公开(公告)号：WO2008079158A1

公开(公告)日：2008-07-03

申请号：PCT/US2007/009398

申请日：2007-04-17

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas, Ray ,  CRUZ, Vincent ,  NAJAFI, Nader

Inventor： SPARKS, Douglas, Ray ,  CRUZ, Vincent ,  NAJAFI, Nader

IPC: G05B19/042

CPC classification number: G05B19/0425

Abstract: A sensing and analysis system (10), method, and network (18) that make use of a very portable and compact sensor unit (12) and a physically separate electronic unit (14) that serves to power and control the sensor unit (12), process and optionally display the output of the sensor unit (12), and transmit the sensor output to other locations, such as over a network (18). The sensor unit (12) includes a housing (22), a sensing element (56) within the housing (22) and responsive to an input, and electronic circuitry (24) within the housing (22) and in communication with the sensing element (56) to produce an electrical output based on an output signal generated by the sensing element (56). A communication providing device (20,120,220) delivers instructions generated by the electronic unit (14) to the sensor unit (12) and delivers the electrical output from the sensor unit (12) to the electronic unit (14).

Abstract translation: 利用非常便携且紧凑的传感器单元（12）和用于对传感器单元（12）供电和控制的物理上分离的电子单元（14）的感测和分析系统（10），方法和网络（18） ），处理并可选地显示传感器单元（12）的输出，并且将传感器输出传送到诸如网络（18）的其它位置。 传感器单元（12）包括壳体（22），壳体（22）内的感测元件（56）并且响应于壳体（22）内的输入和电子电路（24）并且与感测元件 （56），以基于由感测元件（56）产生的输出信号产生电输出。 通信提供设备（20,120,220）将由电子单元（14）生成的指令传送到传感器单元（12），并将电输出从传感器单元（12）传送到电子单元（14）。

公开(公告)号：WO2009102763A1

公开(公告)日：2009-08-20

申请号：PCT/US2009/033757

申请日：2009-02-11

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas, Ray ,  SMITH, Richard, Thayre ,  NAJAFI, Nader

Inventor： SPARKS, Douglas, Ray ,  SMITH, Richard, Thayre ,  NAJAFI, Nader

IPC: B81B1/00 ,  H01L21/00 ,  B81B7/00 ,  G01N33/00

CPC classification number: G01N11/16 ,  G01F1/8413 ,  G01F1/8418 ,  G01F1/8427 ,  G01F1/8431 ,  G01F1/844 ,  G01F1/8472 ,  G01N9/002

Abstract: A microelectromechanical system (MEMS) device (10) and method for operating the device (10) to determine a property of a fluid. The device (10) has a tube (14) that extends from a base (16) and is spaced apart from a substrate surface (18) for vibrational movement in a plane normal to the surface (18). The tube (14) defines a continuous internal passage (20) having a fluid inlet (22) and fluid outlet (24) fluidically connected to the base (16). A cantilevered member (30) attached to a distal portion (14C) of the tube (14) opposite the base (16) is configured for vibrational movement relative to the distal portion (14C). A drive electrode (26) operable to induce vibrational movements in the tube (14) and cantilevered member (30) is disposed on the substrate surface (18). Sensing electrodes (28) are disposed on the substrate surface (18) for sensing Coriolis- induced deflections of the tube (14) when vibrated, generating outputs from which a property of a fluid flowing through the tube (14) can be determined.

Abstract translation: 一种微机电系统（MEMS）装置（10）和用于操作装置（10）以确定流体性质的方法。 装置（10）具有从基座（16）延伸并与衬底表面（18）间隔开的管（14），用于在垂直于表面（18）的平面中进行振动运动。 管（14）限定具有流体连接到基座（16）的流体入口（22）和流体出口（24）的连续内部通道（20）。 附接到与基部（16）相对的管（14）的远端部分（14C）的悬臂构件（30）构造成用于相对于远端部分（14C）的振动运动。 可操作以在管（14）和悬臂构件（30）中引起振动运动的驱动电极（26）设置在衬底表面（18）上。 感测电极（28）设置在衬底表面（18）上，用于在振动时感测科里奥利引起的管（14）的偏转，产生可以确定流过管（14）的流体的性质的输出。

公开(公告)号：WO2009003002A1

公开(公告)日：2008-12-31

申请号：PCT/US2008/068113

申请日：2008-06-25

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas Ray ,  RILEY, Diane ,  NAJAFI, Nader

Inventor： SPARKS, Douglas Ray ,  RILEY, Diane ,  NAJAFI, Nader

IPC: G01F1/84 ,  G01F1/76 ,  G01N27/06

CPC classification number: G01F1/8472 ,  G01F1/8445

Abstract: A microfluidic device for assessing properties of a fluid. The device utilizes a microtube (10) capable of different vibration modes for promoting certain performance and/or structural aspects of the device. The microtube (10) is supported by a base (12) so as to be spaced apart from a substrate surface (52). The microtube (10) has a peripheral portion (14) surrounding the base (12), arms (16) supporting the peripheral portion (14) from the base (12), and a continuous internal microchannel (18) having at least first and second microchannel portions (18). Each microchannel portion (18) defines a separate flow route, and each flow route originates at the base (12), continues through a portion of the peripheral portion (14), and returns to the base (12). The first and second microchannel portions (18) are fluidically connected to inlet and outlet ports (26, 32), respectively, within the base (12). Vibration of the microtube (10) is induced and sensed by driving and sensing elements (60A-B, 62A-B). Fluid properties are determined from outputs of the sensing elements (62A-B).

Abstract translation: 用于评估流体性质的微流体装置。 该装置利用能够具有不同振动模式的微管（10）来促进装置的某些性能和/或结构方面。 微管（10）由基部（12）支撑，以便与衬底表面（52）间隔开。 微管（10）具有围绕基部（12）的周边部分（14），从基部（12）支撑周边部分（14）的臂（16）和连续的内部微通道（18），其具有至少第一和 第二微通道部分（18）。 每个微通道部分（18）限定单独的流动路径，并且每个流动路线起始于基部（12），继续通过周边部分（14）的一部分，并返回到基部（12）。 第一和第二微通道部分18分别在基部（12）内流体连接到入口端口（26,32）。 通过驱动和感测元件（60A-B，62A-B）感应和感测微管（10）的振动。 流体性质由感测元件（62A-B）的输出确定。

公开(公告)号：WO2006083386A1

公开(公告)日：2006-08-10

申请号：PCT/US2005/043581

申请日：2005-12-01

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas, Ray ,  NAJAFI, Nader

Inventor： SPARKS, Douglas, Ray ,  NAJAFI, Nader

IPC: G01F1/84

CPC classification number: G01F1/8472 ,  G01F1/8413 ,  G01F1/8445 ,  G01N9/002 ,  G01N2009/006

Abstract: A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.

Abstract translation: 一种微机械流体感测装置及其制造方法。 感测装置包括旁路通道，优选地在装置内的整体旁路通道，其能够将体积的流体输送到装置，其中流体的有限部分通过装置内的通道，其中一个或多个特性 的液体，例如但不限于密度，比重和化学浓度。 该装置适用于监测用于燃料电池的燃料混合物中的燃料浓度。

公开(公告)号：WO2009102796A1

公开(公告)日：2009-08-20

申请号：PCT/US2009/033805

申请日：2009-02-11

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas, Ray ,  PUTTY, Michael, W. ,  NAJAFI, Nader ,  SMITH, Richard, Thayre

Inventor： SPARKS, Douglas, Ray ,  PUTTY, Michael, W. ,  NAJAFI, Nader ,  SMITH, Richard, Thayre

IPC: B81B1/00 ,  B81B7/00 ,  F15C1/04 ,  G01N27/00 ,  H01L21/44

CPC classification number: G01F1/8477 ,  B01L3/5027 ,  G01F1/8409 ,  G01F1/8427 ,  G01F1/8445 ,  G01F1/8472 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/02818 ,  G01N2291/02836 ,  G01N2291/0422 ,  G01N2291/0426 ,  Y10T29/49002

Abstract: A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.

Abstract translation: 一种微机电系统（MEMS）装置和用于操作该装置以确定流体的至少一个性质的方法。 该装置包括在基底上的基底和从基底延伸并与基底的表面间隔开的管结构。 管结构包括至少一个管部分，更优选地至少一对基本上位于平面中的平行管部分，至少一个连续内部通道至少部分地限定在平行管部分内，以及入口和出口 内部通道流体连接到基座。 驱动元件可操作以在管结构的平面中引导管结构中的振动运动并且引起管部分中的共振振动运动。 当管结构与驱动元件振动时，感测元件感测管部分的偏转。

公开(公告)号：WO2009051811A3

公开(公告)日：2009-07-16

申请号：PCT/US2008011897

申请日：2008-10-17

Applicant: INTEGRATED SENSING SYSTEMS INC ,  NAJAFI NADER ,  SPARKS DOUGLAS RAY

Inventor： NAJAFI NADER ,  SPARKS DOUGLAS RAY

IPC: A61B5/00

CPC classification number: A61B5/0537 ,  A61B5/0031 ,  A61B5/14539 ,  A61B5/6864 ,  A61B5/6882

Abstract: A system for monitoring a charge-based physiological parameter within an internal organ of a living body, and a sensor adapted to be implanted in the living body and an organ therein. The sensor includes sensing elements adapted to sense the charge-based physiological parameter within the organ, and the sensing elements include at least first and second sensing elements that are electrically conductive, aligned, spaced apart and exposed at the exterior of the sensor. The sensor further includes a device for passing an alternating current from the first to the second sensing elements through an ionic solution contacting the sensing elements. The sensor also includes a device for generating a signal corresponding to the impedance of the ionic solution based on the alternating current.

Abstract translation: 一种用于监测活体内部器官内的基于电荷的生理参数的系统以及适于植入活体和其中的器官的传感器。 传感器包括适于感测器官内基于电荷的生理参数的感测元件，并且感测元件包括至少第一感测元件和第二感测元件，第一感测元件和第二感测元件在传感器的外部导电，对准，间隔开并暴露。 传感器还包括用于使交流电流从第一传感元件传递到第二传感元件的装置，该交流电流通过与传感元件接触的离子溶液。 传感器还包括用于基于交流电流产生与离子溶液的阻抗相对应的信号的装置。

公开(公告)号：WO2009140340A1

公开(公告)日：2009-11-19

申请号：PCT/US2009/043720

申请日：2009-05-13

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas, Ray

Inventor： SPARKS, Douglas, Ray

IPC: B81C1/00 ,  H01L23/12 ,  H01L21/02

CPC classification number: B81C1/00119 ,  B01L3/502707 ,  B81B2201/0214 ,  B81B2201/0278 ,  B81B2201/058 ,  G01F1/8445 ,  H01L24/94 ,  H01L2224/48091 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/16152 ,  H01L2924/3025 ,  Y10T137/2191 ,  Y10T137/2224 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A process for fabricating multiple microfluidic device chips (50). The process includes fabricating multiple micromachined tubes (52) in a semiconductor device wafer (12). The tubes (52) are fabricated so that each tube (52) has an internal fluidic passage (16) and an inlet and outlet (18) thereto defined in a surface of the device wafer (12). The device wafer (12) is then bonded to a glass wafer (14) to form a device wafer stack (10), and so that through-holes (24) in the glass wafer (14) are individually fluidically coupled with the inlets and outlets (18) of the tubes (52). The glass wafer (14) is then bonded to a metallic wafer (26) to form a package wafer stack, so that through-holes (30) in the metallic wafer (26) are individually fluidically coupled with the through-holes (24) of the glass wafer (14). Multiple microfluidic device chips (50) are then singulated from the package wafer stack. Each device chip (50) has a continuous flow path for a fluid therethrough that is preferably free of organic materials.

Abstract translation: 一种用于制造多个微流体装置芯片（50）的方法。 该方法包括在半导体器件晶片（12）中制造多个微加工管（52）。 管（52）被制造成使得每个管（52）具有内部流体通道（16）以及限定在器件晶片（12）的表面中的入口和出口（18）。 然后将器件晶片（12）接合到玻璃晶片（14）以形成器件晶片堆叠（10），并且使得玻璃晶片（14）中的通孔（24）与入口单独地流体耦合，并且 管（52）的出口（18）。 然后将玻璃晶片（14）接合到金属晶片（26）以形成封装晶片叠层，使得金属晶片（26）中的通孔（30）与通孔（24）分别流体耦合， 的玻璃晶片（14）。 然后，多个微流体装置芯片（50）从封装晶片叠层分离。 每个设备芯片（50）具有用于流过其中的流体的连续流动路径，其优选地不含有机材料。

公开(公告)号：WO2009076287A3

公开(公告)日：2009-08-13

申请号：PCT/US2008085866

申请日：2008-12-08

Applicant: INTEGRATED SENSING SYSTEMS INC ,  SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

Inventor： SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

IPC: G01N33/00 ,  B81B7/00 ,  G01D21/02 ,  G01F17/00 ,  G01N27/00

CPC classification number: G01F1/8445 ,  G01N9/002

Abstract: A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device (10) having a micromachined tube (14) supported above a substrate (12), a tube passage (20) within a freestanding portion (16) of the tube (14), an inlet (36a) and outlet (36b) in fluidic communication with the tube passage (20) and an exterior of the microfluidic device (10), elements (22) for vibrating the freestanding portion (16) of the tube (14), and elements (24) for sensing movement of the freestanding portion (16) of the tube (14) so as to measure the vibration frequency and/or deflection of the freestanding portion (16) and produce therefrom at least one output corresponding to a property of a fluid flowing through the tube passage (20). The system and method further entail placing the microfluidic device (10) in a flowing fluid so that a fraction of the fluid enters the tube passage (20), and processing the output of the device (10) to compute a property of the fluid.

Abstract translation: 一种用于感测流动流体的性质的流体感测系统和方法。 该系统和方法需要一个微流体装置（10），该微流体装置（10）具有支撑在衬底（12）上方的微加工管（14），管（14）的独立部分（16）内的管通道（20），入口 ）和出口（36b）与管通道（20）和微流体装置（10）的外部流体连通，用于振动管（14）的独立部分（16）的元件（22）和元件（24 ），用于感测所述管（14）的所述独立部分（16）的运动，以测量所述独立部分（16）的振动频率和/或偏转，并从其产生至少一个对应于流体流动性质的输出 通过管道（20）。 该系统和方法还需要将微流体装置（10）放置在流动的流体中，使得流体的一部分进入管通道（20），并且处理装置（10）的输出以计算流体的性质。

公开(公告)号：WO2009111487A1

公开(公告)日：2009-09-11

申请号：PCT/US2009/035902

申请日：2009-03-03

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas Ray ,  NAJAFI, Nader

Inventor： SPARKS, Douglas Ray ,  NAJAFI, Nader

IPC: B81C1/00 ,  B81B7/00 ,  H01L21/302 ,  H01L21/304 ,  C23F1/00 ,  G01D21/02

CPC classification number: B81B1/002 ,  B01L3/5027 ,  B81B2201/0242 ,  B81B2201/055 ,  B81B2203/0323 ,  B81B2203/0338 ,  B81C1/00 ,  B81C1/00119 ,  B81C1/0019 ,  B81C1/00357 ,  B81C1/00468 ,  G01F1/84 ,  G01F1/8404 ,  G01F1/8409 ,  G01F1/844 ,  G01F1/8445 ,  Y10T428/13 ,  Y10T436/11 ,  Y10T436/25 ,  Y10T436/2575

Abstract: A process for producing a micromachined tube microtube (50) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate (18) to define therein a channel (20) having an arcuate cross-sectional profile, and forming a substrate structure (30) by bonding the first substrate (18) to a second substrate (22) so that the second substrate (22) overlies and encloses the channel (20) to define a passage (32) having a cross-sectional profile of which at least half is arcuate. The substrate structure (30) can optionally then be thinned to define a microtube (50) and walls thereof that surround the passage (32).

Abstract translation: 一种用于生产适用于微流体装置的微加工管微管（50）的方法。 该方法需要各向同性蚀刻第一衬底（18）的表面以在其中限定具有弓形横截面轮廓的通道（20），并且通过将第一衬底（18）结合到第二衬底（18）来形成衬底结构（30） （22），使得所述第二基板（22）覆盖并包围所述通道（20）以限定具有至少一半弧形的横截面轮廓的通道（32）。 衬底结构（30）可任选地被减薄以限定围绕通道（32）的微管（50）及其壁。

公开(公告)号：WO2009076287A2

公开(公告)日：2009-06-18

申请号：PCT/US2008/085866

申请日：2008-12-08

Applicant: INTEGRATED SENSING SYSTEMS, INC. ,  SPARKS, Douglas Ray ,  SMITH, Richard Thayre ,  NAJAFI, Nader

Inventor： SPARKS, Douglas Ray ,  SMITH, Richard Thayre ,  NAJAFI, Nader

IPC: G01N33/00 ,  G01F17/00 ,  G01N27/00 ,  G01D21/02 ,  B81B7/00

CPC classification number: G01F1/8445 ,  G01N9/002

Abstract: A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device (10) having a micromachined tube (14) supported above a substrate (12), a tube passage (20) within a freestanding portion (16) of the tube (14), an inlet (36a) and outlet (36b) in fluidic communication with the tube passage (20) and an exterior of the microfluidic device (10), elements (22) for vibrating the freestanding portion (16) of the tube (14), and elements (24) for sensing movement of the freestanding portion (16) of the tube (14) so as to measure the vibration frequency and/or deflection of the freestanding portion (16) and produce therefrom at least one output corresponding to a property of a fluid flowing through the tube passage (20). The system and method further entail placing the microfluidic device (10) in a flowing fluid so that a fraction of the fluid enters the tube passage (20), and processing the output of the device (10) to compute a property of the fluid.

Abstract translation: 用于感测流动流体特性的流体传感系统和方法。 该系统和方法需要微流体装置（10），其具有支撑在基底（12）上方的微加工管（14），管（14）的独立部分（16）内的管通道（20），入口（36a ）和与管通道（20）和微流体装置（10）的外部流体连通的出口（36b），用于振动管（14）的独立部分（16）的元件（22），以及元件（24 ），用于感测管（14）的独立式部分（16）的运动，从而测量独立式部分（16）的振动频率和/或偏转并由此产生至少一个对应于流体流动特性的输出 通过管通道（20）。 该系统和方法还需要将微流体装置（10）放置在流动流体中，使得一部分流体进入管通道（20），并处理装置（10）的输出以计算流体的性质。