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公开(公告)号：KR101301953B1
公开(公告)日：2013-08-30
申请号：KR1020110089514
申请日：2011-09-05
Applicant: 국민대학교산학협력단
IPC: G01N27/406 , G01N27/02 , C23C16/448 , B82Y40/00
Abstract: 원자층 증착법을 이용하여 형성된 금속산화물 나노튜브를 이용한 센서, 및 이의 제조 방법에 관한 것이다.
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公开(公告)号：KR1020130026106A
公开(公告)日：2013-03-13
申请号：KR1020110089514
申请日：2011-09-05
Applicant: 국민대학교산학협력단
IPC: G01N27/406 , G01N27/02 , C23C16/448 , B82Y40/00
Abstract: PURPOSE: A sensor using a metal oxide nanotube and a manufacturing method of the same are provided to facilitate to change the structure of a nanotube and to adjust the wall thickness of the nanotubes by an atomic layer unit by manufacturing the nanotube through an atomic deposition layer. CONSTITUTION: A manufacturing method for a sensor using metal oxide nanotube(110) comprises the following steps: forming an aluminum oxide nanotube mold; forming a metal oxide thin film on the mold surface of aluminum oxide nanotube with an atomic layer deposition; forming the dual-structured nanotube of an aluminum oxide mold and a metal oxide thin film; depositing a first electrode(130) to the first tip end of the dual-structured nanotube of an aluminum oxide mold and a metal oxide thin film; partially exposing the metal oxide thin film by partially removing the aluminum oxide nanotube mold in the second tip end of the dual-structured nanotube of an aluminum oxide mold and a metal oxide thin film; depositing a second electrode(120) to the second tip end to which metal oxide thin film is partially exposed; and forming a metal oxide nanotube which is equipped with the first and second tip ends by removing the remained aluminum oxide nanotube mold.
Abstract translation: 目的：提供使用金属氧化物纳米管的传感器及其制造方法，以便于改变纳米管的结构，并且通过原子沉积层制造纳米管通过原子层单元调节纳米管的壁厚 。 构成：使用金属氧化物纳米管（110）的传感器的制造方法包括以下步骤：形成氧化铝纳米管模具; 在原子层沉积的氧化铝纳米管的模具表面上形成金属氧化物薄膜; 形成氧化铝模具和金属氧化物薄膜的双结构纳米管; 将第一电极（130）沉积到氧化铝模具和金属氧化物薄膜的双结构纳米管的第一末端; 通过部分去除氧化铝模具和金属氧化物薄膜的双结构纳米管的第二末端中的氧化铝纳米管模具来部分地暴露金属氧化物薄膜; 将第二电极（120）沉积到金属氧化物薄膜部分暴露的第二尖端; 以及通过除去剩余的氧化铝纳米管模具形成配备有第一和第二末端的金属氧化物纳米管。
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