公开(公告)号：KR1020140003085A

公开(公告)日：2014-01-09

申请号：KR1020120070643

申请日：2012-06-29

Applicant: 고려대학교 산학협력단

Inventor： 민남기 ,  홍현표 ,  정경훈

IPC: G01N27/22

Abstract: The capacitive humidity sensor of the present invention comprises an insulation substrate, a lower electrode positioned on the insulation substrate and having electric conductivity, a humidity sensitive membrane pattern positioned on the lower electrode and enabling outer moisture to permeate, and an upper electrode positioned on the humidity sensitive membrane pattern and made of a porous carbon nanotube.

Abstract translation: 本发明的电容式湿度传感器包括绝缘基板，位于绝缘基板上并具有导电性的下电极，位于下电极上的湿敏膜图案，能够使外部水分渗透，上电极位于 湿度敏感膜图案，由多孔碳纳米管制成。