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公开(公告)号：KR102172305B1
公开(公告)日：2020-10-30
申请号：KR1020187031146
申请日：2017-03-24
Applicant: 도쿄엘렉트론가부시키가이샤
Inventor： 바셋데렉 , 프린츠월리스피. , 로톤다로안토니오엘.피. , 미나미데루오미 , 후루카와다카히로
IPC: H01L21/306 , H01L21/3213 , H01L21/67 , H01L21/02
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