公开(公告)号：KR1020140118883A

公开(公告)日：2014-10-08

申请号：KR1020140035778

申请日：2014-03-27

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 마츠우라히로유키 ,  히로타노부유키 ,  다카도마코토

IPC: H01L21/67

CPC classification number: H01L21/67017 ,  Y10T137/0396 ,  Y10T137/87169 ,  H01L21/67253

Abstract: An objective of the present invention is to provide a processing method which enables a pressure within a processing container to reach a desired pressure value or a desired pressure range in a short time. A processing method is provided in which an object to be processed is processed within a processing container connected to a gas supply system, an exhaust system and an opening degree variable valve by using a processing gas in a plurality of sequential processing steps. The processing method includes: an acquisition process for acquiring an opening degree of the opening degree variable valve corresponding to a target pressure value within the processing container under a predetermined processing condition for at least one of the plurality of sequential processing steps; and an execution process for executing the one of the sequential processing steps for which the opening degree has been acquired by the acquisition process with the opening degree.

Abstract translation: 本发明的目的是提供一种使处理容器内的压力在短时间内达到所需压力值或期望压力范围的处理方法。 提供一种处理方法，其中通过在多个顺序处理步骤中使用处理气体，在连接到气体供应系统，排气系统和开度可变阀的处理容器内处理待处理物体。 处理方法包括：获取处理，用于在多个顺序处理步骤中的至少一个处理条件下，在预定处理条件下获取与处理容器内的目标压力值相对应的开度可变阀的开度; 以及执行处理，用于执行通过获取过程以开度获得了开放度的顺序处理步骤中的一个。