公开(公告)号：KR101274026B1

公开(公告)日：2013-06-12

申请号：KR1020120139458

申请日：2012-12-04

Applicant: 국방과학연구소

Inventor： 이강일 ,  김치연 ,  김선호 ,  김남환 ,  박용수

IPC: G01J5/20

CPC classification number: G01J5/26 ,  G01J5/024 ,  G01J5/0853 ,  H01L27/142

Abstract: PURPOSE: A bolometer infrared sensor with improved uniformity of resistance between processes and a manufacturing method thereof are provided to avoid a change in the performance of a bolometer generated when the specific resistances of the infrared sensors are not identical by a deviation between sensors. CONSTITUTION: A bolometer infrared sensor with improved resistance uniformity between processes comprises a silicon substrate(510), a reflective plate(520), a metal support column(530), a first support layer(550), an absorbing layer(551), a temperature-sensitive resistor(540), a connection leg(542), and a second support layer(560). The silicon substrate includes a signal acquisition circuit. The reflective plate is formed on the silicon substrate and reflects infrared rays. The metal support column is formed on the reflective plate. The first support layer is connected to the metal support column and provides a structure thermally isolated. The absorbing layer is formed on the first support layer, thereby improving an absorption rate of the infrared rays becoming incident. The temperature-sensitive resistor is formed on the absorbing layer, and the resistance thereof is changed when temperature is changed by the infrared rays absorbed by the absorbing layer.

Abstract translation: 目的：提供了具有改进的工艺电阻均匀性的辐射热量计红外传感器及其制造方法，以避免当红外传感器的比电阻不同于传感器之间的偏差时产生的测辐射热表的性能变化。 构造：具有改进的工艺电阻均匀性的测辐射热计红外传感器包括硅衬底（510），反射板（520），金属支撑柱（530），第一支撑层（550），吸收层（551） 温度敏感电阻器（540），连接支脚（542）和第二支撑层（560）。 硅衬底包括信号采集电路。 反射板形成在硅基板上并反射红外线。 金属支撑柱形成在反射板上。 第一支撑层连接到金属支撑柱并提供热隔离的结构。 吸收层形成在第一支撑层上，从而提高红外线入射的吸收率。 感温电阻器形成在吸收层上，并且当由吸收层吸收的红外线改变温度时，其电阻改变。