以便允许在不同尺寸的离子源中使用这些部件。 柔性阳极可以适应离子源体和模块接头的不一致性，以沿着ALS的长度保持均匀的阳极 - 阴极间隙。 夹具构造（110）将冷却管（108）固定到离子源体上，从而避免在制造过程中向源体引入翘曲翘曲。

公开(公告)号：WO2005010360A3

公开(公告)日：2005-06-23

申请号：PCT/US2004023962

申请日：2004-07-22

Applicant: VEECO INSTR INC ,  SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A

Inventor： SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A

IPC: B03C3/00 ,  F03H20060101 ,  H01J7/24

CPC classification number: H01J27/143 ,  H01J27/022 ,  H01J2237/08

Abstract: A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS (200). For long ion sources, these shorter modular components allow easier manufacturing and further result in a final assembly having better precision (e.g., a uniform gap dimensions along the longitudinal axis of the ion source). Modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A modular gas distribution system distributes a working gas to the ionization region of the module ion source. For each gas distribution module (202), gas distribution channels (220) and baffles (222) are laid out relative to the module joints to prevent gas leakage. Furthermore, gas manifolds (223) and supply channels are used to bridge module joints while uniformly distributing the working gas to the ALS.

Abstract translation: 模块化离子源设计依赖于相对短的模块化阳极层源（ALS）组件，其可以耦合在一起以形成更长的ALS（200）。 对于长离子源，这些较短的模块化部件允许更容易的制造，并且进一步导致最终组装具有更好的精度（例如，沿着离子源的纵向轴线的均匀间隙尺寸）。 模块化部件可以设计成具有共同的特性，以便允许在不同尺寸的离子源中使用这些部件。 模块化气体分配系统将工作气体分配到模块离子源的电离区域。 对于每个气体分配模块（202），相对于模块接头布置气体分配通道（220）和挡板（222），以防止气体泄漏。 此外，气体歧管（223）和供应通道用于桥接模块接头，同时将工作气体均匀分布到ALS。

公开(公告)号：WO2005010911A3

公开(公告)日：2005-02-03

申请号：PCT/US2004/023890

申请日：2004-07-22

Applicant: VEECO INSTRUMENTS, INC. ,  SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A. ,  KEEM, John ,  KRIVORUSCHKO, Mark ,  ALEXEYEV, Valery ,  ZELENKOV, Vsevolod

Inventor： SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A. ,  KEEM, John ,  KRIVORUSCHKO, Mark ,  ALEXEYEV, Valery ,  ZELENKOV, Vsevolod

IPC: H01J7/24

Abstract: An ion source design and manufacturing techniques allows longitudinal cathode expansion along the length of the anode layer source (ALS) (300). Cathode covers (304) are used to secure the cathode plates (302) to the source body assembly (308) of an ion source. The cathode covers (304) allow the cathode plate (302) to expand along the longitudinal axis of the ion source, thereby relieving the stress introduced by differential thermal expansion. In addition, the cathode cover (304) configuration allows for less expensive cathode plates (302), including modular cathode plates. Such plates can be adjusted relative to the cathode-cathode gap to prolong the life of a given cathode plate and maintain source performance requirements. A cathode plate (302) in a linear section of an ion source has symmetrical edges and can, therefore, be flipped over to exchange the first (worn) cathode edge with the second (unworn) cathode edge.

公开(公告)号：WO2005010911A2

公开(公告)日：2005-02-03

申请号：PCT/US2004023890

申请日：2004-07-22

Applicant: VEECO INSTR INC ,  SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A ,  KEEM JOHN ,  KRIVORUSCHKO MARK ,  ALEXEYEV VALERY ,  ZELENKOV VSEVOLOD

Inventor： SIEGFRIED DANIEL E ,  BURTNER DAVID MATTHEW ,  TOWNSEND SCOTT A ,  KEEM JOHN ,  KRIVORUSCHKO MARK ,  ALEXEYEV VALERY ,  ZELENKOV VSEVOLOD

IPC: H01J20060101 ,  H01J7/24 ,  H01J27/00 ,  H01J

CPC classification number: H01J27/143

Abstract: An ion source design and manufacturing techniques allows longitudinal cathode expansion along the length of the anode layer source (ALS). Cathode covers are used to secure the cathode plates to the source body assembly of an ion source. The cathode covers allow the cathode plate to expand along the longitudinal axis of the ion source, thereby relieving the stress introduced by differential thermal expansion. In addition, the cathode cover configuration allows for less expensive cathode plates, including modular cathode plates. Such plates can be adjusted relative to the cathode-cathode gap to prolong the life of a given cathode plate and maintain source performance requirements. A cathode plate in a linear section of an ion source has symmetrical edges and can, therefore, be flipped over to exchange the first (worn) cathode edge with the second (unworn) cathode edge.

Abstract translation: 离子源设计和制造技术允许纵向阴极沿阳极层源（ALS）的长度膨胀。 阴极盖用于将阴极板固定到离子源的源体组件。 阴极盖允许阴极板沿着离子源的纵向轴线膨胀，从而减轻由差动热膨胀引入的应力。 此外，阴极盖构造允许较便宜的阴极板，包括模块化阴极板。 这样的板可以相对于阴极 - 阴极间隙进行调节，以延长给定阴极板的使用寿命并保持源性能要求。 离子源的线性部分中的阴极板具有对称的边缘，因此可以翻转以与第二（未损坏的）阴极边缘交换第一（磨损）的阴极边缘。

公开(公告)号：WO2005010360A2

公开(公告)日：2005-02-03

申请号：PCT/US2004/023962

申请日：2004-07-22

Applicant: VEECO INSTRUMENTS, INC. ,  SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A.

Inventor： SIEGFRIED, Daniel, E. ,  BURTNER, David, Matthew ,  TOWNSEND, Scott, A.

IPC: F03H

CPC classification number: H01J27/143 ,  H01J27/022 ,  H01J2237/08

Abstract: A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular components allow for easier manufacturing and further result in a final assembly having better precision (e.g., a uniform gap dimensions along the longitudinal axis of the ion source). Modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A modular gas distribution system uniformly distributes a working gas to the ionization region of the module ion source. For each gas distribution module, gas distribution channels and baffles are laid out relative to the module joints to prevent gas leakage. Furthermore, gas manifolds and supply channels are used to bridge module joints while uniformly distributing the working gas to the ALS.

Abstract translation: 模块化离子源设计依赖于相对短的模块化阳极层源（ALS）组件，其可以耦合在一起以形成更长的ALS。 对于长离子源，这些较短的模块化部件允许更容易的制造，并且进一步导致最终组装具有更好的精度（例如，沿离子源的纵向轴线的均匀间隙尺寸）。 模块化部件可以设计成具有共同的特性，以便允许在不同尺寸的离子源中使用这些部件。 模块化气体分配系统将工作气体均匀分布到模块离子源的电离区域。 对于每个气体分配模块，气体分配通道和挡板相对于模块接头布置，以防止气体泄漏。 此外，气体歧管和供应通道用于桥接模块接头，同时将工作气体均匀分布到ALS。