Micro-electro-mechanical-system (mems) mirror device and methods for fabricatingthe same

    公开(公告)号:AU3322801A

    公开(公告)日:2001-08-14

    申请号:AU3322801

    申请日:2001-02-01

    Abstract: A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 mum above the electrodes.

    METHOD AND APPARATUS FOR MIRROR CONTROL IN AN OPTICAL CROSS-CONNECT SWITCH
    5.
    发明申请
    METHOD AND APPARATUS FOR MIRROR CONTROL IN AN OPTICAL CROSS-CONNECT SWITCH 审中-公开
    光学交叉连接开关中的镜子控制的方法和装置

    公开(公告)号:WO0195009A3

    公开(公告)日:2002-10-17

    申请号:PCT/US0117767

    申请日:2001-05-31

    Inventor: HUNT PETER

    CPC classification number: G02B6/3586 G02B6/3518 G02B6/3556 G02B6/357

    Abstract: An embodiment of the present invention provides for a method and a system for updating a table of mirror positions to compensate for drifts experienced by the mirrors. The drifts for at least one surrogate mirror in a first mirror are measured. The first mirror array comprises a plurality of working mirrors and surrogate mirrors. The working mirror carries working light in a working path and the surrogate mirror carries test light in a calibration path. The drifts for the working mirrors are estimated using the drifts measured from the surrogate mirrors. The mirror positions of the surrogate mirrors and the working mirrors are updated to compensate for the measured drifts and the estimated drifts respectively. The mirror positions point each mirror in the first mirror array to a plurality of target mirrors in a second mirror array.

    Abstract translation: 本发明的实施例提供了一种用于更新镜子位置表以补偿由镜子经历的漂移的方法和系统。 测量第一反射镜中至少一个替代反射镜的漂移。 第一反射镜阵列包括多个工作镜和代用镜。 工作镜在工作路径上运送工作光,代理镜在校准路径中运送测试光。 使用从代理镜测量的漂移来估计工作镜的漂移。 替代镜和工作镜的镜像位置被更新,以补偿测量的漂移和估计的漂移。 反射镜位置将第一反射镜阵列中的每个反射镜指向第二反射镜阵列中的多个目标反射镜。

    FIBER BLOCK CONSTRUCTION FOR OPTICAL SWITCHES AND TECHNIQUES FOR MAKING THE SAME
    6.
    发明申请
    FIBER BLOCK CONSTRUCTION FOR OPTICAL SWITCHES AND TECHNIQUES FOR MAKING THE SAME 审中-公开
    光纤开关的光纤结构及其制造技术

    公开(公告)号:WO0194995A3

    公开(公告)日:2003-05-01

    申请号:PCT/US0117725

    申请日:2001-05-31

    Abstract: Fiber block (102, 104) construction for optical switches and techniques for making the same are disclosed to achieve high positional accuracy for fiber arrays. High positional accuracy is achieved by using fiber plates (122, 124) with tapered holes, using multiple fiber plates to control both position and angle accuracy of fiber arrays, using tapered fibers for easy insertion of fibers into holes of fiber plates (122, 124), using epoxy to position accurately fiber arrays, using semi-automation to insert accurately fibers (114, 116) into holes of a fiber plate (106, 108), using a custom fiber input block to correct for lens array (106, 108) position errors, and using stackable plates with grooves to position accurately fiber arrays.

    Abstract translation: 公开了用于光开关的光纤块(102,104)结构及其制造技术,以实现光纤阵列的高位置精度。 通过使用具有锥形孔的纤维板(122,124),使用多个纤维板来控制纤维阵列的位置和角度精度,使用锥形纤维容易地将纤维插入纤维板(122,124)的孔中来实现高位置精度 ),使用环氧树脂来精确定位光纤阵列,使用半自动化将光纤(114,116)精确地插入光纤板(106,108)的孔中,使用定制光纤输入块来校正透镜阵列(106,108 )位置误差,并使用具有凹槽的可堆叠板来精确定位光纤阵列。

    Optical switch with adjustable optical loss
    7.
    发明申请
    Optical switch with adjustable optical loss 失效
    具有可调光损耗的光开关

    公开(公告)号:US20040081390A1

    公开(公告)日:2004-04-29

    申请号:US10616244

    申请日:2003-07-08

    Abstract: An apparatus and method of controlling optical loss in an optical switch to equalize optical power or loss in a group of optical signals in an optical transmission system relatively insensitive to mechanical vibration. In one embodiment a group of optical signals is input into an optical switch and selected optical signals are variably attenuated using synchronized control to two mirrors in order to provide more uniform power distribution among the group of optical signals without enhancing vibration sensitivity of the optical switch.

    Abstract translation: 一种控制光开关中光损耗的装置和方法,用于对光机械振动相对不敏​​感的光传输系统中的一组光信号中的光功率或损耗进行均衡。 在一个实施例中,一组光信号被输入到光开关中,并且使用对两个反射镜的同步控制可选择地衰减所选择的光信号,以便在光信号组之间提供更均匀的功率分布,而不增加光开关的振动灵敏度。

    Optical amplification in photonic switched crossconnect systems
    8.
    发明申请
    Optical amplification in photonic switched crossconnect systems 有权
    光交换交叉连接系统中的光放大

    公开(公告)号:US20030185488A1

    公开(公告)日:2003-10-02

    申请号:US10115680

    申请日:2002-04-02

    Abstract: An improved photonic switch having optical amplification is described. Signals are amplified before they are switched, after they are switched, or both before and after they are switched. The optical amplification compensates for fixed losses within the switch and transmission system, or provides output power equalization. The photonic switching system includes a demultiplexer for dividing incoming light into different wavelengths or wavebands. The different signals are then supplied to optical amplifiers. The amplifiers amplify the optical signals before supplying them to the optical switch core. Once in the optical switch core, the signals are switched as desired to specified output nodes, then multiplexed back together to provide an output signal from the photonic switching system. In some systems amplification is further provided on the output side. The system also provides a control system by which the optical power of the signals is sensed and controllably amplified to achieve desired results, for example, fixed loss compensation, output power equalization, or other desired levels.

    Abstract translation: 描述了具有光放大器的改进的光子开关。 信号在被切换之后被切换之后被放大,或者在它们被切换之前和之后被放大。 光放大补偿开关和传输系统内的固定损耗,或提供输出功率均衡。 光子切换系统包括用于将入射光分成不同波长或波段的解复用器。 然后将不同的信号提供给光放大器。 在将光信号提供给光开关芯之前,放大器放大光信号。 一旦在光开关核心中,信号根据需要切换到指定的输出节点,然后被多路复用以提供来自光子交换系统的输出信号。 在一些系统中,进一步在输出侧提供放大。 该系统还提供了一种控制系统,通过该控制系统可以感测信号的光功率并可控制地放大,以获得期望的结果,例如固定损耗补偿,输出功率均衡或其他所需的电平。

    A MEMS MIRROR DEVICE HAVING LARGE ANGLE OUT OF PLANE MOTION USING SHAPED COMBED FINGER ACTUATORS AND METHOD FOR FABRICATION
    9.
    发明申请
    A MEMS MIRROR DEVICE HAVING LARGE ANGLE OUT OF PLANE MOTION USING SHAPED COMBED FINGER ACTUATORS AND METHOD FOR FABRICATION 审中-公开
    具有使用形状的组合手指致动器的平面运动的大角度的MEMS反射器件以及用于制造的方法

    公开(公告)号:WO0188594A3

    公开(公告)日:2003-04-17

    申请号:PCT/US0113978

    申请日:2001-04-30

    Abstract: A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.

    Abstract translation: 微电子机械系统(MEMS)镜装置包括能够在静电致动时移动的反射镜部件。 MEMS反射镜装置还包括提供静电致动的一个或多个静电致动器。 静电致动器具有大致垂直于镜子部件设置的板。 板被设置成限定沿着垂直于镜部件的表面的方向减小的板之间的间隙。

    MAINTAINING PATH INTEGRITY IN AN OPTICAL SWITCH
    10.
    发明申请
    MAINTAINING PATH INTEGRITY IN AN OPTICAL SWITCH 审中-公开
    维持光开关中的路径完整性

    公开(公告)号:WO0195011A3

    公开(公告)日:2002-09-19

    申请号:PCT/US0117904

    申请日:2001-05-31

    Inventor: HUNT PETER

    Abstract: A method for ensuring path integrity in an optical switch is provided that essentially eliminates any occurrences of misconnected paths and enables new signal paths to be easily generated and existing paths to be switched. The method is suitable for use in optical switching devices that enable selective connection of optical signals received on a plurality of input fibers to respective output fibers, wherein the optical switching device includes a first array of mirrors disposed in a first mirror plane and a second array of mirrors disposed in a second mirror plane. In accord with the method, all mirrors are maintained in signal paths so that undesired light is prevented from reaching any of the output fibers. The mirror in the second mirror plane that is to be part of a new signal path is moved into its correct position for the new path, while the positions of the other mirrors are controlled such that no light is directed toward the second plane mirror or output fiber corresponding to the new signal path. A light is received on the input fiber and directed toward the mirror in the first mirror plane that is to be part of the signal path while the mirror is moved to direct light toward the second plane mirror, in a timed, controlled, motion. Proper configuration is then confirmed by observing a change in the output signal produced at the output fiber. The positions of each of the mirrors are then adjusted to optimize the signal path.

    Abstract translation: 提供了一种用于确保光开关中的路径完整性的方法,其基本上消除了错误连接路径的任何发生,并且使得能够容易地生成新的信号路径并且切换现有的路径。 该方法适用于能够将接收在多个输入光纤上的光信号选择性地连接到相应输出光纤的光开关器件,其中该光开关器件包括设置在第一镜面中的第一阵列的反射镜阵列和第二阵列 的反射镜设置在第二镜面中。 根据该方法,所有反射镜都保持在信号路径中,从而防止不期望的光到达任何输出光纤。 作为新信号路径的一部分的第二镜面中的反射镜被移动到其新路径的正确位置,而其他反射镜的位置被控制,使得没有光指向第二平面镜或输出 纤维对应于新的信号路径。 光被接收在输入光纤上并被引导到第一镜面中的反射镜,该反射镜将作为信号路径的一部分,同时反射镜以定时,受控的运动被移动以将光引向第二平面镜。 然后通过观察输出光纤产生的输出信号的变化来确认正确的配置。 然后调整每个反射镜的位置以优化信号路径。

Patent Agency Ranking