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公开(公告)号：KR101849799B1
公开(公告)日：2018-04-17
申请号：KR1020130016257
申请日：2013-02-15
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02
Abstract: 본발명의과제는약액중의불순물을제거하는필터에포함되는기체를제거하는기술을제공하는것이다. 약액중의불순물을제거하기위한필터(42)를구비한필터부(4)에, 웨이퍼(W)의액 처리시에약액을통류시킬때의압력보다높은압력으로액체를공급한다. 이에의해, 필터내의액체에가해지는압력이높아지므로, 이액체의액압에의해필터에포함되는기체가약액에용해되고, 이렇게해서, 필터(42) 내의기체를제거할수 있다. 계속해서, 약액을상기필터(4)를통해도포모듈(8)의도포노즐(85)에공급함으로써, 불순물및 기체함유량이매우적은약액을사용해서웨이퍼(W)에대하여액 처리를행할수 있어, 결함의발생을억제할수 있다.
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公开(公告)号：KR101907351B1
公开(公告)日：2018-10-11
申请号：KR1020180041680
申请日：2018-04-10
Applicant: 도쿄엘렉트론가부시키가이샤
Abstract: 본발명의과제는약액중의불순물을제거하는필터에포함되는기체를제거하는기술을제공하는것이다. 약액중의불순물을제거하기위한필터(42)를구비한필터부(4)에, 웨이퍼(W)의액 처리시에약액을통류시킬때의압력보다높은압력으로액체를공급한다. 이에의해, 필터내의액체에가해지는압력이높아지므로, 이액체의액압에의해필터에포함되는기체가약액에용해되고, 이렇게해서, 필터(42) 내의기체를제거할수 있다. 계속해서, 약액을상기필터(4)를통해도포모듈(8)의도포노즐(85)에공급함으로써, 불순물및 기체함유량이매우적은약액을사용해서웨이퍼(W)에대하여액 처리를행할수 있어, 결함의발생을억제할수 있다.
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公开(公告)号：KR1020130094755A
公开(公告)日：2013-08-26
申请号：KR1020130016257
申请日：2013-02-15
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02
CPC classification number: H01L21/67017 , B01D17/00 , B05B12/1472
Abstract: PURPOSE: A liquid treatment method and a device of removing gas in a filter remove the gas in the filter by supplying a liquid having higher pressure than the pressure when a medicinal fluid flows in a liquid treatment process of a substrate to the filter. CONSTITUTION: A liquid is supplied to a filter unit (4) with higher pressure than the pressure when a medicinal fluid flows in a liquid treatment process. The filter unit has a filter for removing impurities in the medicinal fluid. Gas included in the filter by the liquid pressure of the liquid is dissolved in the medicinal fluid because the pressure applied to the liquid in the filter is increased. The medicinal fluid is supplied to an application nozzle (85) through the filter. [Reference numerals] (1) Undercurrent unit; (3) Medium tank; (4) Filter unit; (5) Pump; (6) Degassing module; (7) Gas concentration detection unit
Abstract translation: 目的：一种液体处理方法和一种除去过滤器中的气体的装置，通过在基板的液体处理过程中将药物流体流过压力的压力提供给压滤器，从而去除过滤器中的气体。 构成：当药液在液体处理过程中流动时，将液体提供给压力高于压力的过滤器单元（4）。 过滤器单元具有用于除去药液中的杂质的过滤器。 由于施加到过滤器中的液体的压力增加，被液体的液体压力包含在过滤器中的气体溶解在药液中。 药液通过过滤器供给到施用喷嘴（85）。 （附图标记）（1）欠流单元; （3）中罐; （4）过滤单元; （5）泵; （6）脱气模块; （7）气体浓度检测单元
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