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公开(公告)号：KR102161875B1
公开(公告)日：2020-10-05
申请号：KR1020170100070
申请日：2017-08-08
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02 , H01L21/67 , H01L21/687 , C23C16/455
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