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公开(公告)号：KR1020140032026A
公开(公告)日：2014-03-14
申请号：KR1020120097121
申请日：2012-09-03
Applicant: (주)펨트론
Abstract: An electron beam irradiator for transferring a vacuum mode according to an embodiment of the present invention includes: a chamber having a space in where a sample is mounted and in which a column with a structure that is in communication with the space is installed; a first pump connected to the chamber to suck air in the chamber until the internal pressure in the chamber becomes high vacuum pressure; a second pump connected to the chamber and the first pump to suck air therein until the internal pressure therein becomes low vacuum pressure; and a valve part installed in the chamber and connected to the first pump and the second pump to open and close a first flow path for the air from the chamber to the first pump and a second flow path for the air from the chamber to the second pump.
Abstract translation: 根据本发明的实施例的用于传送真空模式的电子束照射器包括：具有安装样本的空间的腔室，并且其中安装有与该空间连通的结构的列; 连接到所述室以吸入所述室中的空气的第一泵直到所述室中的内部压力变得高真空压力; 连接到所述室的第二泵和所述第一泵以吸入其中的空气，直到其内部压力变得低真空压力; 以及阀部件，其安装在所述腔室中并且连接到所述第一泵和所述第二泵，以打开和关闭用于空气从所述腔室到所述第一泵的第一流路和用于从所述腔室到所述第二泵的空气的第二流动路径 泵。
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公开(公告)号：KR101416559B1
公开(公告)日：2014-07-10
申请号：KR1020130127683
申请日：2013-10-25
Applicant: (주)펨트론
IPC: H01J37/147 , H01J37/26
Abstract: According to an embodiment of the present invention, a device for adjusting the alignment of electronic beams includes: an electronic beam radiating body which is installed in the upper part of a chamber to be connected to the chamber in which a sample is placed and has a hollow shape; an electronic gun which includes an electronic beam radiation member installed inside the electronic beam radiating body and radiating electronic beams to the sample and a guide tube for guiding electronic beams; and a beam alignment unit which includes a first quadrupole unit made up of a plurality of first polar bobbins which are placed separately in a radial shape with regular intervals frame each other from the guide tube and on the outer circumferential surface of which coils are wound and a second quadrupole unit made up of a plurality of second polar bobbins which are placed separately in a radial shape with regular intervals from each other and in parallel to the first polar bobbins in two lines and on the outer circumferential surface of which coils are wound. The beam alignment unit adjusts the alignment of electronic beams to radiate electronic beams passing through the guide tube by first repulsion force among the first polar bobbins and second repulsion force among the second polar bobbins on the same line with the central axis of the guide tube, when current is applied to the first and the second quadrupole unit.
Abstract translation: 根据本发明的实施例，用于调整电子束对准的装置包括：电子束辐射体，其安装在室中的上部，以连接到放置样品的室，并具有 中空形状; 电子枪，其包括安装在电子束辐射体内部并将电子束辐射到样品的电子束辐射构件和用于引导电子束的引导管; 以及光束对准单元，其包括由多个第一极坐标轴组成的第一四极单元，所述第一极坐标线圈分别以径向形状放置，与所述导管和所述线圈的外周表面相互间隔规则间隔地卷绕， 第二四极单元，其由多个第二极性线轴组成，所述第二极性线轴分别以径向形状彼此间隔开并且平行于两条线中的第一极性线轴并且缠绕在其外圆周表面上。 光束对准单元调整电子束的对准，以使第一极轴中的第一排斥力和第二极轴之间的第二排斥力与引导管的中心轴线在同一直线上，通过引导管辐射电子束， 当电流施加到第一和第二四极单元时。
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公开(公告)号：KR101413683B1
公开(公告)日：2014-07-02
申请号：KR1020120097121
申请日：2012-09-03
Applicant: (주)펨트론
Abstract: 본 발명의 일 실시예에 따른 진공 모드 전환 전자빔 조사장치는 내부에 시료가 안착되는 공간이 마련되고, 공간과 연통되는 구조를 가진 컬럼이 설치된 챔버; 챔버의 공간과 연통가능하게 챔버의 일측에 설치된 밸브본체와, 밸브본체의 내부에 설치된 개폐밸브가 구비된 밸브부; 제 2 공기관에 의해 밸브본체에 연결되어, 챔버의 내부압력이 고진공압력이 되도록 챔버 내부의 공기를 흡입하는 제 1 펌프; 제 3 공기관에 의해 밸브본체에 연결되고 제 4 공기관에 의해 제 1 펌프에 연결되어, 챔버의 내부압력이 저진공압력이 되도록 챔버 내부의 공기를 흡입하는 제 2 펌프; 및 밸브본체와 컬럼을 연결하는 제 1 공기관, 제 2 공기관, 제 3 공기관과, 제 1 펌프와 제 2 펌프를 연결하는 제 4 공기관이 구비된 관부를 포함하고, 개폐밸브는 제 1 펌프와 제 2 펌프의 작동시, 제 3 공기관을 폐쇄하고 제 2 공기관을 개방토록 작동되어, 챔버와 컬럼 내의 공기가 제 2 공기관을 경유하여 제 1 펌프로 흡입된 후 제 4 공기관을 경유하여 제 2 펌프로 흡입되는 제 1 흐름경로를 따라 유동되도록 하고, 제 2 펌프의 작동시, 제 3 공기관을 개방하고 제 2 공기관을 폐쇄토록 작동되어, 챔버 내의 공기가 제 3 공기관을 경유하여 제 2 펌프로 흡입되는 제 2 흐름경로를 따라 유동되도록 하는 것이 바람직하다.
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