公开(公告)号：KR101312060B1

公开(公告)日：2013-09-25

申请号：KR1020120037869

申请日：2012-04-12

Applicant: (주)펨트론

Inventor： 조철훈 ,  유길연 ,  이수정

IPC: H01J37/06 ,  H01J37/10

Abstract: PURPOSE: An electron beam irradiation device with a multi-stage column structure improves the efficiency of replacement by separating a part in which a filament is installed from a part in which a focusing lens is installed to replace the filament. CONSTITUTION: An electron beam irradiation unit is installed on the top of a chamber and irradiates an electron beam. An object lens mounting unit (180) is installed on an electron beam irradiation housing unit to be connected to the chamber and mounts an object lens inside. A focusing lens mounting unit (170) is detachably installed on the top of the object lens mounting unit and mounts a focusing lens. A filament mounting unit (160) is detachably installed on the top of the focusing lens mounting unit and includes a filament irradiating the electron beam.

Abstract translation: 目的：具有多级柱结构的电子束照射装置通过将安装有灯丝的部分与安装聚焦透镜的部分分离来代替灯丝而提高了更换的效率。 构成：电子束照射单元安装在室的顶部并照射电子束。 物镜安装单元（180）安装在电子束照射容纳单元上，以与室连接并将物镜安装在内部。 聚焦透镜安装单元（170）可拆卸地安装在物镜安装单元的顶部并安装聚焦透镜。 灯丝安装单元（160）可拆卸地安装在聚焦透镜安装单元的顶部，并且包括照射电子束的灯丝。

公开(公告)号：KR1020130115514A

公开(公告)日：2013-10-22

申请号：KR1020120037867

申请日：2012-04-12

Applicant: (주)펨트론

Inventor： 조철훈 ,  김재순 ,  이수정

IPC: H01J37/20 ,  H01J37/26

Abstract: PURPOSE: An electronic beam emitting device performing the fine position adjustment of a sample is provided to efficiently use an inner space by connecting a shaft manipulation member and a shaft in series with each other. CONSTITUTION: A chamber housing (121) includes an electronic beam emitting unit (130). A chamber housing opening and closing unit (125) opens and closes the chamber housing. A sample placing unit includes a placing space for a sample. A sample position adjusting unit is installed in the chamber housing opening and closing unit. The sample position adjusting unit adjusts a position of the sample placing unit.

Abstract translation: 目的：提供一种执行样品精细位置调整的电子束发射装置，通过将轴操作构件和轴串联连接来有效地使用内部空间。 构成：腔室（121）包括电子束发射单元（130）。 腔室开启和关闭单元（125）打开和关闭腔室壳体。 样品放置单元包括用于样品的放置空间。 样品位置调节单元安装在腔室开启和关闭单元中。 样品位置调整单元调节样品放置单元的位置。