公开(公告)号：WO2009031890A3

公开(公告)日：2009-06-11

申请号：PCT/NL2008050581

申请日：2008-09-03

Applicant: UNIV UTRECHT HOLDING BV ,  KOOLE ROELOF ,  MULDER WILLEM JAN MENNO ,  VAN SCHOONEVELD MATTI MIRIGA ,  MEIJERINK ANDRIES ,  FAYAD ZAHI ADEL ,  HILHORST JAN

Inventor： KOOLE ROELOF ,  MULDER WILLEM JAN MENNO ,  VAN SCHOONEVELD MATTI MIRIGA ,  MEIJERINK ANDRIES ,  FAYAD ZAHI ADEL ,  HILHORST JAN

IPC: A61K49/00 ,  A61K9/50 ,  C08J3/03 ,  C08K9/04

CPC classification number: B82Y5/00 ,  A61K9/5073 ,  A61K49/0067 ,  A61K49/0093 ,  A61K49/1881

Abstract: The invention provides a carrier particle comprising a core of silica and/or alumina which core has a diameter in the range of from 10 nm to 10 µm, a hydrophobic layer enveloping the core, and a layer of amphiphilic molecules enveloping the hydrophobic layer. The invention further relates to processes for preparing said particle and the use of said particle. The particle suitably carries one or more diagnostic and/or one or more therapeutic agents for use in bio-applications.

Abstract translation: 本发明提供了一种载体颗粒，其包含二氧化硅和/或氧化铝的核心，其核心具有在10nm至10μm范围内的直径，包围该核心的疏水层以及包围疏水层的两亲分子层。 本发明还涉及制备所述颗粒的方法和所述颗粒的用途。 颗粒适当地携带用于生物应用的一种或多种诊断和/或一种或多种治疗剂。

公开(公告)号：WO2012031818A3

公开(公告)日：2012-03-15

申请号：PCT/EP2011/062554

申请日：2011-07-21

Applicant: ASML NETHERLANDS B.V. ,  KOOLE, Roelof ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  PEETERS, Emiel

Inventor： KOOLE, Roelof ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  PEETERS, Emiel

IPC: B81C1/00 ,  H01L21/027

Abstract: A method of lithography on a substrate uses a self-assembled polymer (SAP) layer deposited on the substrate, with first and second domains arranged in a pattern across the layer. A planarization layer is formed over the SAP and a development etch applied to substantially remove a portion of the planarization layer over the second domain leaving a cap of the planarization layer substantially covering the first domain. The uncapped second domain is then removed from the surface by a breakthrough etch leaving the capped first domain as a pattern feature on the surface. A transfer etch may then be used to transfer the pattern feature to the substrate using the capped first domain. The capping allows the second domain to be removed, e.g., without excessive loss of lateral feature width for the remaining first domain, even when the difference in etch resistance between the first and second domains is small.

公开(公告)号：WO2012031818A2

公开(公告)日：2012-03-15

申请号：PCT/EP2011062554

申请日：2011-07-21

Applicant: ASML NETHERLANDS BV ,  KOOLE ROELOF ,  DIJKSMAN JOHAN ,  WUISTER SANDER ,  PEETERS EMIEL

Inventor： KOOLE ROELOF ,  DIJKSMAN JOHAN ,  WUISTER SANDER ,  PEETERS EMIEL

IPC: B81C1/00

CPC classification number: B44C1/227 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  G03F7/0002 ,  H01L21/0337

Abstract: A method of lithography on a substrate uses a self-assembled polymer (SAP) layer deposited on the substrate, with first and second domains arranged in a pattern across the layer. A planarization layer is formed over the SAP and a development etch applied to substantially remove a portion of the planarization layer over the second domain leaving a cap of the planarization layer substantially covering the first domain. The uncapped second domain is then removed from the surface by a breakthrough etch leaving the capped first domain as a pattern feature on the surface. A transfer etch may then be used to transfer the pattern feature to the substrate using the capped first domain. The capping allows the second domain to be removed, e.g., without excessive loss of lateral feature width for the remaining first domain, even when the difference in etch resistance between the first and second domains is small.

Abstract translation: 衬底上的光刻方法使用沉积在衬底上的自组装聚合物（SAP）层，其中第一和第二畴以整个层的图案排列。 平坦化层形成在SAP之上，并且显影蚀刻被施加以在第二域上基本上去除平坦化层的一部分，留下平坦化层的盖基本覆盖第一域。 然后通过穿透蚀刻从表面除去未封端的第二结构域，留下封盖的第一结构域作为表面上的图案特征。 然后可以使用转移蚀刻来使用封盖的第一结构域将图案特征转移到衬底。 封盖允许除去第二区域，例如，即使当第一和第二区域之间的耐蚀刻性差异小时，也不会对剩余的第一区域造成横向特征宽度的过度损失。

公开(公告)号：WO2011151109A1

公开(公告)日：2011-12-08

申请号：PCT/EP2011/056308

申请日：2011-04-20

Applicant: ASML Netherlands B.V. ,  PEETERS, Emiel ,  WUISTER, Sander ,  KOOLE, Roelof

Inventor： PEETERS, Emiel ,  WUISTER, Sander ,  KOOLE, Roelof

IPC: C08F293/00 ,  G03F7/00 ,  B81C1/00 ,  B82Y10/00 ,  B82Y30/00

CPC classification number: C08F293/00 ,  B05D5/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C08F297/04 ,  G03F7/0002 ,  G03F7/004 ,  G03F7/165 ,  G03F7/26

Abstract: A self-assemblable polymer is disclosed, having first and second molecular configurations with the first molecular configuration has a higher Flory Huggins parameter for the self-assemblable polymer than the second molecular configuration, and the self-assemblable polymer is configurable from the first molecular configuration to the second molecular configuration, from the second molecular configuration to the first molecular configuration, or both, by the application of a stimulus. The polymer is of use in a method for providing an ordered, periodically patterned layer of the polymer on a substrate, by ordering and annealing the polymer in its second molecular configuration and setting the polymer when it is in the first molecular configuration. The second molecular configuration provides better ordering kinetics and permits annealing of defects near its order/disorder transition temperature, while the first molecular configuration, with a higher order/disorder transition temperature, provides low line edge/width roughness for the pattern formed on setting.

Abstract translation: 公开了具有第一和第二分子构型的自组装聚合物，其具有第一分子构型，其具有比第二分子构型更高的可自组装聚合物的Flory Huggins参数，并且可自组装聚合物可从第一分子构型 到第二分子构型，从第二分子构型到第一分子构型，或两者都通过施加刺激。 聚合物可用于通过在其第二分子构型中排列和退火聚合物并在聚合物处于第一分子构型时设置聚合物，从而在基底上提供聚合物的有序周期性图案化层的方法。 第二种分子结构提供更好的排序动力学，并允许在其顺序/无序转变温度附近的缺陷退火，而具有较高阶/无序转变温度的第一分子构型为设置上形成的图案提供了低的线边缘/宽度粗糙度。

公开(公告)号：WO2012175343A1

公开(公告)日：2012-12-27

申请号：PCT/EP2012/060784

申请日：2012-06-07

Applicant: ASML NETHERLANDS B.V. ,  BRIZARD, Aurelie ,  WUISTER, Sander ,  KOOLE, Roelof ,  PEETERS, Emiel

Inventor： BRIZARD, Aurelie ,  WUISTER, Sander ,  KOOLE, Roelof ,  PEETERS, Emiel

IPC: G03F7/00 ,  C08G83/00

CPC classification number: G03F7/004 ,  B82Y10/00 ,  B82Y40/00 ,  C30B19/00 ,  G03F7/0002

Abstract: A block copolymer, adapted to self-assemble to form an ordered pattern on a substrate, has first and second blocks with a terminal moiety covalently bonded to the end of the first block. The molecular weight of the terminal moiety is 20% or less than that of the block copolymer and the terminal moiety has a low chemical affinity for the first block. The terminal moiety can assist the accurate positional placement of the domains of the ordered array and lead to improved critical dimension uniformity and/or reduced line edge roughness. The polymer may be useful in combination with a graphoepitaxy template, where the terminal moiety is chosen to associate with a sidewall of the template. This may reduce undesired aggregation of polymer domains at a sidewall and/or assist in domain placement accuracy.

Abstract translation: 适于自组装以在基底上形成有序图案的嵌段共聚物具有第一和第二嵌段，其末端部分共价键合到第一嵌段的末端。 末端部分的分子量为嵌段共聚物的分子量的20％以下，末端部分对第一嵌段具有低的化学亲和力。 末端部分可以帮助有序阵列的域的精确位置放置并且导致改进的临界尺寸均匀性和/或减少的线边缘粗糙度。 所述聚合物可以与骨架外延模板组合使用，其中末端部分被选择为与模板的侧壁缔合。 这可以减少侧壁处的聚合物域的不希望的聚集和/或有助于域放置精度。

公开(公告)号：WO2012084558A1

公开(公告)日：2012-06-28

申请号：PCT/EP2011/072379

申请日：2011-12-09

Applicant: ASML NETHERLANDS B.V. ,  PEETERS, Emiel ,  KETELAARS, Wilhelmus ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KOOLE, Roelof ,  VAN HEESCH, Chris

Inventor： PEETERS, Emiel ,  KETELAARS, Wilhelmus ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KOOLE, Roelof ,  VAN HEESCH, Chris

IPC: G03F7/00

CPC classification number: C30B19/12 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

Abstract: A method is disclosed involving depositing a neutral orientation template layer onto a substrate after formation of chemical epitaxy or graphoepitaxy features on the substrate, but before deposition and orientation of a self-assemblable polymer. The orientation layer is arranged to bond with the substrate but not with certain features, so that it may be easily removed by vacuum or rinsing with organic solvent. The neutral orientation layer has a chemical affinity to match that of blocks in the self-assemblable polymer so that blocks of differing types wet the neutral orientation layer so that domains in the self-assembled polymer may lie side by side along the substrate surface, with interfaces normal to the substrate surface. The resulting aligned and oriented self-assembled polymer may itself be used as a resist for device lithography of the substrate.

Abstract translation: 公开了一种方法，其涉及在衬底上形成化学外延或者石墨电极特征之后，但在自组装聚合物的沉积和取向之前，将中性取向模板层沉积到衬底上。 取向层被布置成与基底结合，但不具有某些特征，使得其可以容易地通过真空或用有机溶剂漂洗除去。 中性取向层具有与自组装聚合物中的嵌段相符的化学亲和力，使得不同类型的块润湿中性取向层，使得自组装聚合物中的畴可以沿着衬底表面并排， 界面垂直于衬底表面。 所得到的对准和取向的自组装聚合物本身可以用作衬底的器件光刻的抗蚀剂。

公开(公告)号：WO2011114262A2

公开(公告)日：2011-09-22

申请号：PCT/IB2011050997

申请日：2011-03-10

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  VAN BOMMEL TIES ,  HIKMET RIFAT ATA MUSTAFA ,  KOOLE ROELOF ,  DE BOER DIRK KORNELIS GERHARDUS

Inventor： VAN BOMMEL TIES ,  HIKMET RIFAT ATA MUSTAFA ,  KOOLE ROELOF ,  DE BOER DIRK KORNELIS GERHARDUS

IPC: H01L31/052

CPC classification number: H01L31/02322 ,  F21S9/03 ,  F21V33/006 ,  F21Y2105/00 ,  F21Y2115/10 ,  F21Y2115/30 ,  G02B6/0095 ,  G09F13/20 ,  G09F13/22 ,  H01L31/0547 ,  H01L31/055 ,  Y02E10/52

Abstract: The present invention relates to a photovoltaic cell device with combined energy conversion and lighting option and a method a controlling such a device. It comprises a responsive element, a reflector or a light source for changing light absorption and thus appearance of photovoltaic cells (e.g. solar panel). It is also possible to combine the responsive element or the reflector with light source(s) providing extra illumination. When combined with a sensor and control unit, ambient intelligent solar panels and ambient intelligent lighting systems can be obtained. A combination of a luminescent solar concentrator (LSC) and light-emitting device is also possible, where an energy storage device is charged by a photovoltaic cell upon irradiation. The energy storage powers one or more light sources which are coupled to the sides of the luminescent plate. The light emitted by the light sources is coupled into the plate and (partly) converted by the luminescent plate. This results in a plate that homogeneously emits light.

Abstract translation: 本发明涉及具有组合的能量转换和照明选项的光伏电池装置和一种控制这种装置的方法。 它包括响应元件，反射器或光源，用于改变光吸收，从而改变光伏电池（例如太阳能电池板）的外观。 还可以将响应元件或反射器与提供额外照明的光源组合。 当与传感器和控制单元组合时，可以获得环境智能太阳能电池板和环境智能照明系统。 发光太阳能集中器（LSC）和发光装置的组合也是可能的，其中能量存储装置在照射时由光伏电池充电。 能量存储对耦合到发光板的侧面的一个或多个光源供电。 由光源发射的光被耦合到板中（部分地）被发光板转换。 这导致均匀发光的板。

公开(公告)号：WO2011128120A1

公开(公告)日：2011-10-20

申请号：PCT/EP2011/050668

申请日：2011-01-19

Applicant: ASML NETHERLANDS B.V. ,  PEETERS, Emiel ,  WUISTER, Sander ,  KOOLE, Roelof

Inventor： PEETERS, Emiel ,  WUISTER, Sander ,  KOOLE, Roelof

IPC: G03F7/00

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

Abstract: A method for providing an ordered polymer layer at a surface of a substrate includes depositing a self-assemblable polymer layer directly onto a primer layer on a substrate to provide an interface between the self-assemblable polymer layer and the primer layer, and treating the self-assemblable polymer layer to provide self-assembly into an ordered polymer layer, such as a block copolymer, having first and second domain types at the interface. The primer layer is adapted to improve its chemical affinity to each domain type at the interface, in response to the presence of the respective domain type in the self-assembled polymer at the interface during the self-assembly of the self-assemblable polymer layer into the ordered polymer layer. This may lead to reduction in defect levels and/or improved persistence length for the ordered polymer layer. The method may be useful for forming resist layers for use in device lithography.

Abstract translation: 在衬底的表面提供有序聚合物层的方法包括将可自组装的聚合物层直接沉积在基底上的底漆层上，以提供可自组装的聚合物层和底漆层之间的界面，以及处理自身 可以将聚合物层自组装成有序聚合物层，例如在界面处具有第一和第二域类型的嵌段共聚物。 响应于在自组装聚合物层的自组装期间在界面处的自组装聚合物中存在相应的畴型，引物层适于改善其在界面处对每种畴型的化学亲和力 有序聚合物层。 这可能导致有序聚合物层的缺陷水平和/或改善的持续长度的降低。 该方法可用于形成用于器件光刻的抗蚀剂层。

公开(公告)号：WO2011121503A1

公开(公告)日：2011-10-06

申请号：PCT/IB2011/051256

申请日：2011-03-24

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH ,  KOOLE, Roelof ,  HOUTEPEN, Arjan Jeroen ,  RONDA, Cornelis Reinder

Inventor： KOOLE, Roelof ,  HOUTEPEN, Arjan Jeroen ,  RONDA, Cornelis Reinder

IPC: C09K11/08 ,  H01L33/50

CPC classification number: H01L31/02322 ,  C09K11/02 ,  C09K11/08 ,  H01L31/0547 ,  H01L31/055 ,  H01L31/18 ,  Y02E10/52

Abstract: The invention relates to a luminescent converter(101) that may for example be used as a luminescent solar concentrator(LSC) in a solar power generator(100). The luminescent converter(101) comprises magic-sized clusters (110), MSCs, of a luminescent material. Preferably, said luminescent material comprises a compound of two elements from groups IV and VI, for example PbSe. The MSCs(110) may be embedded in a transparent light guiding element(120) or be embedded in a thin film on a surface thereof.

Abstract translation: 本发明涉及一种例如在太阳能发电机（100）中用作发光太阳能集中器（LSC）的发光转换器（101）。 发光转换器（101）包括发光材料的魔术尺寸的簇（110），MSC。 优选地，所述发光材料包含来自IV和VI族的两种元素的化合物，例如PbSe。 MSC（110）可以嵌入透明导光元件（120）中或嵌入在其表面上的薄膜中。

公开(公告)号：WO2011114262A3

公开(公告)日：2011-09-22

申请号：PCT/IB2011/050997

申请日：2011-03-10

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  VAN BOMMEL, Ties ,  HIKMET, Rifat, Ata, Mustafa ,  KOOLE, Roelof ,  DE BOER, Dirk, Kornelis, Gerhardus

Inventor： VAN BOMMEL, Ties ,  HIKMET, Rifat, Ata, Mustafa ,  KOOLE, Roelof ,  DE BOER, Dirk, Kornelis, Gerhardus

IPC: H01L31/052 ,  F21K99/00 ,  H01L31/055

Abstract: The present invention relates to a photovoltaic cell device with combined energy conversion and lighting option and a method a controlling such a device. It comprises a responsive element, a reflector or a light source for changing light absorption and thus appearance of photovoltaic cells (e.g. solar panel). It is also possible to combine the responsive element or the reflector with light source(s) providing extra illumination. When combined with a sensor and control unit, ambient intelligent solar panels and ambient intelligent lighting systems can be obtained. A combination of a luminescent solar concentrator (LSC) and light-emitting device is also possible, where an energy storage device is charged by a photovoltaic cell upon irradiation. The energy storage powers one or more light sources which are coupled to the sides of the luminescent plate. The light emitted by the light sources is coupled into the plate and (partly) converted by the luminescent plate. This results in a plate that homogeneously emits light.