公开(公告)号：KR100978409B1

公开(公告)日：2010-08-26

申请号：KR1020080027985

申请日：2008-03-26

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 스에키히데히토 ,  오노요시히사 ,  나카야마히데키

IPC: H01L21/68

公开(公告)号：KR1020080087739A

公开(公告)日：2008-10-01

申请号：KR1020080027985

申请日：2008-03-26

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 스에키히데히토 ,  오노요시히사 ,  나카야마히데키

IPC: H01L21/68

Abstract: A cable wiring structure and a substrate transfer mechanism are provided to suppress a load applied to each of filaments of a cable and predict easily a shape and a track of each of the filaments. A casing(110) includes a cable wiring space(116). A rotary member is rotatably arranged to observe the cable wiring space of the casing. A flat cable is formed by integrating and bonding a plurality of band-shaped filaments with each other. Each of the filaments is arranged in a vertical direction and is formed in the rotary member to be stored in the cable wiring space. One end of the flat cable is attached to a position apart from the center of the rotary member. The other end of the flat cable is attached to the casing. A wiring diameter of the flat cable is increased toward the cable wiring space.

Abstract translation: 提供了电缆布线结构和基板传送机构，以抑制施加到电缆的每个细丝上的负载，并且容易地预测每个长丝的形状和轨迹。 壳体（110）包括电缆布线空间（116）。 旋转构件可旋转地布置以观察壳体的电缆布线空间。 扁平电缆通过将多个带状长丝彼此结合并结合而形成。 每个灯丝沿垂直方向布置并形成在旋转件中，以被存储在电缆布线空间中。 扁平电缆的一端安装在离开旋转体中心的位置。 扁平电缆的另一端连接到外壳。 扁平电缆的布线直径增加到电缆布线空间。