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    PULSED PLASMA DEPOSITION DEVICE
    1.
    发明申请
    PULSED PLASMA DEPOSITION DEVICE 审中-公开
    脉冲等离子体沉积装置

    公开(公告)号：US20150345021A1

    公开(公告)日：2015-12-03

    申请号：US14654138

    申请日：2013-12-20

    Applicant: ORGANIC SPINTRONICS S.R.L.

    Inventor： Dmitry YARMOLICH ,  Carlo Taliani

    IPC: C23C16/515 ,  H01J37/32 ,  C23C16/48 ,  H01J37/30

    CPC classification number: C23C16/515 ,  C23C16/487 ,  H01J3/025 ,  H01J37/077 ,  H01J37/30 ,  H01J37/3053 ,  H01J37/32532 ,  H01J2237/06375 ,  H01J2237/151 ,  H01J2237/3132

    Abstract: A pulsed plasma deposition device, including an apparatus for generating a beam of electrons, a target and a substrate, the apparatus being suitable for generating a pulsed beam of electrons directed towards said target to determine the ablation of the material of said target in the form of a plasma plume directed towards said substrate. The device includes a transportation and focussing group of the beam of electrons towards said target, arranged between said apparatus and said target and including a transportation cone, the transportation and focussing group also including a focussing electrode directly connected to the transportation cone and shaped substantially like a loop. The axis of symmetry of the focussing electrode is perpendicular, or substantially perpendicular, to the surface of the target.

    Abstract translation: 一种脉冲等离子体沉积装置，包括用于产生电子束的装置，靶和衬底，所述装置适于产生朝向所述靶的脉冲电子束，以确定所述靶的材料以所述形式 的等离子体羽流朝向所述衬底。 该装置包括朝向所述目标的电子束的输送和聚焦组，布置在所述装置和所述靶之间并且包括输送锥体，所述输送和聚焦组还包括直接连接到输送锥体的聚焦电极并且基本上形状 一个循环。 聚焦电极的对称轴线与目标表面垂直或基本垂直。

    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING AN FLOW OF ELECTRONS TOWARDS A TARGET
    3.
    发明申请
    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING AN FLOW OF ELECTRONS TOWARDS A TARGET 审中-公开
    用于产生等离子体和用于指导电流流向目标的装置

    公开(公告)号：WO2010109297A2

    公开(公告)日：2010-09-30

    申请号：PCT/IB2010/000644

    申请日：2010-03-23

    Applicant: ORGANIC SPINTRONICS S.R.L. ,  LOTTI, Riccardo ,  NOZAR, Petr ,  TALIANI, Carlo

    Inventor： LOTTI, Riccardo ,  NOZAR, Petr ,  TALIANI, Carlo

    IPC: H01J3/02 ,  H01J37/077

    CPC classification number: H01J3/025

    Abstract: Device (1) for generating plasma and for directing an flow of electrons towards a specific target (3); the device (1) comprises a hollow cathode (5); a main electrode (7) at least partially placed inside the cathode (5); a resistor (12), electrically earthing the main electrode (7); a substantially dielectric tubular element (21) extending through a wall (22) of the cathode; a ring-shaped anode (25) placed around the tubular element (21) and earthed; and an activation group (11) which is electrically connected to the cathode (5) and is able to reduce the electric potential of the cathode (5) of at least 8 kV in about 10 ns.

    Abstract translation: 用于产生等离子体并用于将电子流引向特定目标（3）的装置（1）; 所述装置（1）包括空心阴极（5）; 至少部分地放置在阴极（5）内的主电极（7）; 电连接所述主电极（7）的电阻器（12）。 延伸穿过阴极的壁（22）的基本介电管状元件（21）; 围绕所述管状元件（21）放置并接地的环形阳极（25）; 以及电连接到阴极（5）并且能够在约10ns内将阴极（5）的电位降低至少8kV的激活组（11）。

    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING A FLOW OF ELECTRONS TOWARDS A TARGET
    4.
    发明申请
    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING A FLOW OF ELECTRONS TOWARDS A TARGET 审中-公开
    用于产生等离子体和用于指示电流流向目标的装置

    公开(公告)号：WO2012025947A1

    公开(公告)日：2012-03-01

    申请号：PCT/IT2011/000301

    申请日：2011-08-23

    Applicant: ORGANIC SPINTRONICS S.r.l. ,  TALIANI, Carlo ,  NOZAROVA, Libuse

    Inventor： TALIANI, Carlo ,  NOZAROVA, Libuse

    IPC: H01J3/02 ,  H01J37/077 ,  H01J37/34

    CPC classification number: H01J37/077 ,  H01J3/025 ,  H01J37/32422 ,  H01J37/34 ,  H01J2237/06366

    Abstract: Device for generating plasma and for directing a flow of electrons towards a given target (3); the device (1) comprises a hollow cathode (5); an activation electrode (7); a substantially dielectric tubular element (21), which extends through a wall of a cathode (5); an annular anode (25) located around the tubular element (21); and an additional electrode (28), which is located in the area of an external end (21b) of the tubular element (21) and is designed to work initially as a an additional anode so as to accelerate the electrons coming from the cathode (5) and then, once this additional electrode (28) reaches the potential of the cathode (5), as a cathode so as to direct the electrons towards the target (3 ).

    Abstract translation: 用于产生等离子体并用于将电子流引向给定目标（3）的装置; 所述装置（1）包括空心阴极（5）; 活化电极（7）; 基本介质的管状元件（21），其延伸穿过阴极（5）的壁; 围绕所述管状元件（21）定位的环形阳极（25）; 以及位于管状元件（21）的外端（21b）的区域中的附加电极（28），并且被设计成最初作为附加阳极工作，以加速来自阴极的电子（ 5），然后，一旦该附加电极（28）达到阴极（5）的电位，就作为阴极，以便将电子引向靶（3）。

    PULSED PLASMA DEPOSITION DEVICE
    5.
    发明申请
    PULSED PLASMA DEPOSITION DEVICE 审中-公开
    脉冲等离子体沉积装置

    公开(公告)号：WO2014097262A1

    公开(公告)日：2014-06-26

    申请号：PCT/IB2013/061223

    申请日：2013-12-20

    Applicant: ORGANIC SPINTRONICS S.R.L.

    Inventor： YARMOLICH, Dmitry ,  TALIANI, Carlo

    IPC: H01J37/077 ,  H01J37/305

    CPC classification number: C23C16/515 ,  C23C16/487 ,  H01J3/025 ,  H01J37/077 ,  H01J37/30 ,  H01J37/3053 ,  H01J37/32532 ,  H01J2237/06375 ,  H01J2237/151 ,  H01J2237/3132

    Abstract: A pulsed plasma deposition device, comprising an apparatus for generating a beam of electrons (3), a target (4) and a substrate (6), the apparatus (3) being suitable for generating a pulsed beam of electrons directed towards said target (4) to determine the ablation of the material of said target (4) in the form of a plasma plume (19) directed towards said substrate (6); the device comprises a transportation and focussing group (13) of the beam of electrons towards said target (4), arranged between said apparatus (3) and said target (4) and comprising a transportation cone (14), the transportation and focussing group (13) also comprising a focussing electrode (15) directly connected to the transportation cone (14) and shaped substantially like a loop; the axis of symmetry (16) of the focussing electrode (15) is perpendicular, or substantially perpendicular, to the surface of the target (4).

    Abstract translation: 一种脉冲等离子体沉积装置，包括用于产生电子束（3），靶（4）和衬底（6）的装置，所述装置（3）适于产生指向所述目标的脉冲电子束（ 4）确定所述靶（4）的材料以等离子体羽流（19）的形式消融，所述等离子体羽流指向所述衬底（6）; 该装置包括位于所述设备（3）和所述目标（4）之间并且包括输送锥体（14）的运送和聚焦组（13）的电子束朝向所述目标（4），所述输送和聚焦组 （13）还包括直接连接到输送锥体（14）并且基本上形成环状的聚焦电极（15）; 聚焦电极（15）的对称轴（16）垂直于或基本垂直于靶（4）的表面。

    METHOD OF MAKING SOLAR CELLS
    7.
    发明申请
    METHOD OF MAKING SOLAR CELLS 审中-公开
    制造太阳能电池的方法

    公开(公告)号：WO2011148251A1

    公开(公告)日：2011-12-01

    申请号：PCT/IB2011/001118

    申请日：2011-05-24

    Applicant: ORGANIC SPINTRONICS S.R.L. ,  TALIANI, Carlo ,  NOZAROVA, Libuse

    Inventor： TALIANI, Carlo ,  NOZAROVA, Libuse

    IPC: H01L31/032 ,  H01L31/18

    CPC classification number: H01L31/18 ,  H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

    Abstract: Method of making solar cells, the method provides that on a substrate (4) there are deposited: a substantially isolating layer (17) of ZnO of approximately 100nm, a layer (18) of CdS of approximately 100pm, a layer (19) of mixed selenides, and metal layer (20) by means of a Pulsed Plasma Deposition (PPD); the deposition of the mixed selenides takes place by hitting targets (3, 3') of different compositions at the same time by means of a plurality of fluxes of electrons.

    Abstract translation: 制造太阳能电池的方法，该方法提供在基底（4）上沉积：大约100nm的ZnO的基本隔离层（17），约100pm的CdS层（18），一层（19）的 混合的硒化物和金属层（20）通过脉冲等离子体沉积（PPD）; 混合硒化物的沉积是通过多个电子通量同时击中不同组成的靶（3,3'）而进行的。

    PULSED PLASMA DEPOSITION DEVICE
    8.
    发明公开
    PULSED PLASMA DEPOSITION DEVICE 有权
    DEVICE对于脉冲等离子涂层

    公开(公告)号：EP2936538A1

    公开(公告)日：2015-10-28

    申请号：EP13826886.7

    申请日：2013-12-20

    Applicant: Organic Spintronics S.R.L.

    Inventor： YARMOLICH, Dmitry ,  TALIANI, Carlo

    IPC: H01J37/077 ,  H01J37/305

    CPC classification number: C23C16/515 ,  C23C16/487 ,  H01J3/025 ,  H01J37/077 ,  H01J37/30 ,  H01J37/3053 ,  H01J37/32532 ,  H01J2237/06375 ,  H01J2237/151 ,  H01J2237/3132

    Abstract: A pulsed plasma deposition device, comprising an apparatus for generating a beam of electrons (3), a target (4) and a substrate (6), the apparatus (3) being suitable for generating a pulsed beam of electrons directed towards said target (4) to determine the ablation of the material of said target (4) in the form of a plasma plume (19) directed towards said substrate (6); the device comprises a transportation and focussing group (13) of the beam of electrons towards said target (4), arranged between said apparatus (3) and said target (4) and comprising a transportation cone (14), the transportation and focussing group (13) also comprising a focussing electrode (15) directly connected to the transportation cone (14) and shaped substantially like a loop; the axis of symmetry (16) of the focussing electrode (15) is perpendicular, or substantially perpendicular, to the surface of the target (4).

    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING AN FLOW OF ELECTRONS TOWARDS A TARGET
    10.
    发明公开
    DEVICE FOR GENERATING PLASMA AND FOR DIRECTING AN FLOW OF ELECTRONS TOWARDS A TARGET 有权
    DEVICE等离子生产和电子流动转向到目标

    公开(公告)号：EP2411996A2

    公开(公告)日：2012-02-01

    申请号：EP10732416.2

    申请日：2010-03-23

    Applicant: Organic Spintronics S.R.L.

    Inventor： LOTTI, Riccardo ,  NOZAR, Petr ,  TALIANI, Carlo

    IPC: H01J3/02 ,  H01J37/077

    CPC classification number: H01J3/025

    Abstract: Device (1) for generating plasma and for directing an flow of electrons towards a specific target (3); the device (1) comprises a hollow cathode (5); a main electrode (7) at least partially placed inside the cathode (5); a resistor (12), electrically earthing the main electrode (7); a substantially dielectric tubular element (21) extending through a wall (22) of the cathode; a ring-shaped anode (25) placed around the tubular element (21) and earthed; and an activation group (11) which is electrically connected to the cathode (5) and is able to reduce the electric potential of the cathode (5) of at least 8 kV in about 10 ns.

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