公开(公告)号：KR102114500B1

公开(公告)日：2020-05-22

申请号：KR1020140005497

申请日：2014-01-16

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 간바라게이타 ,  사토나오유키 ,  이시카와다쿠야

IPC: H01L21/3065 ,  H01L21/205

公开(公告)号：KR1020140095018A

公开(公告)日：2014-07-31

申请号：KR1020140005497

申请日：2014-01-16

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 간바라게이타 ,  사토나오유키 ,  이시카와다쿠야

IPC: H01L21/3065 ,  H01L21/205

CPC classification number: H01J37/32642

Abstract: Provided is a method of affixing a heat transfer sheet that can achieve high heat transfer efficiency between a table and a focus ring. There is provided a heat transfer sheet affixing method where a focus ring is pressed by a pressing part to a heat transfer sheet placed on a heat transfer sheet mounting part of a plasma processing apparatus to affix the heat transfer sheet to the focus ring. The method includes the steps of reducing a pressure to place the heat transfer sheet in a reduced-pressure atmosphere; heating the heat transfer sheet; and pressing the focus ring by the pressing part to the heat transfer sheet, wherein the reducing step, the heating step, and the pressing step are performed concurrently at least for a predetermined period of time.

Abstract translation: 提供了一种固定可在桌子和聚焦环之间实现高传热效率的传热片材的方法。 提供了一种传热片固定方法，其中聚焦环通过按压部分被压在放置在等离子体处理设备的传热片安装部分上的传热片上，以将传热片固定到聚焦环。 该方法包括降低压力以将传热片放置在减压气氛中的步骤; 加热传热片; 并且通过所述按压部将所述聚焦环按压到所述传热片，其中所述还原步骤，加热步骤和所述按压步骤至少同时进行预定时间段。