公开(公告)号：WO2012108283A3

公开(公告)日：2012-10-18

申请号：PCT/JP2012051903

申请日：2012-01-24

Applicant: CANON KK ,  KATO AYAKO ,  TORASHIMA KAZUTOSHI ,  SOEDA YASUHIRO ,  WATANABE SHINICHIRO

Inventor： KATO AYAKO ,  TORASHIMA KAZUTOSHI ,  SOEDA YASUHIRO ,  WATANABE SHINICHIRO

IPC: B81B3/00 ,  B06B1/02 ,  G01N29/24

CPC classification number: H01L41/33 ,  B06B1/0292 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0191

Abstract: Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.

Abstract translation: 提供一种使用熔接的制造电容式机电换能器的方法，其能够减少在具有不同边界条件（例如接合面积）的位置处引起的膜片之间的初始变形的波动，从而增强换能器的均匀性并稳定灵敏度， 类似。 制造电容式机电换能器的方法包括：在第一硅衬底上形成绝缘层并形成至少一个凹槽; 将第二硅衬底熔合到所述绝缘层上; 并使第二硅衬底变薄并形成硅膜。 该方法还包括在将第二硅衬底接合到绝缘层之前，在至少一个凹部的周边处在绝缘层中形成凹槽。

公开(公告)号：WO2012108252A1

公开(公告)日：2012-08-16

申请号：PCT/JP2012/051281

申请日：2012-01-16

Applicant: CANON KABUSHIKI KAISHA ,  KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

Inventor： KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

IPC: B06B1/02

CPC classification number: H01L29/84 ,  B06B1/0292

Abstract: Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device (101), the device including at least one cellular structure (102) including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove (103) formed in a layer shared with the diaphragm supporting portion.

Abstract translation: 提供一种通过熔接制造的电容式机电换能器，其能够通过减少在诸如接合面积的不同边界条件的位置处引起的膜片之间的初始变形的波动来提高性能。 所述电容式机电换能器包括装置（101），所述装置包括至少一个蜂窝结构（102），包括：硅衬底; 隔膜 以及隔膜支撑部，其构造成支撑所述隔膜，使得在所述硅基板的一个表面和所述隔膜之间形成间隙。 该装置在其周边具有形成在与隔膜支撑部分共享的层中的凹槽（103）。

公开(公告)号：WO2012108283A2

公开(公告)日：2012-08-16

申请号：PCT/JP2012/051903

申请日：2012-01-24

Applicant: CANON KABUSHIKI KAISHA ,  KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

Inventor： KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

IPC: B81C1/00

CPC classification number: H01L41/33 ,  B06B1/0292 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0191

Abstract: Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.

Abstract translation: 提供一种使用熔接的制造电容式机电换能器的方法，其能够减少在具有不同边界条件（例如接合面积）的位置处引起的膜片之间的初始变形的波动，从而增强换能器的均匀性并稳定灵敏度， 类似。 制造电容式机电换能器的方法包括：在第一硅衬底上形成绝缘层并形成至少一个凹槽; 将第二硅衬底熔合到所述绝缘层上; 并使第二硅衬底变薄并形成硅膜。 该方法还包括在将第二硅衬底接合到绝缘层之前，在至少一个凹部的周边处在绝缘层中形成凹槽。

公开(公告)号：WO2010002009A3

公开(公告)日：2010-11-25

申请号：PCT/JP2009062236

申请日：2009-06-29

Applicant: CANON KK ,  EZAKI TAKAHIRO ,  CHANG CHIENLIU ,  SOEDA YASUHIRO ,  TAMAMORI KENJI

Inventor： EZAKI TAKAHIRO ,  CHANG CHIENLIU ,  SOEDA YASUHIRO ,  TAMAMORI KENJI

IPC: B06B1/02

CPC classification number: H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes.

Abstract translation: 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 所述第一电极通过凹槽被分隔成每个元件，绝缘连接基板被接合到所述第一电极，并且布线由每个所述元件分别通过所述连接基板与所述第一电极相对的一侧制成 到第一电极。

公开(公告)号：WO2010002009A2

公开(公告)日：2010-01-07

申请号：PCT/JP2009/062236

申请日：2009-06-29

Applicant: CANON KABUSHIKI KAISHA ,  EZAKI, Takahiro ,  CHANG, Chienliu ,  SOEDA, Yasuhiro ,  TAMAMORI, Kenji

Inventor： EZAKI, Takahiro ,  CHANG, Chienliu ,  SOEDA, Yasuhiro ,  TAMAMORI, Kenji

IPC: B06B1/06

CPC classification number: H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes.

Abstract translation: 元件阵列包括具有第一电极和第二电极的多个元件，所述第一电极和第二电极之间具有间隙; 第一电极通过沟槽与每个元件分开，绝缘连接基板与第一电极接合，并且由各个第一电极中的每个第一电极形成的布线通过连接基板被分离到每个元件的相对侧 到第一个电极。

公开(公告)号：WO2009151089A1

公开(公告)日：2009-12-17

申请号：PCT/JP2009/060650

申请日：2009-06-04

Applicant: CANON KABUSHIKI KAISHA ,  SOEDA, Yasuhiro ,  EZAKI, Takahiro

Inventor： SOEDA, Yasuhiro ,  EZAKI, Takahiro

IPC: B06B1/02

CPC classification number: G01S1/74 ,  B06B1/0292 ,  Y10T29/49002

Abstract: A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.

Abstract translation: 一种电容式机电转换装置的制造方法，其特征在于，通过将基板和膜部件接合而形成密封在所述基板与所述膜部件之间的空腔的制造方法，所述制造电容式机电转换装置的工序包括以下步骤：提供气体释放路径 从衬底和膜构件之间的粘合界面穿透到外部，并且通过设置气体释放路径将膜构件与衬底接合而形成空腔; 气体释放路径设置在路径不与空腔连通的位置处。