公开(公告)号：WO2005076075A3

公开(公告)日：2006-04-27

申请号：PCT/US2005002064

申请日：2005-01-19

Applicant: TOKYO ELECTRON LTD ,  TOKYO ELECTRON AMERICA INC ,  KAUSHAL SANJEEV ,  PANDEY PRADEEP ,  SUGASHIMA KENJI

Inventor： KAUSHAL SANJEEV ,  PANDEY PRADEEP ,  SUGASHIMA KENJI

IPC: G03F1/00 ,  F23N1/00 ,  G03F20060101 ,  G03F1/14 ,  G03F7/20

CPC classification number: G03F1/68 ,  G03F1/78 ,  H01L21/67248

Abstract: An adaptive real time thermal processing system is presented that includes a multivariable controller (260). Generally, the method (1600) includes creating a dynamic model of the thermal processing system (1630); incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints (1650); creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.

Abstract translation: 提出了一种包括多变量控制器（260）的自适应实时热处理系统。 通常，方法（1600）包括创建热处理系统（1630）的动态模型; 在动态模型中结合掩模/掩模曲率; 将扩散扩增模型耦合到动态热模型中; 创建一个多变量控制器; 将标称设定值参数化为智能设定值的向量（1650）; 创建一个过程敏感性矩阵; 使用有效的优化方法和过程数据创建智能设定点; 并建立在运行期间选择合适的模型和设定值的配方。

公开(公告)号：WO2005076075A2

公开(公告)日：2005-08-18

申请号：PCT/US2005/002064

申请日：2005-01-19

Applicant: TOKYO ELECTRON LIMITED ,  TOKYO ELECTRON AMERICA, INC. ,  KAUSHAL, Sanjeev ,  PANDEY, Pradeep ,  SUGASHIMA, Kenji

Inventor： KAUSHAL, Sanjeev ,  PANDEY, Pradeep ,  SUGASHIMA, Kenji

IPC: G03F

CPC classification number: G03F1/68 ,  G03F1/78 ,  H01L21/67248

Abstract: An adaptive real time thermal processing system is presented that includes a multivariable controller (260). Generally, the method (1600) includes creating a dynamic model of the thermal processing system (1630); incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints (1650); creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.

Abstract translation: 提出了一种包括多变量控制器（260）的自适应实时热处理系统。 通常，方法（1600）包括创建热处理系统（1630）的动态模型; 在动态模型中结合掩模/掩模曲率; 将扩散扩增模型耦合到动态热模型中; 创建一个多变量控制器; 将标称设定值参数化为智能设定值的向量（1650）; 创建一个过程敏感性矩阵; 使用有效的优化方法和过程数据创建智能设定点; 并建立在运行期间选择合适的模型和设定值的配方。