公开(公告)号：KR101261706B1

公开(公告)日：2013-05-06

申请号：KR1020100121520

申请日：2010-12-01

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 미나미마사토 ,  오쿠야마고이치

IPC: H01L21/683 ,  H01L21/3065 ,  H01L21/687

Abstract: 본발명의과제는기판에손상을일으키는일없이, 에칭얼룩의발생을효과적으로방지하는것이가능한탑재대를제공하는것이다. 탑재대(5A)는, 예를들어알루미늄이나스테인리스강(SUS) 등의도전성재료로형성된기재(7)와, 기재(7)상에마련된절연막(8)을구비하고있다. 절연막(8)의상면은 FPD용유리기판(S)을탑재하는기판탑재면(50)으로되어있다. 기판탑재면(50)은, 표면거칠기(Ra)가 2㎛이상 6㎛이하인거친표면을갖는조면화부(51)와, 이조면화부(51)의주위를둘러싸는표면거칠기(Ra)가 2㎛미만인평활부(53)를갖고있다.

公开(公告)号：KR1020110061506A

公开(公告)日：2011-06-09

申请号：KR1020100121520

申请日：2010-12-01

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 미나미마사토 ,  오쿠야마고이치

IPC: H01L21/683 ,  H01L21/3065 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H02N13/00

Abstract: PURPOSE: A substrate mounting table, manufacturing method thereof, and substrate processing device are provided to suppress changes in thermal conduction efficiency and conduction efficiency, thereby eliminating irregularity such an etching blur. CONSTITUTION: A mounting table(5A) includes a conductive material and an insulating film(8). The insulating film is placed on a base material. A glass substrate for an FPD is mounted on a substrate mounting surface. The substrate mounting surface includes a roughening part(51) and a smoothing part(53). The roughness of the surface of the roughening part is larger than 2 micro meters and smaller than 6 micro meters. The roughness of the surface of the smoothing part is smaller than 2 micro meters.

Abstract translation: 目的：提供一种基板安装台及其制造方法和基板处理装置，以抑制导热效率和导通效率的变化，从而消除诸如蚀刻模糊的不规则性。 构成：安装台（5A）包括导电材料和绝缘膜（8）。 将绝缘膜放置在基材上。 用于FPD的玻璃基板安装在基板安装表面上。 基板安装面包括粗糙部（51）和平滑部（53）。 粗糙部分的表面粗糙度大于2微米，小于6微米。 平滑部分的表面粗糙度小于2微米。