公开(公告)号：WO2006050891A2

公开(公告)日：2006-05-18

申请号：PCT/EP2005/011894

申请日：2005-11-08

Applicant: CARL ZEISS SMT AG ,  EGLE, Wilhelm ,  DINGER, Udo ,  MATTHES, Axel

Inventor： EGLE, Wilhelm ,  DINGER, Udo ,  MATTHES, Axel

IPC: G21K1/06 ,  G03F7/20 ,  B24B13/00

CPC classification number: G03F7/70166 ,  C03B23/0252 ,  C03B23/0357 ,  G03F7/70175 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/067

Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is posi­tioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.

Abstract translation: 制造高精度光学表面的方法，其可以用作X射线镜系统中的Wolter型片段或EUVL系统的收集器中，或者用作球形，非球面或游离形式的正常或掠入射 EUVL系统中的镜子是通过将薄平板玻璃片放在由诸如氧化铝基陶瓷或酮钙玻璃陶瓷的耐温材料制成的杰作（特别是心轴）上制备的。 玻璃板被抛光到所需的表面粗糙度（14），被定位在杰作（16）的上表面上，并且被加热（18）以在下降到用于产生成形体的杰作的上表面上。 此后，成形体被冷却并从杰作中移除，安装在保持器（22）内，优选地使用干涉测量来检查与规格（24）的偏差，并且对缺陷进行校正（26），优选使用离子束 搞清楚。

公开(公告)号：WO2007051638A1

公开(公告)日：2007-05-10

申请号：PCT/EP2006/010570

申请日：2006-11-03

Applicant: CARL ZEISS LASER OPTICS GMBH ,  ANDERL, Willi ,  BINGEL, Ulrich ,  WEIGL, Bernhard ,  DINGER, Udo ,  KUHN, Jochen ,  MARCZUK, Piotr ,  HAFNER, Wolfgang ,  MATTHES, Axel

Inventor： ANDERL, Willi ,  BINGEL, Ulrich ,  WEIGL, Bernhard ,  DINGER, Udo ,  KUHN, Jochen ,  MARCZUK, Piotr ,  HAFNER, Wolfgang ,  MATTHES, Axel

IPC: G03F7/20 ,  G21K1/06

CPC classification number: G03F7/70891 ,  C25D1/02 ,  C25D5/10 ,  C25D7/00 ,  C25D7/08 ,  G02B7/008 ,  G03F7/70175 ,  G21K1/06 ,  G21K2201/065

Abstract: The present invention relates to an optical collector for use in EUV lithography, comprising at least one optically effective element in form of a mirror shell having a substantially cup-shaped structure which heats up when irradiated with light, further comprising at least one mounting element for fastening the at least one optically effective element on a holding structure, the at least one optically effective element having a body, and further comprising an active cooling system, which has at least one cooling conduit to which a cooling medium can be admitted, wherein the at least one cooling conduit is provided on a cooling body which is directly connected with the body of the optically effective element or is integrated in same.

Abstract translation: 本发明涉及一种用于EUV光刻的光学收集器，包括至少一个镜面形式的光学有效元件，该镜壳具有基本杯形结构，其在用光照射时加热，还包括至少一个用于 将所述至少一个光学有效元件紧固在保持结构上，所述至少一个光学有效元件具有主体，并且还包括主动冷却系统，所述主动冷却系统具有至少一个冷却导管，冷却介质可以容纳在所述至少一个冷却导管中，其中， 至少一个冷却导管设置在冷却体上，该冷却体与光学有效元件的主体直接连接或者与冷却体一体化。

公开(公告)号：WO2006050891A3

公开(公告)日：2006-08-24

申请号：PCT/EP2005011894

申请日：2005-11-08

Applicant: ZEISS CARL SMT AG ,  EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

Inventor： EGLE WILHELM ,  DINGER UDO ,  MATTHES AXEL

IPC: G21K1/06 ,  B24B13/00 ,  G03F7/20

CPC classification number: G03F7/70166 ,  C03B23/0252 ,  C03B23/0357 ,  G03F7/70175 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/067

Abstract: A method of making a high-precision optical surface which may be used either as a Wolter-type segment in an X-ray mirror system or in a collector of a EUVL system or as a spherical, aspherical, or free form normal or grazing incidence mirror in an EUVL system is prepared by sagging a thin flat glass sheet onto a masterpiece, in particular a mandrel, made from a temperature-resistant material, such as an alumina based ceramic or a keatite glass ceramic. The glass sheet is polished to the desired surface roughness (14), is posi­tioned to an upper surface of the masterpiece (16), and is heated (18) to effect sagging onto the upper surface of the masterpiece for generating a shaped body. Thereafter, the shaped body is cooled and removed from the masterpiece, is mounted within a holder (22), is inspected for deviations from the specification (24) preferably using interferometric measurements, and is corrected for defects (26), preferably using ion beam figuring.

Abstract translation: 一种制造高精度光学表面的方法，该光学表面可以用作X射线反射镜系统中的Wolter型段或EUVL系统的集光器，或者用作球面，非球面或自由形式的法向或掠入射 EUVL系统中的反射镜是通过将薄的平板玻璃下垂到由耐热材料（例如氧化铝基陶瓷或热晶玻璃陶瓷）制成的杰作，特别是心轴上制备的。 将玻璃板抛光到所需的表面粗糙度（14），定位到杰作（16）的上表面，并被加热（18）以实现下垂到杰作的上表面以产生成形体。 之后，将成形体冷却并从杰作中取出，安装在保持器（22）内，优选使用干涉测量检查与规格（24）的偏差，并且针对缺陷（26）进行校正，优选使用离子束 搞清楚。