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    프라이밍 처리 방법 및 프라이밍 처리 장치
    1.
    发明公开
    프라이밍 처리 방법 및 프라이밍 처리 장치 有权
    预处理方法和预处理处理装置

    公开(公告)号：KR1020110000530A

    公开(公告)日：2011-01-03

    申请号：KR1020100060476

    申请日：2010-06-25

    Applicant: 도쿄엘렉트론가부시키가이샤 ,  히라따기꼬오 가부시키가이샤

    Inventor： 미야자끼후미히로 ,  나까미쯔다까시 ,  야마사끼쯔요시 ,  오니즈까야스유끼 ,  나가따요시히사

    IPC: H01L21/027

    CPC classification number: H01L21/0274 ,  G03F7/2041 ,  G03F7/70341 ,  G03F7/70916

    Abstract: PURPOSE: A priming processing method and a priming processing device are provided to reduce a drying time and extend the lifespan of a cleaning apparatus by saving a cleaning solution used in priming processing. CONSTITUTION: An opening(12) of a slit type is formed on the top of a housing(10). A rotation tool(16) rotates a priming roller(14). The cleaning pad(20) of a cleaning process part(18) is arranged within the housing. The cleaning solution nozzle(28) is arranged in the upper part of the cleaning pad(20). A filter(36) and a valve(37) for eliminating impurity from the cleaning solution are installed in a piping(34).

    Abstract translation: 目的：提供一种起动处理方法和起泡处理装置，通过保存用于起动处理中的清洗溶液来减少干燥时间并延长清洁装置的使用寿命。 构成：在壳体（10）的顶部上形成狭缝型的开口（12）。 旋转工具（16）旋转起动辊（14）。 清洁处理部件（18）的清洁垫（20）布置在壳体内。 清洁溶液喷嘴（28）布置在清洁垫（20）的上部。 用于从清洗液中除去杂质的过滤器（36）和阀（37）安装在管道（34）中。

    기판 처리 장치
    2.
    发明公开
    기판 처리 장치 无效
    基板加工设备

    公开(公告)号：KR1020080061298A

    公开(公告)日：2008-07-02

    申请号：KR1020070137143

    申请日：2007-12-26

    Applicant: 도쿄엘렉트론가부시키가이샤

    Inventor： 이나마스도시후미 ,  오오따요시하루 ,  이께다후미히꼬 ,  야마사끼쯔요시 ,  오오쯔까요시따까

    IPC: H01L21/027 ,  H01L21/677

    CPC classification number: H01L21/0274 ,  G03F7/2041 ,  G03F7/70716 ,  H01L21/67721

    Abstract: A substrate processing apparatus is provided to simplify a transfer unit and reduce a fabricating cost by disposing a plurality of side rollers on both sides of a stage wherein the rollers are located in a line at a predetermined pitch and by rotating the side roller to transfer a substrate. While a processed substrate(G) of a quadrangular type floats on a stage extended in an almost horizontal transfer direction by gas pressure to be transferred in the transfer direction, predetermined liquid, gas, light or heat from a tool disposed along the stage is supplied to the substrate to perform a predetermined treatment process. A plurality of side rollers(110) are disposed on both sides of the stage wherein the side rollers are located in a line at a predetermined pitch so that both lateral ends of the substrate floating on the stage are mounted on the outer circumferential surface of the roller, and the side roller is rotated to transfer the substrate. An absorption hole for absorbing gas at a negative pressure is formed in a point of the upper surface of the stage adjacent to the side roller, and absorption force from the absorption hole is supplied downward to the substrate to increase friction between the substrate and the side roller.

    Abstract translation: 提供了一种基板处理装置，以简化传送单元并且通过在辊的两侧设置多个侧辊并且以预定间距设置在一条线中并且通过使侧辊转动来转移 基质。 虽然四边形类型的被处理基板（G）在沿着传送方向传送的气体压力的大致水平传送方向上延伸的台上浮动，但是提供了沿着设置在台架上的工具的预定液体，气体，光或热量 以进行预定处理。 多个侧辊（110）设置在工作台的两侧，其中侧辊以预定间距位于一条直线上，使得漂浮在工作台上的衬底的两个侧端安装在 辊，并且侧辊旋转以转移基板。 在与侧辊相邻的台的上表面上形成有用于吸收负压的气体的吸收孔，并且从吸收孔的吸收力向下供给到基板，以增加基板与侧面之间的摩擦 滚筒。

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