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公开(公告)号：KR101678248B1
公开(公告)日：2016-11-21
申请号：KR1020120038520
申请日：2012-04-13
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02 , H01L21/67 , C11D7/50 , C11D11/00 , H01L21/768
CPC classification number: H01L21/67051 , C11D7/5004 , C11D11/0047 , H01L21/02057 , H01L21/76898
Abstract: 본발명은, 기판의표면에형성된오목부의내부를약액에의해처리하는데 있어서, 오목부내부에신속하게약액을침입시키는것을목적으로한다. 액처리방법은, 약액보다표면장력이작은유기용제를기판에공급하여오목부의내부를적시는프리웨트공정과, 그후, 약액을포함하는세정액을기판에공급하여, 오목부내부의액체를약액으로치환하여, 이약액에의해상기오목부의내부를세정하는약액세정공정을포함하고있다.
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公开(公告)号：KR1020120117678A
公开(公告)日：2012-10-24
申请号：KR1020120038520
申请日：2012-04-13
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/02 , H01L21/67 , C11D7/50 , C11D11/00 , H01L21/768
CPC classification number: H01L21/67051 , C11D7/5004 , C11D11/0047 , H01L21/02057 , H01L21/76898 , H01L21/02052 , H01L21/02046 , H01L21/67034
Abstract: PURPOSE: A liquid processing method, a liquid processing apparatus, and a storage medium are provided to quickly fill the inside of a concave part with the chemical by substituting an organic solvent with the chemical in the concave part. CONSTITUTION: A chemical nozzle(20) discharges cleaning solutions with the chemical. An organic solvent nozzle(22) discharges organic solvents with smaller surface tension than the chemical. An organic solvent supply device(22a,22b,22c) supplies the organic solvent to the organic solvent nozzle. A chemical supply device(20a,20b,20c) supplies the chemical to the chemical nozzle. A control unit(100) performs a pre-wet process for supplying the organic solvent to a substrate maintained by a substrate maintaining unit by controlling the organic solvent supply device and the chemical supply device and then supplies the chemical to the substrate.
Abstract translation: 目的：提供一种液体处理方法，液体处理装置和存储介质，以通过在凹部中用化学品代替有机溶剂来快速地填充化学品的凹部内部。 构成：化学喷嘴（20）用化学品排出清洁溶液。 有机溶剂喷嘴（22）排出比化学品更小的表面张力的有机溶剂。 有机溶剂供给装置（22a，22b，22c）将有机溶剂供给到有机溶剂喷嘴。 化学品供应装置（20a，20b，20c）将化学品供应给化学喷嘴。 控制单元（100）通过控制有机溶剂供应装置和化学品供应装置进行用于将有机溶剂供给到由基板保持单元维持的基板的预湿处理，然后将该化学品供给到基板。
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