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公开(公告)号:KR102060989B1
公开(公告)日:2019-12-31
申请号:KR1020170122622
申请日:2017-09-22
Applicant: (재)한국나노기술원
IPC: H01L31/16 , H01L31/08 , H01L31/0224 , H01L31/072
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公开(公告)号:KR101960265B1
公开(公告)日:2019-03-20
申请号:KR1020170184089
申请日:2017-12-29
Applicant: (재)한국나노기술원
IPC: H01L31/0725 , H01L31/0224 , H01L33/06 , H01L33/50
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