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公开(公告)号:CN101515551A
公开(公告)日:2009-08-26
申请号:CN200910004887.0
申请日:2009-02-04
Applicant: 株式会社瑞萨科技
IPC: H01L21/50
CPC classification number: H01L21/565 , H01L23/3107 , H01L23/433 , H01L23/4334 , H01L23/49537 , H01L23/49551 , H01L23/49562 , H01L23/49575 , H01L24/29 , H01L24/33 , H01L24/36 , H01L24/40 , H01L24/41 , H01L24/48 , H01L24/83 , H01L25/115 , H01L25/117 , H01L2224/26145 , H01L2224/26175 , H01L2224/27013 , H01L2224/29101 , H01L2224/2929 , H01L2224/29339 , H01L2224/29499 , H01L2224/32014 , H01L2224/32245 , H01L2224/33181 , H01L2224/40247 , H01L2224/4899 , H01L2224/73263 , H01L2224/83051 , H01L2224/83101 , H01L2224/83139 , H01L2224/83192 , H01L2224/83801 , H01L2224/83815 , H01L2224/8385 , H01L2224/83855 , H01L2224/83862 , H01L2224/83885 , H01L2224/84801 , H01L2224/8485 , H01L2225/1029 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01057 , H01L2924/01067 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/0781 , H01L2924/10253 , H01L2924/1306 , H01L2924/14 , H01L2924/16195 , H01L2924/181 , H01L2924/1815 , H01L2924/30107 , H01L2924/3011 , H01L2924/351 , H01L2924/00 , H01L2924/07025 , H01L2924/3512 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207 , H01L2224/37099 , H01L2224/37599
Abstract: 树脂密封的半导体封装的辐射性能得到提高并且其出产量增加。与半导体芯片的背表面漏极电极相耦合的漏极端子在密闭树脂部分的背表面处暴露。下述部分以及端子的一部分在密闭树脂部分的顶表面处暴露:与半导体芯片的源极焊盘电极相耦合的源极端子的第一部分以及与半导体芯片的栅极焊盘电极相耦合的栅极端子。源极端子以及栅极端子的第二部分的剩余部分暴露在密闭树脂部分的背表面处。当制备这种半导体器件时,在漏极端子和半导体芯片之间放置键合材料和膜构件。同时,在源极端子3和栅极端子以及半导体芯片之间放置膏状键合材料和膜构件。该膏状键合材料被固化并且变成键合材料。使用膜构件的结果是,键合材料厚度的变化被抑制。