公开(公告)号：EP0706425A4

公开(公告)日：1997-12-29

申请号：EP95915627

申请日：1995-04-07

Applicant: RAY MARK A ,  MCGUIRE GARY E

Inventor： RAY MARK A ,  MCGUIRE GARY E

IPC: B05D3/06 ,  B01J19/08 ,  C23C14/04 ,  C23C14/06 ,  C23C14/14 ,  C23C14/32 ,  C23C14/34 ,  C23C16/02 ,  C23C16/04 ,  C23C16/27 ,  C23C16/50 ,  C30B25/06 ,  C30B29/04 ,  H01L21/203 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  B01J3/06 ,  C23C14/00 ,  C23C16/00

CPC classification number: C23C14/04 ,  C23C14/32 ,  C23C16/04 ,  C23C16/50

Abstract: A selective area deposition on a substrate surface having a separate areas of different materials comprises forming a plasma (optionally ignited by filament (35)) over the substrate (37) on pedestal (16) and insulator (17), injecting coating species into the plasma by either sputtering from source (26) or gaseous injection, adding a reactive gas via inlet (33) for altering surface binding energy at the coating surface, and biasing (19, 21) the substrate during deposition to bombard the substrate with ionic species from the plasma. Surface binding energy is altered differently for the separate areas, enhancing selectivity. Bias power is controlled to exploit the alteration in surface binding energy. For gaseous injection of the coating species, and in some cases of sputtering of the coating material, the temperature of the substrate surface is controlled (23, 24, 25) also. In an alternative embodiment, selectivity is to phase of the coating material rather than to specific areas on the substrate, and a selected phase may be preferentially deposited on the substrate.

公开(公告)号：WO0222492A8

公开(公告)日：2003-11-20

申请号：PCT/US0128608

申请日：2001-09-14

Applicant: MCNC ,  GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

Inventor： GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  F15C5/00 ,  F16K15/16 ,  F16K31/02 ,  F16K99/00 ,  F16J3/02

CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

Abstract translation: 提供由静电力驱动的MEMS阀装置。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。

公开(公告)号：WO0222492A3

公开(公告)日：2002-08-01

申请号：PCT/US0128608

申请日：2001-09-14

Applicant: MCNC ,  GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

Inventor： GOODWIN-JOHANSSON SCOTT H ,  MCGUIRE GARY E

IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  F15C5/00 ,  F16K15/16 ,  F16K31/02 ,  F16K99/00 ,  F16J3/02

CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

Abstract translation: 提供由静电力驱动的MEMS阀装置。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。