METHOD AND APPARATUS FOR ARC SUPPRESSION IN SCANNED ION BEAM PROCESSING EQUIPMENT
    1.
    发明申请
    METHOD AND APPARATUS FOR ARC SUPPRESSION IN SCANNED ION BEAM PROCESSING EQUIPMENT 审中-公开
    扫描式离子束加工设备中电弧抑制的方法和设备

    公开(公告)号:WO2006047564A3

    公开(公告)日:2006-10-26

    申请号:PCT/US2005038493

    申请日:2005-10-25

    Inventor: REGAN KENNETH P

    Abstract: In an ion bean acceleration system, transient electrical arc suppression and ion beam accelerator biasing circuitry. Two-terminal circuitry, connectable in series, for suppressing arcs by automatically sensing arc conditions and switch from at least a first operating state providing a relatively low resistance electrical pathway for current between source and load terminals to at least a second, relatively high resistance electrical pathway. Selection of circuit component characteristics permits controlling the delay in returning from the second state to the first state after the arc has been suppressed.

    Abstract translation: 在离子豆加速系统中,瞬态电弧抑制和离子束加速器偏置电路。 可串联连接的双端电路,用于通过自动感测电弧状态来抑制电弧,并且从至少第一操作状态切换到第二相对高电阻的电气,所述第一操作状态为电流源和负载端子之间的电流提供相对低电阻的电气通路 途径。 选择电路元件特性允许控制电弧被抑制之后从第二状态返回到第一状态的延迟。

    METHOD AND APPARATUS FOR ARC SUPPRESSION IN SCANNED ION BEAM PROCESSING EQUIPMENT
    2.
    发明申请
    METHOD AND APPARATUS FOR ARC SUPPRESSION IN SCANNED ION BEAM PROCESSING EQUIPMENT 审中-公开
    用于扫描离子束处理设备中的电弧抑制的方法和装置

    公开(公告)号:WO2006047564A2

    公开(公告)日:2006-05-04

    申请号:PCT/US2005/038493

    申请日:2005-10-25

    Abstract: In an ion bean acceleration system, transient electrical arc suppression and ion beam accelerator biasing circuitry. Two-terminal circuitry, connectable in series, for suppressing arcs by automatically sensing arc conditions and switch from at least a first operating state providing a relatively low resistance electrical pathway for current between source and load terminals to at least a second, relatively high resistance electrical pathway. Selection of circuit component characteristics permits controlling the delay in returning from the second state to the first state after the arc has been suppressed.

    Abstract translation: 在离子豆加速系统中,瞬态电弧抑制和离子束加速器偏置电路。 两端子电路,可串联连接,用于通过自动感测电弧条件并从至少第一工作状态切换来抑制电弧,从而提供用于源极和负载端子之间的电流的相对较低电阻的电通路至少第二相对高电阻的电 途径。 选择电路元件特性允许控制在电弧被抑制之后从第二状态返回到第一状态的延迟。

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