公开(公告)号：KR101569561B1

公开(公告)日：2015-11-16

申请号：KR1020120146075

申请日：2012-12-14

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 구사카베요시노리 ,  야마가겐이치

IPC: H01L21/31 ,  H01L21/22 ,  C23C16/44

Abstract: 본발명은열부하및 진동, 충격에의한부하에강한열처리장치용열교환기및 이것을구비한열처리장치를제공한다. 열교환기(25)는, 박판을적층해서교대로공기통로와냉각수통로를형성한코어(251)와, 코어(251)를수용하는케이스(252)와, 코어(251)에삽입되고, 코어(251) 내에형성된각 층의냉각수통로에냉각수를분배공급하는복수의수냉배관(257)과, 복수의수냉배관(257)이하나의연결된배관으로되도록용접되는배관용접부(257a)를구비하고, 배관용접부(257a)는케이스(252) 외부에설치되어있다.

公开(公告)号：KR1020130069488A

公开(公告)日：2013-06-26

申请号：KR1020120146075

申请日：2012-12-14

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 구사카베요시노리 ,  야마가겐이치

IPC: H01L21/31 ,  H01L21/22 ,  C23C16/44

CPC classification number: H01L21/67098 ,  H01L21/67017 ,  H01L21/67248

Abstract: PURPOSE: A heat exchanger for a heating treatment apparatus and heating treatment apparatus including it can prevent fatigue failure of the core and water leakage from the core due to fatigue failure. CONSTITUTION: A core (251) forms an air passage and cooling water passage. A case (252) accommodates the core. A water cooling pipe system (257) supplies cooling water to the cooling water passage. A pipe laying welding part (257a) is installed outside the case. A water cooling pipe connector (253a) is connected to the cooling water passage. A water cooling pipe connector (253b) is connected to cooling water exit.

Abstract translation: 目的：一种用于加热处理装置和包括其的加热处理装置的热交换器可以防止芯部的疲劳破坏和由于疲劳破坏而导致的芯漏水。 构成：一个核心（251）形成一个空气通道和冷却水通道。 壳体（252）容纳核心。 水冷管道系统（257）向冷却水通道供给冷却水。 管外敷设焊接部件（257a）。 水冷管连接器（253a）连接到冷却水通道。 水冷管连接器（253b）与冷却水出口连接。