Abstract:
A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 mum above the electrodes.
Abstract:
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.
Abstract:
An embodiment of the present invention provides for a method and a system for updating a table of mirror positions to compensate for drifts experienced by the mirrors. The drifts for at least one surrogate mirror in a first mirror are measured. The first mirror array comprises a plurality of working mirrors and surrogate mirrors. The working mirror carries working light in a working path and the surrogate mirror carries test light in a calibration path. The drifts for the working mirrors are estimated using the drifts measured from the surrogate mirrors. The mirror positions of the surrogate mirrors and the working mirrors are updated to compensate for the measured drifts and the estimated drifts respectively. The mirror positions point each mirror in the first mirror array to a plurality of target mirrors in a second mirror array.
Abstract:
Fiber block (102, 104) construction for optical switches and techniques for making the same are disclosed to achieve high positional accuracy for fiber arrays. High positional accuracy is achieved by using fiber plates (122, 124) with tapered holes, using multiple fiber plates to control both position and angle accuracy of fiber arrays, using tapered fibers for easy insertion of fibers into holes of fiber plates (122, 124), using epoxy to position accurately fiber arrays, using semi-automation to insert accurately fibers (114, 116) into holes of a fiber plate (106, 108), using a custom fiber input block to correct for lens array (106, 108) position errors, and using stackable plates with grooves to position accurately fiber arrays.
Abstract:
An apparatus and method of controlling optical loss in an optical switch to equalize optical power or loss in a group of optical signals in an optical transmission system relatively insensitive to mechanical vibration. In one embodiment a group of optical signals is input into an optical switch and selected optical signals are variably attenuated using synchronized control to two mirrors in order to provide more uniform power distribution among the group of optical signals without enhancing vibration sensitivity of the optical switch.
Abstract:
An improved photonic switch having optical amplification is described. Signals are amplified before they are switched, after they are switched, or both before and after they are switched. The optical amplification compensates for fixed losses within the switch and transmission system, or provides output power equalization. The photonic switching system includes a demultiplexer for dividing incoming light into different wavelengths or wavebands. The different signals are then supplied to optical amplifiers. The amplifiers amplify the optical signals before supplying them to the optical switch core. Once in the optical switch core, the signals are switched as desired to specified output nodes, then multiplexed back together to provide an output signal from the photonic switching system. In some systems amplification is further provided on the output side. The system also provides a control system by which the optical power of the signals is sensed and controllably amplified to achieve desired results, for example, fixed loss compensation, output power equalization, or other desired levels.
Abstract:
A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.
Abstract:
A method for ensuring path integrity in an optical switch is provided that essentially eliminates any occurrences of misconnected paths and enables new signal paths to be easily generated and existing paths to be switched. The method is suitable for use in optical switching devices that enable selective connection of optical signals received on a plurality of input fibers to respective output fibers, wherein the optical switching device includes a first array of mirrors disposed in a first mirror plane and a second array of mirrors disposed in a second mirror plane. In accord with the method, all mirrors are maintained in signal paths so that undesired light is prevented from reaching any of the output fibers. The mirror in the second mirror plane that is to be part of a new signal path is moved into its correct position for the new path, while the positions of the other mirrors are controlled such that no light is directed toward the second plane mirror or output fiber corresponding to the new signal path. A light is received on the input fiber and directed toward the mirror in the first mirror plane that is to be part of the signal path while the mirror is moved to direct light toward the second plane mirror, in a timed, controlled, motion. Proper configuration is then confirmed by observing a change in the output signal produced at the output fiber. The positions of each of the mirrors are then adjusted to optimize the signal path.