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公开(公告)号：WO2013033722A1
公开(公告)日：2013-03-07
申请号：PCT/US2012/053699
申请日：2012-09-04
Applicant: CAVENDISH KINETICS, INC , VAN KAMPEN, Robertus Petrus , UNAMUNO, Anartz , KNIPE, Richard L. , GADDI, Roberto , MAHAMEED, Rashed
Inventor： VAN KAMPEN, Robertus Petrus , UNAMUNO, Anartz , KNIPE, Richard L. , GADDI, Roberto , MAHAMEED, Rashed
IPC: H01L27/14
CPC classification number: H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
Abstract translation: 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。
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2.发明申请MEMS DEVICES UTILIZING A THICK METAL LAYER OF AN INTERCONNECT METAL FILM STACK 审中-公开利用互连金属膜堆叠的金属层的MEMS器件
公开(公告)号：WO2015026368A1
公开(公告)日：2015-02-26
申请号：PCT/US2013/056431
申请日：2013-08-23
Applicant: INTEL CORPORATION , MAHAMEED, Rashed , DORSEY, Kristen, L. , M M ABDELMEJEED, Mamdouh, O. , ABDELMONEUM, Mohamed, A.
Inventor： MAHAMEED, Rashed , DORSEY, Kristen, L. , M M ABDELMEJEED, Mamdouh, O. , ABDELMONEUM, Mohamed, A.
CPC classification number: B81B3/0051 , B81B3/0021 , B81B7/008 , B81B2201/0235 , B81B2201/0242 , B81B2203/0145 , B81C1/00166 , B81C1/00246 , B81C1/00531 , B81C2203/0714 , B81C2203/0742 , G01C19/5733 , G01P15/125 , G01P2015/0814
Abstract: A MEMS device, such as an accelerometer or gyroscope, fabricated in interconnect metallization compatible with a CMOS microelectronic device. In embodiments, a proof mass has a first body region utilizing a thick metal layer that is separated from a thin metal layer. The thick metal layer has a film thickness that is significantly greater than that of the thin metal layer for increased mass. The proof mass further includes a first sensing structure comprising the thin metal layer, but lacking the thick metal layer for small feature sizes and increased capacitive coupling to a surrounding frame that includes a second sensing structure comprising the thin metal layer, but also lacking the thick metal layer. In further embodiments, the frame is released and includes regions with the thick metal layer to better match film stress-induced static deflection of the proof mass.
Abstract translation: MEMS器件，例如加速度计或陀螺仪，其制造在与CMOS微电子器件兼容的互连金属化中。 在实施例中，检验质量体具有利用与金属薄层分离的厚金属层的第一体区。 厚金属层的膜厚度明显大于金属层的厚度，以增加质量。 检测质量还包括第一感测结构，其包括薄金属层，但是缺少用于小特征尺寸的厚金属层，并且增加与周围框架的电容耦合，其包括包含薄金属层的第二检测结构，而且还缺少厚的 金属层。 在另外的实施例中，框架被释放并且包括具有较厚金属层的区域以更好地匹配膜应力引起的证明块的静态偏转。
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公开(公告)号：WO2015088626A3
公开(公告)日：2015-08-13
申请号：PCT/US2014057581
申请日：2014-09-26
Applicant: INTEL CORP , PANT MONDIRA D , ABDELMONEUM MOHAMED A , KARNIK TANAY , PISENTI STEPHEN , POISNER DAVID I , MAHAMEED RASHED
Inventor： PANT MONDIRA D , ABDELMONEUM MOHAMED A , KARNIK TANAY , PISENTI STEPHEN , POISNER DAVID I , MAHAMEED RASHED
CPC classification number: G01N29/265 , G01N2291/106 , G06F21/32 , G06F2221/2111 , G06K9/0002 , Y10T29/49005
Abstract: Methods and systems may provide for a system having a flexible substrate, an ultrasonic transducer array coupled to the flexible substrate and a processor coupled to the ultrasonic transducer array. The processor may identify a fingerprint based on a signal from the ultrasonic transducer array. The system may also include an external component having a curved profile, wherein the ultrasonic transducer array is embedded in the external component and includes a read surface that conforms to the curved profile. In one example, the external component includes a button having a function that is separate from identification of the fingerprint.
Abstract translation: 方法和系统可以提供具有柔性衬底，耦合到柔性衬底的超声换能器阵列和耦合到超声换能器阵列的处理器的系统。 处理器可以基于来自超声换能器阵列的信号识别指纹。 该系统还可以包括具有弯曲轮廓的外部部件，其中超声换能器阵列嵌入在外部部件中并且包括符合弯曲轮廓的读取表面。 在一个示例中，外部组件包括具有与指纹的识别分离的功能的按钮。
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Patent Agency Ranking
公开(公告)号：WO2014105178A1
公开(公告)日：2014-07-03
申请号：PCT/US2013/047796
申请日：2013-06-26
Applicant: INTEL CORPORATION , HSU, Hao-han , MAHAMEED, Rashed , ABDELMONEUM, Mohamed, A. , HAN, Dong-ho
Inventor： HSU, Hao-han , MAHAMEED, Rashed , ABDELMONEUM, Mohamed, A. , HAN, Dong-ho
CPC classification number: H01H59/0009 , B81B3/0056 , B81B2201/014 , B81B2203/0118 , H01H2001/0084 , H01H2057/006 , H01L41/094 , Y10T29/42
Abstract: Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.
Abstract translation: 方法和系统可以提供包括静电致动和压电致动的混合RF MEMS部件设计。 在一个示例中，该方法可以包括施加第一电压以产生第一压电力以减小悬臂与致动电极之间的第一间隙，以及施加第二电压以产生静电力以产生悬臂与传动之间的接触 电极。
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公开(公告)号：WO2015088626A2
公开(公告)日：2015-06-18
申请号：PCT/US2014/057581
申请日：2014-09-26
Applicant: INTEL CORPORATION , PANT, Mondira D. , ABDELMONEUM, Mohamed A. , KARNIK, Tanay , PISENTI, Stephen , POISNER, David I. , MAHAMEED, Rashed
Inventor： PANT, Mondira D. , ABDELMONEUM, Mohamed A. , KARNIK, Tanay , PISENTI, Stephen , POISNER, David I. , MAHAMEED, Rashed
CPC classification number: G01N29/265 , G01N2291/106 , G06F21/32 , G06F2221/2111 , G06K9/0002 , Y10T29/49005
Abstract: Methods and systems may provide for a system having a flexible substrate, an ultrasonic transducer array coupled to the flexible substrate and a processor coupled to the ultrasonic transducer array. The processor may identify a fingerprint based on a signal from the ultrasonic transducer array. The system may also include an external component having a curved profile, wherein the ultrasonic transducer array is embedded in the external component and includes a read surface that conforms to the curved profile. In one example, the external component includes a button having a function that is separate from identification of the fingerprint.
Abstract translation: 方法和系统可以提供具有柔性衬底，耦合到柔性衬底的超声换能器阵列和耦合到超声换能器阵列的处理器的系统。 处理器可以基于来自超声换能器阵列的信号来识别指纹。 该系统还可以包括具有弯曲轮廓的外部部件，其中超声波换能器阵列嵌入在外部部件中并且包括符合弯曲轮廓的读取表面。 在一个例子中，外部部件包括具有与识别指纹分开的功能的按钮。
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6.发明申请PIEZOELECTRIC ALN RF MEM SWITCHES MONOLITHICALLY INTEGRATED WITH ALN CONTOUR-MODE RESONATORS 审中-公开压电ALN RF器件开关与ALN型谐振器集成在一起
公开(公告)号：WO2009158141A1
公开(公告)日：2009-12-30
申请号：PCT/US2009/045815
申请日：2009-06-01
Applicant: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA , MAHAMEED, Rashed , SINHA, Nipun , PIAZZA, Gianluca
Inventor： MAHAMEED, Rashed , SINHA, Nipun , PIAZZA, Gianluca
IPC: H01L41/09
CPC classification number: H01H57/00 , H01H2057/006 , H01L27/20 , H01L41/094 , Y10T29/42
Abstract: Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.
Abstract translation: 压电开关和形成压电开关的方法。 压电开关包括第一和第二悬臂梁致动器。 第二悬臂梁致动器具有在接触区域中与第一悬臂梁致动器重叠的突起。 突起通过纳米间隙与第一悬臂梁致动器机械分离，使得第一和第二悬臂梁致动器彼此电隔离。 第一和第二悬臂梁致动器中的每一个包括压电致动层。
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公开(公告)号：WO2004100362A3
公开(公告)日：2005-03-31
申请号：PCT/IL2004000391
申请日：2004-05-09
Applicant: TECHNION RES & DEV FOUNDATION , ELATA DAVID , MAHAMEED RASHED
Inventor： ELATA DAVID , MAHAMEED RASHED
CPC classification number: F03G7/06 , G01P15/097 , H01H1/0036 , H01H2061/006 , H01H2061/008 , H02N10/00 , H03H9/02259 , H03H9/2457 , H03H2009/02511
Abstract: A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
Abstract translation: 一种热弹性致动的微谐振器装置，包括：具有悬臂梁（12）的主体（14）; 位于悬臂梁的表面附近并且靠近主体的加热元件（20），其可被周期性地致动以在横梁的高度上产生周期性的热梯度，从而有助于梁的周期性偏转。
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公开(公告)号：WO2004100362A2
公开(公告)日：2004-11-18
申请号：PCT/IL2004/000391
申请日：2004-05-09
Inventor： ELATA, David , MAHAMEED, Rashed
IPC: H03H
CPC classification number: F03G7/06 , G01P15/097 , H01H1/0036 , H01H2061/006 , H01H2061/008 , H02N10/00 , H03H9/02259 , H03H9/2457 , H03H2009/02511
Abstract: A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
Abstract translation: 一种热弹性致动的微谐振器装置，包括：具有悬臂梁（12）的主体（14）; 位于悬臂梁的表面附近并且靠近主体的加热元件（20），其可被周期性地致动以在横梁的高度上产生周期性的热梯度，从而有助于梁的周期性偏转。
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