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Patent Agency Ranking
公开(公告)号：KR1020130035464A
公开(公告)日：2013-04-09
申请号：KR1020110099772
申请日：2011-09-30
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A device using polarized lights for measuring a 3D shape and thickness is provided to simultaneously obtain a surface shape and the thickness information of a target object by using the polarized lights. CONSTITUTION: A device(200) using polarized lights for measuring a 3D shape and thickness comprises a white light source(210), a first beam splitter(220), a linear polarizer(230), a second beam splitter(270), a mirror(280), and a spectroscope(290). The first beam splitter sorts white light incident from the white light source into reference lights and measurement lights, thereby irradiating the same respectively to a reference mirror(240) and a measurement object(260). The first beam splitter interferes in the reference and measurement lights, which are reflected by the reference mirror and measurement object, thereby generating coherent lights. The linear polarizer linear-polarizes the reference lights so that the reference lights have only first polarizing components. [Reference numerals] (AA,BB,DD,) Vertical polarization; (CC,FF) Horizontal polarization; (EE) Shape, thickness;
Abstract translation: 目的：提供使用偏振光来测量3D形状和厚度的装置，以通过使用偏振光同时获得目标物体的表面形状和厚度信息。 构成：使用用于测量3D形状和厚度的偏振光的装置（200）包括白色光源（210），第一分束器（220），线性偏振器（230），第二分束器（270），第二分束器 镜（280）和分光镜（290）。 第一分束器将从白色光源入射的白光分成参考光和测量光，从而将其照射到参考反射镜（240）和测量对象（260）。 第一个分光器干涉参考和测量光，由参考镜和测量对象反射，从而产生相干光。 线性偏振器线性偏振参考光，使得参考光仅具有第一偏振分量。 （标号）（AA，BB，DD，）垂直极化; （CC，FF）水平极化; （EE）形状，厚度;
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公开(公告)号：KR1020130022134A
公开(公告)日：2013-03-06
申请号：KR1020110084910
申请日：2011-08-25
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A 3D shape measuring device, a method thereof, and a measurement data matching method are provided to correct a measurement result as matching data is obtained by partially scanning a second shaft intersecting with a first shaft when obtaining the measurement data of the entire surface of a measurement object by scanning generally the first shaft so that an accurate 3D surface shape of the measurement object is obtained. CONSTITUTION: A 3D shape measuring device comprises a white light source(210), a first beam splitter(220), a second beam splitter, a first spectroscope(260), and a second spectroscope(270). The first beam splitter splits the white light incident from the white light source into reference lights and measurement lights, thereby respectively irradiating the same to a reference mirror and a measurement object. The first beam splitter generates coherent lights by cohering the reference lights and measurement lights reflected by the reference mirror and measurement object. The first spectroscope generates a first coherent signal, thereby obtaining the basic shape data of the measurement object. The second spectroscope generates a second coherent signal, thereby obtaining the matching data for correcting the measurement errors of the basic shape data.
Abstract translation: 目的：提供3D形状测量装置，其方法和测量数据匹配方法，以在获得整个表面的测量数据时部分扫描与第一轴相交的第二轴获得匹配数据来校正测量结果 通过扫描第一轴，从而获得测量对象的精确3D表面形状。 构成：3D形状测量装置包括白光源（210），第一分束器（220），第二分束器，第一分光器（260）和第二分光器（270）。 第一分束器将从白光入射的白光分成参考光和测量光，从而将其照射到参考反射镜和测量对象。 第一个分束器通过参考基准光和参考反射镜和测量对象反射的测量光产生相干光。 第一分光镜产生第一相干信号，从而获得测量对象的基本形状数据。 第二分光镜产生第二相干信号，从而获得用于校正基本形状数据的测量误差的匹配数据。
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公开(公告)号：KR1020130084718A
公开(公告)日：2013-07-26
申请号：KR1020120005473
申请日：2012-01-18
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A three-dimensional surface measurement device capable of using the spectroscope and a method thereof are provided to enable the magnification change to the telecentric lens in the front end of a detector, thereby enabling various resolutions variation and the measurement. CONSTITUTION: A three-dimensional surface measurement device capable of using the spectroscope (236) is comprised of a first light splitter (218), an interference light path changing unit (230), an optical element delivery unit (232) and a detection unit (240). The first light splitter separates the white light from the light source (210) into to the reference light and the measurement light, and irradiates to a reference mirror (222) and a sample (226). The first light splitter interferes in the light which is reflected from the reference mirror and the sample and generates the interference light. The interference light path changing unit changes the path of the interference light which is emitted from the first light splitter. The optical element delivery unit linearly moves the interference light path changing unit. The detection unit consecutively irradiates the section of the interference light which changed the path by the linearly moving interference light path changing unit. The detection unit obtains the spectroscopic image of each section of the interference light. [Reference numerals] (210) Light source; (214) Collimation unit; (232) Optical element delivery unit; (AA) Reference surface
Abstract translation: 目的：提供能够使用分光器的三维表面测量装置及其方法，以便能够对检测器前端中的远心透镜进行放大率变化，从而实现各种分辨率变化和测量。 构成：能够使用分光器（236）的三维表面测量装置由第一分光器（218），干涉光路改变单元（230），光学元件输送单元（232）和检测单元 （240）。 第一光分路器将来自光源（210）的白光分离成参考光和测量光，并照射到参考反射镜（222）和样品（226）。 第一光分路器干涉从参考反射镜和样本反射的光，并产生干涉光。 干涉光路改变单元改变从第一分光器发射的干涉光的路径。 光学元件传送单元直线地移动干涉光路改变单元。 检测单元连续地照射通过线性移动干涉光路改变单元改变路径的干涉光的部分。 检测单元获得干涉光的每个部分的分光图像。 （附图标记）（210）光源; （214）准直装置; （232）光学元件传送单元; （AA）参考面
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公开(公告)号：KR101251292B1
公开(公告)日：2013-04-12
申请号：KR1020110099772
申请日：2011-09-30
Applicant: (주)미래컴퍼니
Abstract: 편광을 이용한 3차원 형상 및 두께 측정 장치 및 방법이 개시된다. 백색광을 조사하는 백색광원, 백색광원으로부터 입사된 백색광을 기준광과 측정광으로 분리하여 기준미러 및 측정물체에 각각 조사되도록 하고, 기준미러 및 측정물체로부터 반사된 기준광 및 측정광을 간섭시켜 간섭광을 생성하는 제1 광분할기, 제1 광분할기와 기준미러 사이에 개재되며, 기준광이 제1 편광성분만을 가지도록 선형 편광시키는 선형 편광기, 제1 광분할기에서 출사되는 간섭광 중 제1 편광성분 및 제2 편광성분 중 하나는 제1 경로로 경로 변경시키고 다른 하나는 투과시키는 제2 광분할기, 제2 광분할기를 투과한 간섭광을 제2 경로로 경로 변경시키는 미러 및 제1 경로 및 제2 경로 상에 배치되어 제1 경로 및 제2 경로를 통해 입사되는 제1 편광성분의 간섭광과 제2 편광성분의 간섭광으로부터 각각 제1 간섭신호 및 제2 간섭신호를 검출하 는 분광기를 포함하는 3차원 형상 및 두께 측정 장치에 의하면, 편광을 이용하여 측정물체의 표면 형상 및 두께에 대한 정보를 일시에 획득하는 것이 가능하다.
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公开(公告)号：KR1020130039005A
公开(公告)日：2013-04-19
申请号：KR1020110103415
申请日：2011-10-11
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A device for measuring a 3D shape and thickness is provided to improve anti-vibration properties when measuring the 3D shape or thickness as errors caused by mechanical movement are reduced. CONSTITUTION: A device(200) for measuring a 3D shape and thickness comprises a white light source(210), a wavelength variable device(220), a first beam splitter(230), a linear polarizer(240), a second beam splitter(280), first and second image acquisition units(290), and a data processing unit. The white light source emits white lights. The wavelength variable device splits the white light incident from the white light source into a plurality of short wavelength lights, and the short wavelength lights are successively emitted per each wavelength. The first beam splitter separates the short wavelength lights into reference lights and measurement light, irradiates the light to a reference mirror(250) and a measurement object(270), and interferes the reference lights and measurement light reflected by the reference mirror and the measurement object, thereby generating coherent lights.
Abstract translation: 目的：提供一种用于测量3D形状和厚度的装置，以便在测量3D形状或厚度时提高抗振性能，因为机械运动引起的误差降低。 构成：用于测量3D形状和厚度的装置（200）包括白色光源（210），波长可变装置（220），第一分束器（230），线性偏振器（240），第二分束器 （280），第一和第二图像获取单元（290）和数据处理单元。 白光源发出白光。 波长可变装置将从白色光源入射的白色光分离成多个短波长的光，并且每个波长连续地发射短波长的光。 第一分束分离器将短波长光分离成参考光和测量光，将光照射到参考反射镜（250）和测量对象（270），并干扰参考光和参考反射镜反射的测量光以及测量 对象，从而产生相干光。
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