公开(公告)号：EP0706425A4

公开(公告)日：1997-12-29

申请号：EP95915627

申请日：1995-04-07

Applicant: RAY MARK A ,  MCGUIRE GARY E

Inventor： RAY MARK A ,  MCGUIRE GARY E

IPC: B05D3/06 ,  B01J19/08 ,  C23C14/04 ,  C23C14/06 ,  C23C14/14 ,  C23C14/32 ,  C23C14/34 ,  C23C16/02 ,  C23C16/04 ,  C23C16/27 ,  C23C16/50 ,  C30B25/06 ,  C30B29/04 ,  H01L21/203 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  B01J3/06 ,  C23C14/00 ,  C23C16/00

CPC classification number: C23C14/04 ,  C23C14/32 ,  C23C16/04 ,  C23C16/50

Abstract: A selective area deposition on a substrate surface having a separate areas of different materials comprises forming a plasma (optionally ignited by filament (35)) over the substrate (37) on pedestal (16) and insulator (17), injecting coating species into the plasma by either sputtering from source (26) or gaseous injection, adding a reactive gas via inlet (33) for altering surface binding energy at the coating surface, and biasing (19, 21) the substrate during deposition to bombard the substrate with ionic species from the plasma. Surface binding energy is altered differently for the separate areas, enhancing selectivity. Bias power is controlled to exploit the alteration in surface binding energy. For gaseous injection of the coating species, and in some cases of sputtering of the coating material, the temperature of the substrate surface is controlled (23, 24, 25) also. In an alternative embodiment, selectivity is to phase of the coating material rather than to specific areas on the substrate, and a selected phase may be preferentially deposited on the substrate.

公开(公告)号：EP0706425A1

公开(公告)日：1996-04-17

申请号：EP95915627.0

申请日：1995-04-07

Applicant: Ray, Mark, A. ,  McGuire, Gary, E.

Inventor： Ray, Mark, A. ,  McGuire, Gary, E.

IPC: B05D3 ,  B01J19 ,  C23C14 ,  C23C16 ,  C30B25 ,  C30B29 ,  H01L21

CPC classification number: C23C14/04 ,  C23C14/32 ,  C23C16/04 ,  C23C16/50

Abstract: A selective area deposition on a substrate surface having a separate areas of different materials comprises forming a plasma (optionally ignited by filament (35)) over the substrate (37) on pedestal (16) and insulator (17), injecting coating species into the plasma by either sputtering from source (26) or gaseous injection, adding a reactive gas via inlet (33) for altering surface binding energy at the coating surface, and biasing (19, 21) the substrate during deposition to bombard the substrate with ionic species from the plasma. Surface binding energy is altered differently for the separate areas, enhancing selectivity. Bias power is controlled to exploit the alteration in surface binding energy. For gaseous injection of the coating species, and in some cases of sputtering of the coating material, the temperature of the substrate surface is controlled (23, 24, 25) also. In an alternative embodiment, selectivity is to phase of the coating material rather than to specific areas on the substrate, and a selected phase may be preferentially deposited on the substrate.

公开(公告)号：WO0222492A8

公开(公告)日：2003-11-20

申请号：PCT/US0128608

申请日：2001-09-14

Applicant: MCNC ,  GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

Inventor： GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  F15C5/00 ,  F16K15/16 ,  F16K31/02 ,  F16K99/00 ,  F16J3/02

CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

Abstract translation: 提供由静电力驱动的MEMS阀装置。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。

公开(公告)号：WO2008154071A1

公开(公告)日：2008-12-18

申请号：PCT/US2008/060482

申请日：2008-04-16

Applicant: RESEARCH TRIANGLE INSTITUTE ,  MCGUIRE, Gary, E. ,  LAMVIK, Michael ,  GOODWIN, Scott

Inventor： MCGUIRE, Gary, E. ,  LAMVIK, Michael ,  GOODWIN, Scott

IPC: G03H1/02

CPC classification number: G02B6/3502 ,  G02B6/1221 ,  G02B6/136 ,  G02B6/355 ,  G02B6/3558 ,  G02B6/357 ,  G02B6/3596 ,  G02B2006/12069 ,  G02B2006/12145

Abstract: An optical device for switching an optical signal between a first optical path and a second optical path, including a substrate, a first guide forming at least a portion of the first optical path, formed on the substrate, and having a movable portion separated from the substrate, a second guide forming at least a portion of the second optical path and disposed adjacent to the first guide, and means for electro statically bending the movable portion so as to optically couple the first guide to the second guide.

Abstract translation: 一种用于在包括基板的第一光路和第二光路之间切换光信号的光学装置，形成在所述基板上的第一光路的至少一部分的第一引导件，并且具有与所述第一光路分离的可动部分 基板，形成第二光路的至少一部分并且邻近第一引导件设置的第二引导件，以及用于静电地弯曲可移动部分以便将第一引导件光耦合到第二引导件的装置。

公开(公告)号：WO2005001547A1

公开(公告)日：2005-01-06

申请号：PCT/US2004/014945

申请日：2004-05-13

Applicant: MCNC RESEARCH & DEVELOPMENT INSTITUTE ,  LAMVIK, Michael, K. ,  MCGUIRE, Gary, E. ,  LEWIS, John, S., III

Inventor： LAMVIK, Michael, K. ,  MCGUIRE, Gary, E. ,  LEWIS, John, S., III

IPC: G02B27/01

CPC classification number: G02B27/0172 ,  G02B2027/0132 ,  G02B2027/014 ,  H04N5/7491

Abstract: This invention provides a continuous display with non-uniform pixel density, forming a foveated display. A single, continuous display has a higher pixel density at the center of the display than at the periphery of the display. Where two continuous displays are used in accordance with the present invention, the central forward gaze of the viewer's image will be displayed in high resolution while the leftmost portion of the left eye display will be in low resolution and the rightmost portion of the right eye display will be in low resolution. The pixel resolution of the visual display may correspond to the visual acuity of the human eye. A foveated image display system using a continuous display with non-uniform pixel density increases the field of view while reducing the image bandwidth. A foveated image display system may be hardware-based by employing anamorphic lenses or sensors rather than relying upon image interpolation to modify the resolution of the resultant image data communicated to the continuous display with non-uniform pixel density.

Abstract translation: 本发明提供了具有不均匀像素密度的连续显示，形成移动显示。 单个连续显示器在显示器的中心处具有比在显示器周边处更高的像素密度。 在根据本发明使用两个连续显示器的情况下，观看者的图像的中心向前视线将以高分辨率显示，而左眼显示器的最左部分将具有低分辨率，并且右眼显示器的最右部分 将处于低分辨率。 视觉显示的像素分辨率可以对应于人眼的视力。 使用具有不均匀像素密度的连续显示器的移动图像显示系统增加了视野，同时降低了图像带宽。 移动图像显示系统可以通过使用变形镜头或传感器而不是依靠图像插值来修改以不均匀的像素密度传送到连续显示器的合成图像数据的分辨率来进行硬件化。

公开(公告)号：WO0222492A3

公开(公告)日：2002-08-01

申请号：PCT/US0128608

申请日：2001-09-14

Applicant: MCNC ,  GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

Inventor： GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  F15C5/00 ,  F16K15/16 ,  F16K31/02 ,  F16K99/00 ,  F16J3/02

CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

Abstract translation: 提供由静电力驱动的MEMS阀装置。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。

公开(公告)号：WO1995027570A1

公开(公告)日：1995-10-19

申请号：PCT/US1995004393

申请日：1995-04-07

Applicant: RAY, Mark, A. ,  McGUIRE, Gary, E.

IPC: B05D03/06

CPC classification number: C23C14/04 ,  C23C14/32 ,  C23C16/04 ,  C23C16/50

Abstract: A selective area deposition on a substrate surface having a separate areas of different materials comprises forming a plasma (optionally ignited by filament (35)) over the substrate (37) on pedestal (16) and insulator (17), injecting coating species into the plasma by either sputtering from source (26) or gaseous injection, adding a reactive gas via inlet (33) for altering surface binding energy at the coating surface, and biasing (19, 21) the substrate during deposition to bombard the substrate with ionic species from the plasma. Surface binding energy is altered differently for the separate areas, enhancing selectivity. Bias power is controlled to exploit the alteration in surface binding energy. For gaseous injection of the coating species, and in some cases of sputtering of the coating material, the temperature of the substrate surface is controlled (23, 24, 25) also. In an alternative embodiment, selectivity is to phase of the coating material rather than to specific areas on the substrate, and a selected phase may be preferentially deposited on the substrate.

Abstract translation: 在具有不同材料的单独区域的衬底表面上的选择性区域沉积包括在基座（16）和绝缘体（17）上的衬底（37）上形成等离子体（可选地被灯丝（35）点燃），将涂层物质注入到 通过来自源（26）的溅射或气体注入的等离子体，通过入口（33）添加反应性气体，以改变涂层表面处的表面结合能，以及在沉积期间偏置（19,21）衬底以用离子物质轰击衬底 从等离子体。 对于单独的区域，表面结合能被改变不同，增强了选择性。 控制偏压功能以利用表面结合能的变化。 为了气体注射涂层物质，并且在一些溅射涂层材料的情况下，衬底表面的温度也被控制（23,24,25）。 在替代实施例中，选择性是涂层材料的相位，而不是衬底上的特定区域，并且所选择的相可以优先沉积在衬底上。