公开(公告)号：KR1020130142943A

公开(公告)日：2013-12-30

申请号：KR1020130069880

申请日：2013-06-18

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 바바노리오 ,  오바라히데유키 ,  고콘기요히코 ,  나카지마와타루

IPC: H01L21/677 ,  B65G49/07

CPC classification number: H01L21/67742 ,  H01L21/67389 ,  H01L21/67757 ,  H01L21/68742

Abstract: A project of the present invention is to prevent the contamination on a substrate caused by particles generated in a lifting device for lifting a holding-supporting unit when returning the substrate by holding and supporting the substrate. A gas inlet (53) for sucking the particles is arranged toward a ball screw (4) between an arm (3) for returning a wafer (W) by holding and supporting the wafer and a ball screw (4) which is a device for lifting the arm (3). A local exhaust duct (40) formed in the longitudinal direction of the ball screw (4) is arranged. Furthermore, the local exhaust duct (5) is arranged to closely adhere to the ball screw (4).

Abstract translation: 本发明的一个方案是防止由提升装置中产生的颗粒引起的基板上的污染，以通过保持和支撑基板返回基板来提升保持支撑单元。 用于吸引颗粒的气体入口（53）朝向用于通过保持和支撑晶片而返回晶片（W）的臂（3）之间的滚珠丝杠（4）布置;以及滚珠丝杠（4），其是用于 抬起手臂（3）。 布置有沿滚珠丝杠（4）的纵向方向形成的局部排气管道（40）。 此外，局部排气管道（5）布置成紧密地附着在滚珠丝杠（4）上。

公开(公告)号：KR101646824B1

公开(公告)日：2016-08-08

申请号：KR1020130069880

申请日：2013-06-18

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 바바노리오 ,  오바라히데유키 ,  고콘기요히코 ,  나카지마와타루

IPC: H01L21/677 ,  B65G49/07

Abstract: 본발명의과제는, 보유지지부에의해기판을보유지지하여반송하는데 있어서, 보유지지부를승강시키기위한승강기구에있어서발생하는파티클에의한기판의오염을억제하는것이다. 웨이퍼(W)를보유지지하여반송하기위한아암(3)과, 당해아암(3)을승강시키기위한승강기구인볼 나사(4) 사이에, 파티클을흡입하기위한가스흡입구(53)가볼 나사(4)측을향하도록, 또한당해볼 나사(4)의길이방향을따라형성된국소배기덕트(50)를배치한다. 또한, 이볼 나사(4)에대해국소배기덕트(50)를근접배치한다.