公开(公告)号：KR101416559B1

公开(公告)日：2014-07-10

申请号：KR1020130127683

申请日：2013-10-25

Applicant: (주)펨트론

Inventor： 조철훈 ,  유길연 ,  백양선 ,  손창욱

IPC: H01J37/147 ,  H01J37/26

Abstract: According to an embodiment of the present invention, a device for adjusting the alignment of electronic beams includes: an electronic beam radiating body which is installed in the upper part of a chamber to be connected to the chamber in which a sample is placed and has a hollow shape; an electronic gun which includes an electronic beam radiation member installed inside the electronic beam radiating body and radiating electronic beams to the sample and a guide tube for guiding electronic beams; and a beam alignment unit which includes a first quadrupole unit made up of a plurality of first polar bobbins which are placed separately in a radial shape with regular intervals frame each other from the guide tube and on the outer circumferential surface of which coils are wound and a second quadrupole unit made up of a plurality of second polar bobbins which are placed separately in a radial shape with regular intervals from each other and in parallel to the first polar bobbins in two lines and on the outer circumferential surface of which coils are wound. The beam alignment unit adjusts the alignment of electronic beams to radiate electronic beams passing through the guide tube by first repulsion force among the first polar bobbins and second repulsion force among the second polar bobbins on the same line with the central axis of the guide tube, when current is applied to the first and the second quadrupole unit.

Abstract translation: 根据本发明的实施例，用于调整电子束对准的装置包括：电子束辐射体，其安装在室中的上部，以连接到放置样品的室，并具有 中空形状; 电子枪，其包括安装在电子束辐射体内部并将电子束辐射到样品的电子束辐射构件和用于引导电子束的引导管; 以及光束对准单元，其包括由多个第一极坐标轴组成的第一四极单元，所述第一极坐标线圈分别以径向形状放置，与所述导管和所述线圈的外周表面相互间隔规则间隔地卷绕， 第二四极单元，其由多个第二极性线轴组成，所述第二极性线轴分别以径向形状彼此间隔开并且平行于两条线中的第一极性线轴并且缠绕在其外圆周表面上。 光束对准​​单元调整电子束的对准，以使第一极轴中的第一排斥力和第二极轴之间的第二排斥力与引导管的中心轴线在同一直线上，通过引导管辐射电子束， 当电流施加到第一和第二四极单元时。