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    HOLZBAUELEMENT MIT HOLZLAGEN
    1.
    发明公开
    HOLZBAUELEMENT MIT HOLZLAGEN 失效
    用木BASES HOLZBAU元

    公开(公告)号：EP0762951A1

    公开(公告)日：1997-03-19

    申请号：EP95912191.0

    申请日：1995-03-02

    Applicant: Egle, Wilhelm

    Inventor： Egle, Wilhelm

    IPC: B27F1 ,  E04B5 ,  E04B7 ,  E04C2 ,  E04C3

    CPC classification number: E04B7/22 ,  E04B5/02 ,  E04C2/12 ,  E04C3/14

    Abstract: The invention relates to a timber structural component with at least two timber layers in which at least one timber layer (10-10f) has at least one cut-out (24, 24') which, at least on one side and/or in regions, has a structure (12, 12') in which said structure can take the form of grooves. According to the invention, the timber layers run mutually diagonally, whereby the structure (12a, b, c) or grooving of the layers (10', 10'', 10''') preferably run uniformly diagonally to one another.

    HOLZBAUELEMENT MIT HOLZLAGEN
    2.
    发明授权
    HOLZBAUELEMENT MIT HOLZLAGEN 失效

    公开(公告)号：EP0762951B1

    公开(公告)日：2000-07-05

    申请号：EP95912191.4

    申请日：1995-03-02

    Applicant: Egle, Wilhelm

    Inventor： Egle, Wilhelm

    IPC: B27D1/04 ,  E04C2/12

    CPC classification number: E04B7/22 ,  E04B5/02 ,  E04C2/12 ,  E04C3/14

    Abstract: The invention relates to a timber structural component with at least two timber layers in which at least one timber layer (10-10f) has at least one cut-out (24, 24') which, at least on one side and/or in regions, has a structure (12, 12') in which said structure can take the form of grooves. According to the invention, the timber layers run mutually diagonally, whereby the structure (12a, b, c) or grooving of the layers (10', 10'', 10''') preferably run uniformly diagonally to one another.

    Abstract translation: 本发明涉及具有至少两个木材层的木材结构部件，其中至少一个木材层（10-10f）具有至少一个切口（24,24'），所述切口至少在一侧和/或中 区域具有其中所述结构可以采用凹槽形式的结构（12,12'）。 根据本发明，木材层相互对角地延伸，由此层（10'，10“，10”'）的结构（12a，b，c）或开槽优选地彼此均匀对角地延伸。

    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE
    3.
    发明申请
    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE 审中-公开
    高精度光学表面，由精密仪器打标而成

    公开(公告)号：WO2006050891A3

    公开(公告)日：2006-08-24

    申请号：PCT/EP2005011894

    申请日：2005-11-08

    Applicant: ZEISS CARL SMT AG ,  EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

    Inventor： EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

    IPC: G21K1/06 ,  B24B13/00 ,  G03F7/20

    CPC classification number: G03F7/70166 ,  C03B23/0252 ,  C03B23/0357 ,  G03F7/70175 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/067

    Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is posi­tioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.

    Abstract translation: 一种制造高精度光学表面的方法，该光学表面可以用作X射线反射镜系统中的Wolter型段或EUVL系统的集光器，或者用作球面，非球面或自由形式的法向或掠入射 EUVL系统中的反射镜是通过将薄的平板玻璃下垂到由耐热材料（例如氧化铝基陶瓷或热晶玻璃陶瓷）制成的杰作，特别是心轴上制备的。 将玻璃板抛光到所需的表面粗糙度（14），定位到杰作（16）的上表面，并被加热（18）以实现下垂到杰作的上表面以产生成形体。 之后，将成形体冷却并从杰作中取出，安装在保持器（22）内，优选使用干涉测量检查与规格（24）的偏差，并且针对缺陷（26）进行校正，优选使用离子束 搞清楚。

    TIMBER STRUCTURAL COMPONENT WITH TIMBER LAYERS
    4.
    发明申请
    TIMBER STRUCTURAL COMPONENT WITH TIMBER LAYERS 审中-公开
    用木BASES HOLZBAU元

    公开(公告)号：WO1995032082A1

    公开(公告)日：1995-11-30

    申请号：PCT/EP1995000769

    申请日：1995-03-02

    Applicant: EGLE, Wilhelm

    IPC: B27D01/04

    CPC classification number: E04B7/22 ,  E04B5/02 ,  E04C2/12 ,  E04C3/14

    Abstract: The invention relates to a timber structural component with at least two timber layers in which at least one timber layer (10-10f) has at least one cut-out (24, 24') which, at least on one side and/or in regions, has a structure (12, 12') in which said structure can take the form of grooves. According to the invention, the timber layers run mutually diagonally, whereby the structure (12a, b, c) or grooving of the layers (10', 10'', 10''') preferably run uniformly diagonally to one another.

    Abstract translation: 本发明涉及具有与至少一个木层（10-10f）至少一个坯件（24，24“）的至少两个木层，所述至少一个侧面和/或部分地与一结构（12，12”木材元件被提供），其中 该结构可以被形成为切槽优选; 根据本发明，木材层对角地延伸，所述结构（12A，B，C）或所述层（10“ 10' ”，10' ‘’）的切槽优选地延伸对角相等到彼此。

    OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR
    5.
    发明申请
    OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR 审中-公开
    具有改进的热行为的光学部件

    公开(公告)号：WO2005109104A2

    公开(公告)日：2005-11-17

    申请号：PCT/EP2005004861

    申请日：2005-05-04

    Applicant: EGLE WILHELM ,  ZEISS CARL LASER OPTICS GMBH ,  HAFNER WOLFGANG ,  ANDERL WILLI ,  BINGEL ULRICH ,  MUENZ HOLGER ,  NEIDHARDT THOMAS

    Inventor： EGLE WILHELM ,  HAFNER WOLFGANG ,  ANDERL WILLI ,  BINGEL ULRICH ,  MUENZ HOLGER ,  NEIDHARDT THOMAS

    IPC: G03F7/20

    CPC classification number: G03F7/70891 ,  G03F7/70175 ,  G03F7/70858

    Abstract: An optical component is suggested, comprising at least one optically effective optical element which heats up when irradi­ated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one opti­cal element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element.

    Abstract translation: 提出了一种光学部件，其包括至少一个在用光照射时加热的光学有效光学元件，以及至少一个用于至少一个光学元件的保持元件，用于将至少一个光学元件保持在载体结构中，其中 至少一个光学元件以导热方式连接到所述至少一个保持元件，并且其中所述至少一个保持元件至少部分地设置有用于从所述至少一个光学元件传递热量的主动冷却系统。

    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE
    8.
    发明申请
    A HIGH-PRECISION OPTICAL SURFACE PREPARED BY SAGGING FROM A MASTERPIECE 审中-公开
    从MASTERPIECE发出的高精度光学表面

    公开(公告)号：WO2006050891A2

    公开(公告)日：2006-05-18

    申请号：PCT/EP2005/011894

    申请日：2005-11-08

    Applicant: CARL ZEISS SMT AG ,  EGLE, Wilhelm ,  DINGER, Udo ,  MATTHES, Axel

    Inventor： EGLE, Wilhelm ,  DINGER, Udo ,  MATTHES, Axel

    IPC: G21K1/06 ,  G03F7/20 ,  B24B13/00

    CPC classification number: G03F7/70166 ,  C03B23/0252 ,  C03B23/0357 ,  G03F7/70175 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/067

    Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is posi­tioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.

    Abstract translation: 制造高精度光学表面的方法，其可以用作X射线镜系统中的Wolter型片段或EUVL系统的收集器中，或者用作球形，非球面或游离形式的正常或掠入射 EUVL系统中的镜子是通过将薄平板玻璃片放在由诸如氧化铝基陶瓷或酮钙玻璃陶瓷的耐温材料制成的杰作（特别是心轴）上制备的。 玻璃板被抛光到所需的表面粗糙度（14），被定位在杰作（16）的上表面上，并且被加热（18）以在下降到用于产生成形体的杰作的上表面上。 此后，成形体被冷却并从杰作中移除，安装在保持器（22）内，优选地使用干涉测量来检查与规格（24）的偏差，并且对缺陷进行校正（26），优选使用离子束 搞清楚。

    KOLLEKTOR MIT BEFESTIGUNGSEINRICHTUNGEN ZUM BEFESTIGEN VON SPIEGELSCHALEN
    10.
    发明申请
    KOLLEKTOR MIT BEFESTIGUNGSEINRICHTUNGEN ZUM BEFESTIGEN VON SPIEGELSCHALEN 审中-公开

    公开(公告)号：WO2003014833A3

    公开(公告)日：2003-02-20

    申请号：PCT/EP2002/008193

    申请日：2002-07-23

    Applicant: CARL ZEISS SMT AG ,  SINGER, Wolfgang ,  EGLE, Wilhelm ,  WEISS, Markus ,  HAINZ, Joachim ,  WIETZORREK, Joachim ,  WANGLER, Johannes ,  MELZER, Frank

    Inventor： SINGER, Wolfgang ,  EGLE, Wilhelm ,  WEISS, Markus ,  HAINZ, Joachim ,  WIETZORREK, Joachim ,  WANGLER, Johannes ,  MELZER, Frank

    IPC: G03F7/20

    Abstract: Die Erfindung betrifft einen Kollektor für eine Projektionsbelichtungsanlage, die in einem Scan-Modus entlang einer Scanrichtung mit einer Wellenlänge ≤ 193 nm, bevorzugt ≤ 126 nm, besonders bevorzugt EUV-Wellenlängen betrieben wird, wobei der Kollektor Licht einer Lichtquelle objektseitig aufnimmt und einen Bereich in einer bildseitigen Ebene, die von einem lokalen Koordinatensystem aufgespannt wird, wobei die y-Richtung des lokalen Koordinatensystems parallel zur Scanrichtung und die x-Richtung senkrecht zur Scanrichtung ist, ausleuchtet, wobei der Kollektor aufweist: eine Vielzahl von rotationssymmetrischen Spiegelschalen, umfassend jeweils wenigstens ein erstes Spiegelsegment, umfassend eine erste optische Fläche, wobei die Spiegelschalen um eine gemeinsame Rotationsachse ineinander angeordnet sind; Befestigungseinrichtungen zum Befestigen der Vielzahl von rotationssymmetrischen Spiegelschalen, und die Befestigungseinrichtungen Stützspeichen aufweisen, die sich in radialer Richtung der rotationssymmetrischen Spiegelschalen erstrecken. Die Erfindung ist dadurch gekennzeichnet, dass die Stützspeichen derart angeordnet sind, dass, wenn sie in die bildseitige auszuleuchtende Ebene projiziert werden, gegenüber der y-Richtung des lokalen Koordinatensystems in der bildseitigen Ebene geneigt sind.

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